2016 Fiscal Year Final Research Report
Ghost Imaging Ellipsometry
| Project/Area Number |
15K13914
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Osaka University |
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Principal Investigator |
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| Project Period (FY) |
2015-04-01 – 2017-03-31
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| Keywords | ゴーストイメージング / エリプソメトリ / 偏光計測 / 画像計測 / 高感度画像計測 |
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| Outline of Final Research Achievements |
2D measurement method for an phase-modulated ellipsometry (PME) was developed by applying the computational ghost imaging (CGI). The PEM was useful method for detecting elliptical parameters preciously. However there is a problem for detecting the 2D distribution because of using high frequency modulated signals. To overcome the problem, we focused on the CGI which can be constructed by single pixel detector. DMD projector was used as a light source in the proposed PME optical setup. As a results, we have succeeded to detect correlation signals and 2D distribution of the elliptical parameters of silicon wafer and Au thin film.
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| Free Research Field |
精密計測
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