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2007 Fiscal Year Final Research Report Summary

Nano-analysis of occupation sites of impurity atoms and relation with functional characteristics

Research Project

Project/Area Number 17360012
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKyushu University

Principal Investigator

KUWANO Noriyuki  Kyushu University, Art, Science and Technology Center for Cooperative Research, Professor (50038022)

Co-Investigator(Kenkyū-buntansha) KANGAWA Yoshihiro  KYUSHU UNIVERSITY, Research Institute for Applied Mechanics, Associate Professor (90327320)
HATA Satoshi  KYUSHU UNIVERSITY, Interdisciplinary Graduate School of Engineering Sciences, Associate Professor (60264107)
Project Period (FY) 2005 – 2007
KeywordsIndium nitridp / Molecular beam enitaxv / Transmission electron microscopy / Oxygen atom / Energy gap / ALCHEMI / Crystal polarity / Interstitial atom site
Research Abstract

First of all, the method to prepare a high quality thin foil specimens for transmission electron microscope (TEM) observations was developed: It was confirmed that prior to focused ion beam (FIB) milling, a mesh-disk should be dimpled in order to make possible a final polishing with an Argon ion mill to remove damaged surface layers. The specimens for the present analyses were InN thin films grown by molecular beam epitaxy method (MBE) on a (0001) sapphire substrate. The content of oxygen in this InN thin films was analyzed separately to be 3% or less, and its energy gap was estimated by an optical absorption method to be approximately 1.2 eV. TEM analysis revealed that the InN thin film is composed of an aggregate of [0001] columnar crystals about 50 - 100 nm in diameter. The growth direction was [0001], but a-axis was oriented randomly on the growth plane. Convergent electron beam diffraction (CBED) analysis confirmed that the growth direction is N-polarity.
InN crystallizes in a wurtzite structure that has two positions for interstitials; T(x,y,z)=(0, 0, "5/8) and O(x,y,z)=(2/3, 1/3, "z).From the atom location enhanced microanalyses (ALCHEMI)with (0001) plane channeling, and (1-100) plane channeling revealed that impurity oxygen atoms occupy the nitrogen atoms sites instead of the interstitial sites. Under an assumption that such substitution generates one electron carrier per one oxygen atom, 3%oxygen is expected to raise the effective energy-gap by several tenth eV with an approximation of nearly free electron model. This result strongly suggests that the change in energy-gap is explained by Moss-Burstain model.
The results of the present research are quite important information that is useful to investigation of defect structures of InN, the diffusion process of oxygen atoms.

  • Research Products

    (20 results)

All 2008 2007 2006 2005

All Journal Article (4 results) (of which Peer Reviewed: 2 results) Presentation (16 results)

  • [Journal Article] Location of impurity oxygen atoms in InN grown by MBE2007

    • Author(s)
      S.Momii, D.Koba, N.Kuwano, S.Hata and M.Yoshimoto
    • Journal Title

      Proc. 3rd Asia-Pacific Workshop on Wide-gap Semiconductors (APWS-2007)

      Pages: 348-353

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] Location of impurity oxygen atoms in InN grown by MBE2007

    • Author(s)
      S., Momii, D., Koba, N., Kuwano, S., Hata, M., Yoshimoto
    • Journal Title

      Proc. 3rd Asia-Pacific Workshop on Wide-gap Semiconductors(APWS-2007)

      Pages: 348-353

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] InN polarity determination by convergent-beam electron diffraction2005

    • Author(s)
      T.Mitate, S.Mizuno, H.Takahara, R.Kakegawa, T.Matsuoka, N.Kuwano
    • Journal Title

      Appl. Phys. Lett 86

      Pages: 134103-1 134103-3

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
  • [Journal Article] InN polarity determination by convergent-beam electron diffraction2005

    • Author(s)
      T., Mitate, S., Mizuno, H., Takabara, R., Kakegawa, T., Matsuoka, N., Kuwano
    • Journal Title

      Appl. Phys. Lett 66

      Pages: 134103.1-134103.3

    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] MBE法で成長したIn(N,0)における酸素原子の占有位置のTEM-ALCHEMI解析2008

    • Author(s)
      木庭 大作、桑野 範之
    • Organizer
      第55回応用物理学会関係連合講演会
    • Place of Presentation
      日本大学(船橋市)
    • Year and Date
      20080327-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] TEM-ALCHEMI analysis of occupation sites of oxygen atoms in In(N, O) grown by MB2008

    • Author(s)
      D., Koba, N., Kuwano
    • Organizer
      55th Meeting(Spring) of Japan Society of Applied Physics
    • Place of Presentation
      Nihon University(Funabashi)
    • Year and Date
      20080327-30
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] FIB・マイクロサンプリング法による光機能材料のTEM試料作製2007

    • Author(s)
      釘山 裕太、横手 達徳、籾井 真介、肱黒 恵美、中原 陽一、桑野 範之 関口 隆史
    • Organizer
      日本顕微鏡学会第63回学術講演会
    • Place of Presentation
      新潟市 朱鷺メッセ
    • Year and Date
      20070520-22
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] TEM specimen preparation with FIB-μ-sampling unit for opto-functional materials2007

    • Author(s)
      Y., Kugiyama, T., Yokote, S., Momii, M., Hijikuro, Y., Nakahara, N., Kuwano, T., Sekiguchi
    • Organizer
      63rd Meeting of Japanese Society of Micrscopy
    • Place of Presentation
      Toki-Messe(Niigata)
    • Year and Date
      20070520-22
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] MBE法で作製したInN薄膜における不純物酸素の占有位置のTEMによる解析2007

    • Author(s)
      籾井 真介、桑野 範之、波多 聰 吉本 昌広
    • Organizer
      第54回応用物理学会関係連合講演会
    • Place of Presentation
      青山学院大学(相模原市)
    • Year and Date
      20070327-30
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] TEM analysis of location of impurity oxygen atoms in InN thin films grown by MB2007

    • Author(s)
      S., Momii, N., Kuwano, S., Hata, M., Yoshimoto
    • Organizer
      54th Meeting(Spring) of Japan Society of Applied Physics
    • Place of Presentation
      Aoyama-Gakuin University(Sagamihara)
    • Year and Date
      20070327-30
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Location of impurity oxygen atoms InN grown by MBE2007

    • Author(s)
      S.Momii, D.Koba, N.Kuwano S.Hata, M.Yoshimoto
    • Organizer
      3rd Asia-Pacific Workshop on Wide-gap Semiconductors (APWS-2007)
    • Place of Presentation
      Jeonju,Korea
    • Year and Date
      20070311-14
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Location of impurity oxygen atoms in InN grown by MBE2007

    • Author(s)
      S., Momii, D., Koba, N., Kuwano, S., Hata, M., Yoshimoto
    • Organizer
      3rd Asia-Pacific Workshop on Wide-gap Semiconductors(APWS-2007)
    • Place of Presentation
      Jeonju, Korea
    • Year and Date
      20070311-14
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Location of oxygen atoms in InN crystals2007

    • Author(s)
      D., Koba, N., Kuwano, S., Hata
    • Organizer
      49th Meeting of Kyushu Branch, Japanese Society of Microscopy
    • Place of Presentation
      Kyushu University(Kasuga)
    • Year and Date
      2007-12-02
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] InN結晶内に混入した酸素原子の占有サイトの特定2007

    • Author(s)
      木庭 大作、桑野 範之、波多 聴
    • Organizer
      第49回日本顕微鏡学会九州支部総会/学術講演会
    • Place of Presentation
      九州大学(春日市)
    • Year and Date
      2007-12-01
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] III族窒化物結晶に混入した酸素原子が物性値に与える影響2006

    • Author(s)
      籾井 真介、木庭 大作、桑野 範之、波多 聰
    • Organizer
      第48回日本顕微鏡学会九州支部総会/学術講演会
    • Place of Presentation
      長崎大学(長崎市)
    • Year and Date
      2006-12-02
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Influence of oxygen atoms to physical properties of III-group nitrides2006

    • Author(s)
      S., Momii, D., Koba, N., Kuwano, S., Hata
    • Organizer
      48th Meeting of Kyushu Branch, Japanese Society of Microscopy
    • Place of Presentation
      Nagasaki University(Nagasaki)
    • Year and Date
      2006-12-02
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] TEM Analysis of Polarity and Microstructure inGaN, AIGaN and InN Thin Films Grown by MOVPE2005

    • Author(s)
      N.Kuwano
    • Organizer
      13th Int. Workshop on the Physics of Semiconductor Devices
    • Place of Presentation
      NPL. New Dehli,India
    • Year and Date
      20051213-17
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] TEM Analysis of Polarity and Microstructure inGaN, AIGaN and InN Thin Films Grown by MOVPE2005

    • Author(s)
      N., Kuwano
    • Organizer
      13th Int. Workshop on the Physics of Semiconductor Devices
    • Place of Presentation
      NPL. New Dehli, India
    • Year and Date
      20051213-17
    • Description
      「研究成果報告書概要(欧文)」より
  • [Presentation] Polarity and microstrructure in InN thin layer grown by MOVPE2005

    • Author(s)
      N.Kuwano, Y.Nakabara, H.Amano
    • Organizer
      6th Int.Conf. Nitride Semiconductors (ICNS-6)
    • Place of Presentation
      Bremen, Germany
    • Year and Date
      20050828-0902
    • Description
      「研究成果報告書概要(和文)」より
  • [Presentation] Polarity and microstrructure in InN thin layer grown by MOVPE2005

    • Author(s)
      N., Kuwano, Y., Nakahara, H., Amano
    • Organizer
      6th Int. Conf. Nitride Semiconductors(ICNS-6)
    • Place of Presentation
      Bremen, Germany
    • Year and Date
      20050828-0902
    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2010-02-04  

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