2019 Fiscal Year Final Research Report
Investigation of thermal decomposition reaction on DLC films and improvement of heat-resisting property
| Project/Area Number |
17H03142
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2017-04-01 – 2020-03-31
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| Keywords | アモルファス炭素膜 / 水素 / 熱分解 / 耐熱性 |
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| Outline of Final Research Achievements |
Diamond-like carbon (DLC) film is a general term for amorphous carbon film composed of sp3 and sp2 bonded carbon and hydrogen. By the evaluation of the relationship between the film structure and their heat resistance, the objective was to clarify the guidelines for improving the heat resistance from the thermal decomposition reaction process of the DLC film. DLC films with various structures were prepared. After investigation of the film structure, we evaluated the temperature dependence of the desorbed molecules released during heating and the change in the sp2/sp3 bonding carbon ratio of the film by heating. These were indicted that the thermal decomposition progressed uniformly by heating when the initial structure of the DLC film was uniform. These results indicated that hydrogen atom desorption started at about 400°C, and then hydrocarbon desorption occurred. Therefore, it was shown that hydrogen in the film is important as a factor that determines heat resistance.
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| Free Research Field |
材料工学
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| Academic Significance and Societal Importance of the Research Achievements |
ダイヤモンド状炭素(DLC)膜の熱分解過程が膜の水素量に大きく依存し，400℃程度で水素脱離が始まり，800℃程度で炭化水素成分の脱離が起きる事を本研究の結果，明らかにでき，使用温度によって適切な膜構造を示す事ができた．これらは例えば切削等の高温での使用に耐えるDLC膜の構造を示す事となり，DLC膜の適用環境の最適化に貢献する．更にDLC膜の熱分解挙動に膜内部の水素が大きく影響している事から，この水素の脱離を抑制する成分のDLC膜への添加による耐熱性の向上の可能性を示す事ができ，今後のDLC膜の高機能化への基礎的要素を得ることができた．
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