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2009 Fiscal Year Final Research Report

Signal Integrity of Nano-Scale interconnect and Circuit

Research Project

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Project/Area Number 18063008
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

MASU Kazuya  Tokyo Institute of Technology, 統合研究院, 教授 (20157192)

Co-Investigator(Renkei-kenkyūsha) ISHIHARA Noboru  東京工業大学, 統合研究院, 特任教授 (20396641)
SATO Takashi  東京工業大学, 統合研究院, 特任教授 (20431992)
AMAKAWA Shuhei  東京工業大学, 統合研究院, 助教 (40431994)
ITO Hiroyuki  東京工業大学, 精密工学研究所, 助教 (40451992)
OKADA Kenichi  東京工業大学, 統合研究院, 助教 (70361772)
Project Period (FY) 2006 – 2009
Keywordsナノ配線 / シグナル・インテグリティ / インテグリティ / 揺らぎ / ばらつき
Research Abstract

Nano-scale MOSFET has enabled a great number of circuit elements can be integrated into a single chip. So far, MOSFET has been miniaturized according to a scaling scheme, however, the chip size has not been reduced because more functions is required to be implemented on one chip; interconnect delays of long wires limit digital circuit performance. Interconnect design is a never-ending issue with CMOS LSI. For long wiring, we have developed transmission line interconnect (TLI).
In this project, we have developed (1) estimation of interconnect resource of nano-CMOS based on interconnect wire length distribution, (2) modeling of novel interconnect structure such as periodic scheme, multi-port analysis for cross-talk modeling, etc., (3) de-embedding method up to 100GHz which is essential in ultra high speed nano-CMOS circuit, (4) high-speed, low-latency, low-power, energy-efficient transmission line interconnect, which has been designed, fabricated and evaluated on 180nm, 90nm, and 65nm CMOS, and small area, low power, high-speed on-chip SER/DES circuits, (5) comparison of interconnect performance of transmission line, optical and wireless interconnects.

  • Research Products

    (49 results)

All 2010 2009 2008 2007 2006 Other

All Journal Article (19 results) (of which Peer Reviewed: 19 results) Presentation (20 results) Book (1 results) Remarks (4 results) Patent(Industrial Property Rights) (5 results)

  • [Journal Article] Radio Frequency Micro Electro Mechanical Systems Inductor Configurations for A Achieving Large Inductance Variations and High Q-factors2010

    • Author(s)
      Yutaka Mizuochi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu
    • Journal Title

      Japanese Journal of Applied Physics Vol.49

      Pages: 05FG02-1-05FG02-3

    • Peer Reviewed
  • [Journal Article] Design of On-Chip High Speed Interconnect on Complementary Metal Oxide Semiconductor 180 nm Technology2010

    • Author(s)
      Takao Oshita, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu
    • Journal Title

      Japanese Journal of Applied Physics Vol.49

      Pages: 04DE14-1-04DE14-6

    • Peer Reviewed
  • [Journal Article] RF Signal Generator Based on Time-to-Analog Converter in 0. 18um CMOS2010

    • Author(s)
      Kazuo Nakano, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu
    • Journal Title

      apanese Journal of Applied Physics Vol.49

      Pages: 04DE12-1-04DE12-4

    • Peer Reviewed
  • [Journal Article] A Time-Slicing Ring Oscillator for Capturing Time-Dependent Delay Degradation and Power Supply Voltage Fluctuation"2010

    • Author(s)
      Takumi Uezono, Kazuya Masu, kashi Sato
    • Journal Title

      IEICE Transactions on Fundamentals of Electronics vol.E93-C,no.3

      Pages: 324-331

    • Peer Reviewed
  • [Journal Article] Accurate array-based measurement for subthreshold-current of MOS transistors2009

    • Author(s)
      Takashi Sato, Hiroyuki Ueyama, Noriaki Nakayama, Kazuya Masu
    • Journal Title

      IEEE Journal of Solid-State Circuits vol.44,no.11

      Pages: 2977-2986

    • Peer Reviewed
  • [Journal Article] Characterization of On-Chip Multiport Inductors for Small-Area RF Circuits2009

    • Author(s)
      Takeshi Ito, Kenichi Okada, Kazuya Masu
    • Journal Title

      IEEE Transactions on Circuits and Systems I vol.56,no.8

      Pages: 1590-1597

    • Peer Reviewed
  • [Journal Article] Physical design challenges to nano-CMOS circuits2009

    • Author(s)
      Kazuya Masu, Noboru Ishihara, Noriaki Nakayama, Takashi Sato, Shuhei Amakawa
    • Journal Title

      IEICE Electronics Express (ELEX) vol.6no.11

      Pages: 703-720

    • Peer Reviewed
  • [Journal Article] Analytical Estimation of Path-Delay Variation for Multi-Threshold CMOS Circuits2009

    • Author(s)
      Shiho Hagiwara, Takashi Sato, Kazuya Masu
    • Journal Title

      IEICE Transactions on Fundamentals of Electronics vol.E92-A,no.4

      Pages: 1031-1038

    • Peer Reviewed
  • [Journal Article] One-Shot Voltage-Measurement Circuit Utilizing Process Variation2009

    • Author(s)
      Takumi Uezono, Takashi Sato, Kazuya Masu
    • Journal Title

      IEICE Transactions on Fundamentals of Electronics vol.E92-A,no.4

      Pages: 1024-1030

    • Peer Reviewed
  • [Journal Article] Tunable CMOS LNA Using a Variable Inductor for a Reconfigurable RF Circuit2009

    • Author(s)
      Hirotaka Sugawara, Kenichi Okada, Kazuya Masu
    • Journal Title

      IEICE Transactions on Fundamentals of Electronics vol.E92-A,no.2

      Pages: 401-410

    • Peer Reviewed
  • [Journal Article] Application of Correlation-based Regression Analysis for Improvement of Power Distribution Network,2008

    • Author(s)
      Shiho Hagiwara, Takumi Uezono, Takashi Sato, Kazuya Masu
    • Journal Title

      IEICE Transactions on Fundamentals Vol.E91-A,No.4

      Pages: 951-956

    • Peer Reviewed
  • [Journal Article] 「オンチップ伝送線路配線の期待と課題-True Scalingを可能とする次世代配線技術-]2008

    • Author(s)
      益一哉
    • Journal Title

      電子情報通信学会誌 Vol.91,No.3

      Pages: 170-175

    • Peer Reviewed
  • [Journal Article] A Bidirectional- and Multi-Drop-Transmission-Line Interconnect for Multipoint-to-Multipoint On-Chip Communications2008

    • Author(s)
      Hiroyuki Ito, Makoto Kimura, Kazuya Miyashita, Takahiro Ishii, Kenichi Okada, Kazuya Masu
    • Journal Title

      IEEE Journal of Solid-State Circuits Vol.43,No.4

      Pages: 1020-1029

    • Peer Reviewed
  • [Journal Article] Reconfigurable RF CMOS Circuit for Cognitive Radio (Invited Paper)2008

    • Author(s)
      Kazuya MASU, Kenichi OKADA
    • Journal Title

      IEICE Transactions on Communications Vol.E91-B,No.1

      Pages: 10-13

    • Peer Reviewed
  • [Journal Article] Low-Loss Distributed Constant Passive Devices Using Wafer-Level Chip Scale Package Technology2007

    • Author(s)
      Hiroyuki Ito, Hideyuki Sugita, Kenichi Okada, Tatsuya Ito, Kazuhisa Itoi, Masakazu Sato, Ryozo Yamauchi, Kazuya Masu
    • Journal Title

      IEICE Transactions on Electronics Vol.E90-C,No.3

      Pages: 641-643

    • Peer Reviewed
  • [Journal Article] Statistical Modeling of a Via Distribution for Yield Estimation2006

    • Author(s)
      Takumi Uezono, Kenichi Okada, Kazuya Masu
    • Journal Title

      IEICE Transactions on Fundamentals vol.E89-A,no.12

      Pages: 3579-3584

    • Peer Reviewed
  • [Journal Article] On-Chip High-Q Variable Inductor Using Wafer-Level Chip-Scale Package Technology2006

    • Author(s)
      Kenichi Okada, Hirotaka Sugawara, Hiroyuki Ito, Kazuhisa Itoi, Masakazu Sato, Hiroshi Abe, Tatsuya Ito, Kazuya Masu
    • Journal Title

      IEEE Transactions on Electron Devices Vol.53,No.9

      Pages: 2401-2406

    • Peer Reviewed
  • [Journal Article] Optimization Methodology of Layer Numbers with Circuit/Process Co-design2006

    • Author(s)
      Takanori Kyogoku, Junpei Inoue, Hidenari Nakashima, Takumi Uezono, Kenichi Okada, Kazuya Masu
    • Journal Title

      Japanese Journal of Applied Physics Vol.45,No.4A

      Pages: 2476-2480

    • Peer Reviewed
  • [Journal Article] RF Passive Components Using Metal Line on Si CMOS2006

    • Author(s)
      Kazuya Masu, Kenichi Okada, Hiroyuki Ito
    • Journal Title

      IEICE Transactions on Electronics vol.E89-C,no.6

      Pages: 681-691

    • Peer Reviewed
  • [Presentation] Linear Time Calculation of State-Dependent Power Distribution Network Capacitance2010

    • Author(s)
      Shiho Hagiwara, Koh Yamanaga, Ryo Takahashi, Kazuya Masu, Takashi Sato
    • Organizer
      International Symposium on Quality Electronic Design (ISQED)
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2010-03-23
  • [Presentation] On the validity of bisection-based thru-only de-embedding2010

    • Author(s)
      Takayuki Sekiguchi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu
    • Organizer
      2010 IEEE International Conference on Microelectronic Test Structures (ICMTS2010)
    • Place of Presentation
      Hiroshima, Japan
    • Year and Date
      2010-03-23
  • [Presentation] オンチップRC配線と伝送線路による高速デジタル信号伝送特性の比較2010

    • Author(s)
      高木辰則, 前川智明, 天川修平, 石原昇, 益一哉
    • Organizer
      電子情報通信学会総合大会
    • Place of Presentation
      東北大学
    • Year and Date
      2010-03-19
  • [Presentation] On-Chip Transmission Line Interconnect for CMOS High Speed Signaling2009

    • Author(s)
      Kazuya Masu, Noboru Ishihara, Shuhei Amakawa
    • Organizer
      12th International Symposium on Microwave and Optical Technology (ISMOT-2009)
    • Place of Presentation
      New Delhi, India
    • Year and Date
      2009-12-18
  • [Presentation] オンチップ受動素子の高性能化2009

    • Author(s)
      益一哉, 天川修平, 石原昇
    • Organizer
      Microwave Workshops & Exhibition 2009 (MWE2009)
    • Place of Presentation
      パシフィコ横浜
    • Year and Date
      2009-11-27
  • [Presentation] An 8. 9mW 25Gb/s Inductorless l:4 DEMUX in 90nm CMOS2009

    • Author(s)
      Takayuki Sekiguchi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu
    • Organizer
      International SoC Design Conference 2009
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2009-11-24
  • [Presentation] On-die parameter extraction from path-delay measurements2009

    • Author(s)
      Tomoyuki Takahashi, Takumi Uezono, Michihiro Shintani, Kazuya Masu, Takashi Sato
    • Organizer
      2009 IEEE Asian Solid-State Circuits Conference
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2009-11-17
  • [Presentation] キャパシティブプリエンファシス技術を導入したオンチップRC伝送回路と伝送線路回路の比較2009

    • Author(s)
      前川智明, 天川修平, 石原昇, 益一 哉
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      新潟大学
    • Year and Date
      2009-09-18
  • [Presentation] 高速オンチップシリアル伝送用4:1 MUX回路の検討2009

    • Author(s)
      関口貴之, 天川修平, 石原昇, 益一哉
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      新潟大学
    • Year and Date
      2009-09-18
  • [Presentation] A low-phase-noise injection-locked differential ring-VCO with half-integral subharmonic locking in 0. 18 um CMOS2009

    • Author(s)
      Yuka Kobayashi, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu
    • Organizer
      European Solid-State Circuits Conference (ESSCIRC)
    • Place of Presentation
      Athens, Greece
    • Year and Date
      2009-09-17
  • [Presentation] Design of CMOS inverter-based output buffurs adapting the Cherry-Hooper broadbanding technique2009

    • Author(s)
      Tomoaki Maekawa, Shuhei Amakawa, Noboru Ishihara, Kazuya Masu
    • Organizer
      The 19th European Conference on Circuit Theory and Design (ECCTD2009)
    • Place of Presentation
      Antalya, Turkey
    • Year and Date
      2009-08-25
  • [Presentation] 「オンチップネットワークへの利用を目指した低電力パルス伝送線路回路」2009年(平成21年)LSIとシステムのワークショップ20092009

    • Author(s)
      前川智明, 伊藤浩之, 天川修平, 石原昇, 益一哉
    • Place of Presentation
      北九州国際会議場
    • Year and Date
      2009-05-19
  • [Presentation] S-parameter-based modal decomposition of multiconductor transmission lines and its application to de-embedding2009

    • Author(s)
      S. Amakawa, K. Yamanaga, H. Ito, T. Sato, N. Ishihara, K. Masu
    • Organizer
      International Conference on Microelectronic Test Structures (ICMTS)
    • Place of Presentation
      Oxnard, California
    • Year and Date
      2009-04-01
  • [Presentation] An 8Gbps 2. 5mW On-Chip Pulsed-Current-Mode Transmission Line Interconnect with a Stacked-Switch Tx,2008

    • Author(s)
      Tomoaki Maekawa, Hiroyuki Ito, Kazuya Masu
    • Organizer
      the 34th European Solid-State Circuits Conference
    • Place of Presentation
      Edinburgh, Scotland
    • Year and Date
      20080915-20080919
  • [Presentation] A Simple Through-Only De-Embedding Method for On-Wafer S-Parameter Measurements up to 110 GHz2008

    • Author(s)
      Hiroyuki Ito, Kazuya Masu
    • Organizer
      IEEE MTT-S International Microwave Symposium2008 (IMS 2008)
    • Place of Presentation
      Atlanta
    • Year and Date
      20080615-20080620
  • [Presentation] A MOS transis0or array with pico-ampere order precision for accurate characterization of leakage current variation2008

    • Author(s)
      Takashi Sato, Hiroyuki Ueyama, Noriaki Nakayama, Kazuya Masu
    • Organizer
      IEEE Asian Solid-State Circuits Conference (A-SSCC)
    • Year and Date
      2008-11-05
  • [Presentation] A 8-Gbps Low-Latency Multi-Drop On-Chip Transmission Line Interconnect with 1. 2-mW Two-Way Transceivers2007

    • Author(s)
      Hiroyuki Ito, Makoto Kimura, Kenichi Okada, Kazuya Masu
    • Organizer
      IEEE Symposium on VLSI Circuits
    • Place of Presentation
      Kyoto
    • Year and Date
      20070614-20070616
  • [Presentation] A Low-Latency and High-Power-Efficient On-Chip LVDS Transmission Line Interconnect for a RC Interconnect Alternative2007

    • Author(s)
      Hiroyuki Ito, Junki Seita, Takahiro Ishii, Hideyuki Sugita, Kenichi Okada, Kazuya Masu
    • Organizer
      IEEE International Interconnect Technology Conference (IITC)
    • Place of Presentation
      San Francisco
    • Year and Date
      20070604-20070606
  • [Presentation] Adaptable wire-length distribution with tunable occupation probability2007

    • Author(s)
      Shuhei Amakawa, Takumi Uezono, Takashi Sato, Kenichi Okada, Kazuya Masu
    • Organizer
      International Workshop on System Level Interconnect Prediction (SLIP)
    • Place of Presentation
      Austin, Texas
    • Year and Date
      2007-03-17
  • [Presentation] On-Chip Differential-Transmission-Line(DTL) Interconnect for 22nm Technology,2006

    • Author(s)
      Kenichi Okada, Hiroyuki Ito, Kazuya Masu
    • Organizer
      Advanced Metallization Conference (AMC), Advanced Metallization Conference, Asian, MRS Proceedings: Advanced
    • Place of Presentation
      San Diego, CA, Tokyo
    • Year and Date
      20061019-20061020,20060900
  • [Book] 「薄膜ハンドブック(第二版)」2008年, 「第I編3. 5節評価技術のまとめ」, 「第II編9. 1節はじめに(実装技術)」, 日本学術振興会薄膜131委員会編「第II編9. 2. 2節無機材料基板技術, 「第II編9. 4. 1節薄膜抵抗」」2008

    • Author(s)
      益一哉, 高橋久弥, 谷村政憲
    • Total Pages
      307-312,1005-1005,1007-1008,1014-1017
    • Publisher
      オーム社
  • [Remarks]

    • URL

      http://masu-www.pi.titech.ac.jp/index.html

  • [Remarks] 1. 展示名:「高性能Si RF-CMOS集積回路設計技術」出展者:東京工業大学統合研究院益研究室展示会: Microwave Workshop and Exhibition (MWE2008), November 26-28, 2008, Yokohama

  • [Remarks] 2. 展示名:「高性能Si RF-CMOS集積回路の開発」出展者:東京工業大学統合研究院益研究室展示会: Microwave Workshop and Exhibition (MWE2007), November 28-30, 2007, Yokohama

  • [Remarks] 3. 展示名:「Si CMOSプロセスを用いたリコンフィギュラブルRF回路設計の研究」出展者:東京工業大学統合研究院展示会: Microwave Workshop and Exibition (MWE2006), December 13-15, 2006, Yokohama

  • [Patent(Industrial Property Rights)] 回路モデル作成装置、回路モデル作成方法、シミュレーション装置、及び、シミュレーション方法」2009

    • Inventor(s)
      佐藤高史、益一哉、山長功
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      特許・特願2009-050343
    • Filing Date
      2009-03-04
  • [Patent(Industrial Property Rights)] 高周波信号生成回路2009

    • Inventor(s)
      中野和雄、天川修平、石原昇、益一 哉
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      特許・特願2009-188066
    • Filing Date
      2009-08-14
  • [Patent(Industrial Property Rights)] 電圧測定装置、集積回路基板、及び、電圧測定方法2008

    • Inventor(s)
      佐藤高史、上薗巧、益一哉
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      特許・特願2008-81781(P2008-81781)[特開2009-236627]
    • Filing Date
      2008-03-26
  • [Patent(Industrial Property Rights)] 電圧制御発振回路2008

    • Inventor(s)
      小林由佳、天川修平、石原昇、益一哉
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      特許・特願2009-206349
    • Filing Date
      2008-04-16
  • [Patent(Industrial Property Rights)] オンチップ可変インダクタ2007

    • Inventor(s)
      益一哉、伊藤浩之、畠山英樹
    • Industrial Property Rights Holder
      東京工業大学
    • Industrial Property Number
      特許・特願2007-326624(P2007-326624)[特開2009-152254]
    • Filing Date
      2007-12-19

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Published: 2011-06-18   Modified: 2012-08-15  

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