2011 Fiscal Year Final Research Report
Fabrication of Micro/Meso Scale Shell Structures of Metal/Ceramic Composite
| Project/Area Number |
21360060
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The University of Tokyo |
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Principal Investigator |
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| Project Period (FY) |
2009 – 2011
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| Keywords | 機械工作 / 生産工学、ナノ / マイクロ工学 |
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| Research Abstract |
Single point incremental microforming of metallic foils without using any die and mould has been developed as a flexible fabrication method of micro shell structures. The minimum size of a shell structure was 50μm in length. An aluminum micro shell structure was coated with hafnium oxide or titanium nitride and then, only aluminum foil of formed structures was etched selectively in a solution of potassium hydroxide to fabricate the micro shell structures of ceramics only.
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