2010 Fiscal Year Final Research Report
Development of Intelligent RF Induction Plasma Source
| Project/Area Number |
20340160
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Plasma science
|
|---|
| Research Institution | Kanazawa University |
|---|
Principal Investigator |
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
TANAKA Yasunori 金沢大学, 電子情報学系, 教授 (90303263)
|
|---|
| Project Period (FY) |
2008 – 2010
|
| Keywords | 高周波誘導プラズマ / 熱プラズマ / 帰還制御 / プラズマ-材料相互作用 |
|---|
| Research Abstract |
We have developed a temperature controlled RF induction plasma source using a digital signal processor for feedback control and real time calculation of plasma radiation temperature. Experiments on the plasma-wall interactions in plasma applications and fusion plasmas have been done using this newly developed RF induction plasma source.
|
Research Products
(18 results)
