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2008 Fiscal Year Final Research Report

Development of technology for formation and its control of nanostructures on solid surfaces with ultrashort pulse lasers

Research Project

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Project/Area Number 18206010
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionKyoto University

Principal Investigator

MIYAZAKI Kenzo  Kyoto University, エネルギー理工学研究所, 教授 (50293957)

Co-Investigator(Kenkyū-buntansha) YASUMARU Naoki  , 福井工業高等専門学校機械工学科, 教授 (90158006)
MIYAJI Godai  , 京都大学エネルギー理工学研究所, 助教 (30378905)
Project Period (FY) 2006 – 2008
Keywords光プロセッシング / フェムト秒レーザー / ナノ周期構造 / アブレーション / 近接場 / 表面プラズモン・ポラリトン
Research Abstract

フェムト秒レーザーパルスによるナノ周期構造生成・制御に関する研究を行い, 世界に先駆けてその物理過程を解明することに成功した。アブレーションによるナノ周期構造の生成を担っている主要な物理過程が, 表面の微小凹凸面での「局所場(近接場)」の発生, 及び凹凸面を介して入射光電場でと表面を結合する「表面プラズモン・ポラリトン」による周期増強電場の発生であることを突き止めた。この物理モデルは, 誘電体, 半導体, 及び金属に対しても適用できることを確認した。

  • Research Products

    (45 results)

All 2009 2008 2007 2006 Other

All Journal Article (20 results) (of which Peer Reviewed: 20 results) Presentation (20 results) Book (1 results) Remarks (1 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Measurement of molecular rotational temperature in a supersonic gas jet with high-order harmonic generation2009

    • Author(s)
      K.Yoshii, G.Miyaji and K.Miyazaki
    • Journal Title

      Opt. Lett Vol.34, No.11

      Pages: 1651-1653

    • Peer Reviewed
  • [Journal Article] Nanostructure formation processes in femtosecond laser ablation of thin film surfaces2009

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Journal Title

      Proc. of SPIE Vol.7201

      Pages: 720102/1-11

    • Peer Reviewed
  • [Journal Article] Evanescent field at nanocorrugated dielectric surface2009

    • Author(s)
      S.N.Volkov, A.E.Kaplan, K.Miyazaki
    • Journal Title

      Appl. Phys. Lett Vol.94

      Pages: 041104/1-3

    • Peer Reviewed
  • [Journal Article] Nanostructuring Process in Femtosecond Laser Ablation of Patterned Thin Film Surfaces2008

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Journal Title

      Rev. Laser Engineering, Suppl. Volume

      Pages: 1210-1213

    • Peer Reviewed
  • [Journal Article] Angular Dependence of High-order Harmonic Generation from Nonadiabatically Aligned Molecules2008

    • Author(s)
      K.Yoshii, G.Miyaji, and K.Miyazaki
    • Journal Title

      Rev. Laser Engineering

      Pages: 1012-1015

    • Peer Reviewed
  • [Journal Article] Dynamic Properties of Angle-Dependent High-Order Harmonic Generation from Coherently Rotating Molecules2008

    • Author(s)
      K.Yoshii, G.Miyaji, and K.Miyazaki
    • Journal Title

      Phys. Rev. Lett Vol.101, No.18

      Pages: 183902/1-4

    • Peer Reviewed
  • [Journal Article] Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses2008

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Journal Title

      Optics Express Vol.16, No.20

      Pages: 16265-16271

    • Peer Reviewed
  • [Journal Article] 配向N_2及ひO_2分子からの高次高調波発生の角度依存性2008

    • Author(s)
      吉井一倫, 宮地悟代, 宮崎健創
    • Journal Title

      レーザー研究 Vol.36, No.5

      Pages: 294-298

    • Peer Reviewed
  • [Journal Article] Nanostructuring with Femtosecond Laser Pulses on Patterned DLC Surface2008

    • Author(s)
      G. Miyaji and K. Miyazaki
    • Journal Title

      J. Laser Micro/Nanoengineering Vol.3, No.2

      Pages: 84-87

    • Peer Reviewed
  • [Journal Article] Control of tribological properties of diamond-like carbon films with femtosecondlaserinduced nanostructuring2008

    • Author(s)
      N.Yasumaru, K.Miyazaki, and J.Kiuchi
    • Journal Title

      Appl. Surf. Sci Vol.254, No.8

      Pages: 2364-2368

    • Peer Reviewed
  • [Journal Article] Nanoscale ablation on patterned diamond-like carbon film with femtosecond laser pulses2007

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Journal Title

      Appl. Phys. Lett Vol.91, No.12

      Pages: 123102/1-3

    • Peer Reviewed
  • [Journal Article] Femtosecond-laser-induced nanostructure formation and surface modification on diamond-like carbon film2007

    • Author(s)
      G.Miyaji, W. Kobayashi, and K.Miyazaki
    • Journal Title

      Electrochimica Acta Vol.53, No.1

      Pages: 167-170

    • Peer Reviewed
  • [Journal Article] Nanostructure formation process in low-fluence femtosecondlaser ablation of thin film surface2007

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Journal Title

      Ch. Optics Letters Vol.31

      Pages: S201-S203

    • Peer Reviewed
  • [Journal Article] Fundamental properties of high-order harmonic generation from field-free-aligned molecules with intense femtosecond laser pulses2007

    • Author(s)
      K.Miyazaki, G.Miyaj, M.Kaku, and K.Yoshii
    • Journal Title

      Ch. Optics Letters Vol.31

      Pages: S139-S142

    • Peer Reviewed
  • [Journal Article] Tribological properties of diamond-like carbon films with surface nano-structure formed by femtosecond laser pulses2007

    • Author(s)
      N.Yasumaru, K.Miyazaki, J.Kiuchi, and K.Komai
    • Journal Title

      J. Laser Micro/Nanoengineering Vol.2, No.2

      Pages: 162-165

    • Peer Reviewed
  • [Journal Article] Reflectivity change in nanoscale modification of DLC film with femtosecond laser pulses2007

    • Author(s)
      G.Miyaji, W.Kobayashi, and K.Miyazaki
    • Journal Title

      J. Laser Micro/Nanoengineering Vol.2, No.2

      Pages: 146-151

    • Peer Reviewed
  • [Journal Article] Origin of Anomalous Spectra of Dynamic Alignments Observed in N_2 and O_22007

    • Author(s)
      F.H.M.Faisal, A.Abdurrouf, K.Miyazaki, and G.Miyaji,
    • Journal Title

      Phys. Rev. Lett Vol.98, No.14

      Pages: 143001/1-4

    • Peer Reviewed
  • [Journal Article] フェムト秒レーザーによるナノ加工とトライボロジー特性の制御2007

    • Author(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Journal Title

      月刊トライボロジー No.234

      Pages: 26-28

    • Peer Reviewed
  • [Journal Article] Friction Properties of the DLC Film with Periodic Structures in Nano-scale2006

    • Author(s)
      A.Mizuno, T.Honda, J.Kikuchi, Y.Iwai, N.Yasumaru, and K.Miyazaki
    • Journal Title

      Tribology Online Vol.1, No.2

      Pages: 44-48

    • Peer Reviewed
  • [Journal Article] Ultrafast dynamics of periodic nanostructure formation on diamond-like carbon films irradiated with femtosecond laser pulses2006

    • Author(s)
      G.Miyaji and K.Miyazaki
    • Journal Title

      Appl. Phys. Lett Vol.89, No.19

      Pages: 191902/1-3

    • Peer Reviewed
  • [Presentation] フェムト秒レーザーによる微細構造の形成と相互作用2009

    • Author(s)
      宮崎健創(依頼)
    • Organizer
      第56会応用物理学関係連合講演会シンポジウム「ナノフォトニクスにおけるナノ加工の最前線と理論基礎」
    • Place of Presentation
      筑波大
    • Year and Date
      20090000
  • [Presentation] Nanostructure formation processes in femtosecond laser ablation of thin film surfaces2009

    • Author(s)
      G.Miyaji and K.Miyazaki(Invited)
    • Organizer
      SPIE Photonics West, Laser Applications in Microelectronics and Optoelectronic Manu- facturing XIV
    • Place of Presentation
      San Jose
    • Year and Date
      20090000
  • [Presentation] フェムト秒レーザー誘起ナノ構造生成のメカニズム2009

    • Author(s)
      宮地悟代, 宮崎健創(招待講演)
    • Organizer
      レーザー学会学術講演会第29回年次大会
    • Place of Presentation
      徳島大,
    • Year and Date
      20090000
  • [Presentation] Nanostructuring of thin film surfaces om femtosecond laser ablation2008

    • Author(s)
      K. Miyazaki(Invited)
    • Organizer
      Australia Japan Nanophotonics Workshop
    • Place of Presentation
      Canberra
    • Year and Date
      20080000
  • [Presentation] フェムト秒レーザーによる硬質薄膜表面の周期ナノ構造形成の入射角依存性2008

    • Author(s)
      宮地悟代, 張開鋒, 宮崎健創
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大
    • Year and Date
      20080000
  • [Presentation] フェムト秒レーザーによるTiN薄膜表面のナノ構造形成過程2008

    • Author(s)
      宮谷佳孝, 宮地悟代, 宮崎健創
    • Organizer
      第55回応用物理学関連連合講演会
    • Place of Presentation
      日大
    • Year and Date
      20080000
  • [Presentation] Nanostructuring process in femtosecond laser ablation of patterned thin film surfaces2008

    • Author(s)
      G.Miyaji, Y.Miyatani, and K.Miyazaki
    • Organizer
      The 6th Asia Pacific Laser Symp
    • Place of Presentation
      Nagoya
    • Year and Date
      20080000
  • [Presentation] Angular dependence of high-order harmonic generation from nonadiabatically aligned molecules2008

    • Author(s)
      K. Yoshii, G. Miyaji, and K. Miyazaki
    • Organizer
      he 6th Asia Pacific Laser Symp
    • Place of Presentation
      Nagoya
    • Year and Date
      20080000
  • [Presentation] 超短パルスレーザーによる薄膜表面のナノ構造生成と物理過程2007

    • Author(s)
      宮崎健創(依頼)
    • Organizer
      量子理工学研究実験センター第8回公開シンポジウム
    • Place of Presentation
      京大
    • Year and Date
      20070000
  • [Presentation] DLC薄膜表面におけるフェムト秒レーザー誘起ナノ構造生成の偏光依存性2007

    • Author(s)
      宮地悟代, 宮谷佳孝, 宮崎健
    • Organizer
      第68回応用物理学学術講演会
    • Place of Presentation
      北海道工業大,
    • Year and Date
      20070000
  • [Presentation] Femtosecond-laserinduced nanostructures on a patterned diamond-like carbon film2007

    • Author(s)
      G. Miyaji and K.Miyazaki
    • Organizer
      CLEO/Pacific Rim 2007
    • Place of Presentation
      Seoul
    • Year and Date
      20070000
  • [Presentation] A theory of molecular high harmonic generation from coherently rotating molecules and interpretation of recent pump・probe experiments2007

    • Author(s)
      F.H.M.Faisal, A.Abdurrouf, K.Miyazaki and G.Godai, (Invited)
    • Organizer
      CLEO/Pacific Rim 2007
    • Place of Presentation
      Seoul
    • Year and Date
      20070000
  • [Presentation] Nanostructuring and modification of thin film surfaces with femtosecond laser pulses2007

    • Author(s)
      K. Miyazaki(Invited, Plenary)
    • Organizer
      The 8th Mediterranean Workshop and Topical Meeting on Novel Optical Materials and Applications
    • Place of Presentation
      Cetraro
    • Year and Date
      20070000
  • [Presentation] Laser-induced surface nano-ripples as manifestation of Wigner excitons2007

    • Author(s)
      A.E.Kaplan and K.Miyazaki
    • Organizer
      CLEO/QELS 2007
    • Place of Presentation
      Baltimore
    • Year and Date
      20070000
  • [Presentation] Tribological Properties of the DLC Film with femtosecond-laser-induced nanostructure2007

    • Author(s)
      N.Yasumaru, K.Miyazaki, J.Kiuchi and K.Komai
    • Organizer
      The 8th Int. Symp. Laser Precision Microfabrication
    • Place of Presentation
      Wien
    • Year and Date
      20070000
  • [Presentation] 超短パルスレーザーによる硬質薄膜表面のナノ構造生成・制御2007

    • Author(s)
      宮崎健創(依頼)
    • Organizer
      第5回ナノフォトニクスセミナー
    • Place of Presentation
      東大
    • Year and Date
      20070000
  • [Presentation] パターンを付けたDLC薄膜表面でのフェムト秒誘起ナノ構造生成2007

    • Author(s)
      宮地悟代, 宮谷佳孝, 宮崎健創
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大,
    • Year and Date
      20070000
  • [Presentation] 超短パルスレーザー誘起配向分子からの高次高調波発生2007

    • Author(s)
      宮崎健創, 宮地悟代, 加来昌典, (招待講演)
    • Organizer
      レーザー学会第27回年次大会
    • Place of Presentation
      宮崎市
    • Year and Date
      20070000
  • [Presentation] フェムト秒レーザーによる次世代表面設計技術ー薄膜表面のナノ加工と改質ー2006

    • Author(s)
      安丸尚樹, 宮崎健創, 木内淳介, (招待講演)
    • Organizer
      第67回レーザ加工学会講演会
    • Place of Presentation
      東大
    • Year and Date
      20060000
  • [Presentation] DLC薄膜表面におけるフェムト秒レーザー誘起構造変化と反射率2006

    • Author(s)
      宮地悟代, 宮崎健
    • Organizer
      第67回応用物理学会学術講演会
    • Place of Presentation
      立命館大
    • Year and Date
      20060000
  • [Book] in Nanophotonics and Nanofabrication, ed. by M.Ohtsu2009

    • Author(s)
      K. Miyazaki
    • Total Pages
      22
    • Publisher
      Nanostructuring of thin film surfaces in femtosecond laser ablation
  • [Remarks]

    • URL

      http://www.iae.kyoto-u.ac.jp/ksoshiki/laser.html

  • [Patent(Industrial Property Rights)] 超短パルスレーザーを用いた微細加工方法及びその加工物2009

    • Inventor(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Industrial Property Rights Holder
      (独)科学技術振興機構, (株)アイテッ
    • Industrial Property Number
      特許第4263865号
    • Acquisition Date
      2009-02-20
  • [Patent(Industrial Property Rights)] 炭素薄膜の加工方法及び製造方法2009

    • Inventor(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Industrial Property Rights Holder
      (独)科学技術振興機構,(株)アイテック
    • Industrial Property Number
      特許第4284152号
    • Acquisition Date
      2009-03-27
  • [Patent(Industrial Property Rights)] 摺動材及びその製造方法

    • Inventor(s)
      安丸尚樹, 宮崎健創, 木内淳介
    • Industrial Property Rights Holder
      (独)科学技術振興機構, (株)アイテック
    • Industrial Property Number
      特願2005-357064

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Published: 2010-06-10   Modified: 2016-04-21  

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