2019 Fiscal Year Final Research Report
Laser-induced forward transfer of 2-dimensinal structures for high-density nanodevices
| Project/Area Number |
17H03423
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/Microstructural control engineering
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| Research Institution | Tohoku University |
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Principal Investigator |
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| Project Period (FY) |
2017-04-01 – 2020-03-31
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| Keywords | レーザー誘起前方転写法 / 二次元構造体 / フェムト秒レーザー / 光吸収層 / 光硬化性樹脂 / 光ナノインプリントリソグラフィ |
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| Outline of Final Research Achievements |
In this study, we studied direct formation of two-dimensional metal micro- and nanostructures by laser-induced forward transfer (LIFT) using single pulse of a femtosecond laser. Single pulse of a femtosecond laser with a flat-top intensity distribution was exposed to two-dimensional metal structures prepared by laser lithography or nanoimprint lithography on a transparent substrate. According to the research, four following results were obtained; 1. A LAL contributed to reduction of the energy threshold for ablation reaction by single pulse of a femtosecond laser. 2. Two-dimensional metal structures were formed on an acceptor substrate by LIFT. 3. Ablated metals were fused and coalesced then deposited on an acceptor substrate by LIFT. 4. Metal films formed on a UV-imprinted patterns were selectively removed by single pulse of a femtosecond laser.
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| Free Research Field |
工学
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| Academic Significance and Societal Importance of the Research Achievements |
本研究では，二次元ナノ構造の作製手法として世界的な広がりを見せているナノインプリントリソグラフィ (NIL) と，任意形状を有する構造体を所定の位置へ配置できる可能性を有するレーザー誘起前方転写法という二つの手法を組み合わせた画期的な直接造形手法である．特にNILによる微細構造作製は既にデバイス応用に展開しつつあることから，本研究を通じて得られる結果は，三次元ナノデバイス作製まで発展する可能性も高く，実用への応用も大いに期待される．
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