Creation of special metal/alloy micromachines

2023 Fiscal Year Final Research Report

• Project/Area Number: 21K18870
• Research Category: Grant-in-Aid for Challenging Research (Exploratory)
• Allocation Type: Multi-year Fund
• Review Section: Medium-sized Section 28:Nano/micro science and related fields
• Research Institution: Niigata University
• Principal Investigator: Abe Takashi 新潟大学, 自然科学系, 教授 (00333857)
• Project Period (FY): 2021-07-09 – 2024-03-31
• Keywords: MEMS / 特殊金属 / マイクロマシン / チタン / 微細加工技術 / 電解エッチング / 耐久性向上

Outline of Final Research Achievements

In this research, we have developed a comprehensive microfabrication process to create micromachines made of special metals. For example, we have developed basic technologies such as an insulating film process that does not warp even in thin titanium plate, an electrolytic etching process tailored to the application, and a double-layer process to create microstructures. We have also succeeded in developing technologies for special applications that take advantage of the corrosion resistance of titanium, such as a bonding technology with fluoropolymers. Furthermore, using the developed technologies, we have succeeded in prototyping new sensor devices such as flexible titanium force sensors that are attached to targets, cantilevers and diaphragms, scalpels and needles for microsurgery, and microelectrolytic electrodes.

Free Research Field

センサ・マイクロマシン

Academic Significance and Societal Importance of the Research Achievements

マイクロマシン技術はセンサ・デバイス小型化の基盤技術として広く使用されている。今後、さらに、新しい需要や用途に対してもその可能性を拡大していく鍵となるのは多様な材料を取り入れることである。チタンやモリブデンなどの特殊金属には、耐久性などの観点で、特色があり、これらの材料に対応したマイクロマシン技術の実現により、新たな特色を取り込んだマイクロマシンの登場が期待される。