2006 Fiscal Year Final Research Report Summary
Research on fundamental technologies for processing of electronic materials by synchrotron light-excited process
| Project/Area Number |
16560012
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Applied materials science/Crystal engineering
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| Research Institution | Saga University |
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Principal Investigator |
NISHIO Mitsuhiro Saga Univ., Fac. Of Sci. & Eng., Professor, 理工学部, 教授 (60109220)
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| Co-Investigator(Kenkyū-buntansha) |
OGAWA Hiroshi Saga Univ., Synctrotron light research center, Professor, シンクロトロン応用研究センター, 教授 (10039290)
TANAKA Tooru Saga Univ., Synctrotron light research center, Assistant, シンクロトロン応用研究センター, 助手 (20325591)
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| Project Period (FY) |
2004 – 2006
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| Keywords | Synchrotron light-excited process / Electronic material / etching / epitaxial growth |
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| Research Abstract |
Synchrotron light-excited etching of ZnTe as an example of electronic material has been demonstrated. In the case of SF_6 gas, the ZnTe was not etched but thin film of a fluorine containing material, e.g. ZnF2, was deposited on the surface of ZnTe. On the other hand, ZnTe was etched effectively by using Ar gas under the negative sample bias to the sample. The etched pattern obtained by placing a Ni mesh showed that only the irradiated area was etched. The etching mechanism has been investigated. A new beamline for the development of advanced materials and processing has been designed and constructed in order to utilize synchrotron light source built by Saga Prefectural Government. Furthermore, the processing of electronic materials containing epitaxial growth, doping, etching and annealing procedures has been carried out in our laboratory as prelimary experiments for the processing using synchrotron light.
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Research Products
(10 results)
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[Journal Article] Design of Beamline BL9 at Saga Light Source2007
Author(s)
Tooru Tanaka, Hiroshi Ogawa, Masao Kamada, Mitsuhiro Nishio, Masataka Masuda, Qixin Guo, Kazuki Hayashida, Yuzi Kondo, Teruaki Motooka, Daisuke Yoshimura, Hiroyuki Setoyama, Toshihiro Okajima
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Journal Title
AIP series of conference proceedings 879
Pages: 559
Description
「研究成果報告書概要(和文)」より
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[Journal Article] Design of Beamline BL9 at Saga Light Source2007
Author(s)
Tooru Tanaka, Hiroshi Ogawa, Masao Kamada, Mitsuhiro Nishio, Masataka Masuda, Qixin Guo, Kazuki Hayashida, Yuzi Kondo, Teruaki Motooka, Daisuke Yoshimura, Hiroyuki Setoyama, Toshihiro Okajima
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Journal Title
AIP series of conference proceedings Vol.879
Pages: 559-562
Description
「研究成果報告書概要(欧文)」より
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