2007 Fiscal Year Final Research Report Summary
Development of nano-scale surface treatment system using vacuum vapor deposition technique
Project/Area Number |
17206015
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Research Category |
Grant-in-Aid for Scientific Research (A)
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Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Design engineering/Machine functional elements/Tribology
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Research Institution | The University of Tokyo |
Principal Investigator |
KATO Takahisa The University of Tokyo, Department of Mechanical Engineering, Professor (60152716)
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Co-Investigator(Kenkyū-buntansha) |
CHOI Junho The University of Tokyo, Department of Mechanical Engineering, Lecturer (30392632)
TAURA Hiroo Nagaoka University of Technology, Department of Mechanical Engineering, Research Associate (20334691)
TANAKA Kentaro Tokyo University of Marine Science and Technology, Department of Marine Electronics and Mechanical Engineering, Associate Professor (60359693)
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Project Period (FY) |
2005 – 2007
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Keywords | Nano-scale lubricant film / Surface modification / Diamond-like carbon film / Self-assembled monolayer / Vapor deposition / Molecular dynamic simulation / Adsorption / Acoustic emission |
Research Abstract |
Ultrathin organic films with thickness on the order of monolayers have been a subject of great interest as boundary lubricant films in the fields of microelectromechanical systems (MEMS), nanoimprint and magnetic storage devices. The alkylsilane self-assembled monolayers (SAMs) or perfluoropolyethers (PFPE) with reactive end groups are examples that have been used for such a purpose. To obtain an adequate lifetime of a solid surface, organic silane or PFPE molecules should be strongly adsorbed on the solid surfaces. The adsorption properties of the organic molecules on the solid surfaces depend on the areal density of adsorption sites on the solid surfaces. On the other hand, diamond-like carbon (DLC) films have attracted much interest in the past three decades due to their high hardness, chemical inertness, extremely low friction and high wear resistance. Generally, organic thin films are deposited on DLC surfaces using dip coating or immersion methods in the atmosphere, which use sol
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utions containing the target lubricant molecules. The exposure of freshly deposited carbon films to the atmosphere is undesirable because the main adsorption sites of the lubricant molecules such as dangling bonds are reduced owing to surface oxidation and contamination. In vacuum vapor deposition, the deposition of carbon films and the fixing of lubricant molecules on the deposited carbon surfaces can be accomplished in a vacuum. In the present study, the surface oxidation and contamination of the freshly deposited carbon surfaces could be avoided, and strong lubricant bonding could be achieved by using the vacuum vapor deposition process. The structure and chemical composition of DLC films can be modified by the incorporation of elements such as F, N, O, Si and some metals into the carbon films. Since the surface chemistry and structure of these carbon films differ, the bonding characteristics of the organic lubricant molecules to the carbon surfaces would be changed. In this study, we described the adsorption properties of organic molecules having a hydroxyl end group to various carbon films such as DLC (a-C:H), N-DLC (a-C:H:N) and Si-DLC (a-C:H:Si). We found that the addition of N and Si enhanced the adsorption properties of organic molecules to the DLC surfaces by changing the surface structure and chemistry of the DLC surfaces. Less
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Research Products
(112 results)
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[Presentation] Si-DLC膜の摩擦摩耗機構2007
Author(s)
崔〓豪, 角田篤史, 加藤孝久, 熊谷知久, 中尾節男, 池山雅美
Organizer
日本トライボロジー学会トライボロジー会議
Place of Presentation
佐賀
Year and Date
20070900
Description
「研究成果報告書概要(和文)」より
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[Presentation] 眼の潤滑システム2006
Author(s)
加藤孝久, 横井則彦, 山田英明
Organizer
日本トライボロジー学会トライボロジー会議
Place of Presentation
東京
Year and Date
20060500
Description
「研究成果報告書概要(和文)」より
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[Presentation] 動圧浮上遠心血液ポンプの開発2006
Author(s)
山根隆志, 西田正浩, 丸山修, 加藤孝久, 杉山大介, 大久保剛, 佐野岳志, 宮本祐介, 山海嘉之, 筒井達夫
Organizer
日本電気学会産業応用部門大会
Place of Presentation
高松
Year and Date
20060500
Description
「研究成果報告書概要(和文)」より
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