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2009 Fiscal Year Self-evaluation Report

Explanation of reaction layer fatigue in silicon microstrucure for development of highly-reliable MEMS devices

Research Project

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Project/Area Number 19676002
Research Category

Grant-in-Aid for Young Scientists (S)

Allocation TypeSingle-year Grants
Research Field Materials/Mechanics of materials
Research InstitutionKyoto University

Principal Investigator

TSUCHIYA Toshiyuki  Kyoto University, 大学院・工学研究科, 准教授 (60378792)

Project Period (FY) 2007 – 2011
Keywordsシリコン / MEMS / 引張試験 / 疲労試験 / 酸化 / 信頼化
Research Abstract

本研究では、静電チャックを用いた薄膜引張試験方法による高温、高湿度などの様々な環境での引張疲労試験とデバイス構造を簡略化した静電駆動型振動子の共振振動疲労試験を用いて、シリコンの機械的材料としての信頼性を明らかにする。特に、信頼性が湿度に影響を受けることから表面の酸化に着目し、そのメカニズムを解明する。もって、実用化が進む微小電気機械システム(MEMS)デバイスに機械構造体として用いられるシリコンの機械的信頼性を明らかにし、より高信頼、高性能なMEMSの実現に寄与する。

  • Research Products

    (6 results)

All 2010 2008 2007 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (1 results) Remarks (1 results)

  • [Journal Article] Measurement of anisotropic fatigue life in micrometre-scale single-crystal silicon specimens2010

    • Author(s)
      T. Ikehara, T. Tsuchiya
    • Journal Title

      Micro & Nano Letters Vol. 5 No. 1

      Pages: 49-52

    • Peer Reviewed
  • [Journal Article] Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment2010

    • Author(s)
      T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata
    • Journal Title

      Experimental Mechanics Vol. 50 No. 4

      Pages: 509-516

    • Peer Reviewed
  • [Journal Article] Tensile Testing of Single Crystal Silicon Thin Films at 600℃ Using IR Heating2010

    • Author(s)
      T. Tsuchiva, T. Ikeda, A. Tsunematsu, K. Sugano, O. Tabata
    • Journal Title

      Sensors and Materials Vol. 22 No. 1

      Pages: 1-12

    • Peer Reviewed
  • [Journal Article] High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned specimens2008

    • Author(s)
      T. Ikehara, T. Tsuchiva
    • Journal Title

      Journal of Micromechanics and Microengineering Vol. 18, No.7

      Pages: 075004

    • Peer Reviewed
  • [Presentation] Effect of Surface Oxide Layer on Mechanical Properties of Single Crystalline Silicon2007

    • Author(s)
      K. Miyamoto, K. Sugano, T. Tsuchiya, O. Tabata
    • Organizer
      Material Research Society Meeting
    • Place of Presentation
      Boston, MA
    • Year and Date
      20071125-20071130
  • [Remarks]

    • URL

      http://www.nms.me.kyoto-u.ac.jp

URL: 

Published: 2011-06-18   Modified: 2016-04-21  

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