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2012 Fiscal Year Final Research Report

Silicon waveguide photonic functional devices based on direct bondingof heterogeneous crystals and their applications to photonic integrated circuits

Research Project

  • PDF
Project/Area Number 22246009
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied optics/Quantum optical engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

MIZUMOTO Tetsuya  東京工業大学, 大学院・理工学研究科, 教授 (00174045)

Project Period (FY) 2010 – 2012
Keywords光制御 / 光集積回路 / シリコンフォトニクス / 異種結晶接合
Research Abstract

As a fundamental technique for realizing functional photonic integrated circuits based on silicon waveguides, a surface-activated direct bonding technique has been investigated for integrating III-V compound semiconductors and magneto-optical crystals used for light sources and nonreciprocal devices, respectively. Based on this technique, silicon waveguide optical isolators and circulators are fabricated with an isolation of 30 dB and 15 dB, respectively. Also, a TE-TM mode converter is realized with a maximum conversion efficiency of 97 %. An apodized grating coupler can provides a coupling efficiency of 86 % for a randomly polarized light wave between a silicon waveguide and a surface mounted photo-diode. A fabrication process of photonic circuits integrating these functional devices is also investigated.

  • Research Products

    (15 results)

All 2013 2012 2011 2010

All Journal Article (7 results) (of which Peer Reviewed: 7 results) Presentation (8 results)

  • [Journal Article] MZI optical isolator withSi-wire waveguides by surface- activated direct bonding2012

    • Author(s)
      Y. Shoji, M. Itoh, Y. Shirato, and T.Mizumoto
    • Journal Title

      Optics Express

      Volume: vol.20 Pages: 18440-18448

    • Peer Reviewed
  • [Journal Article] Single trench SiON waveguideTE-TM mode converter2012

    • Author(s)
      K. Nakayama, Y. Shoji, and T.Mizumoto
    • Journal Title

      IEEE PhotonicsTechnology Letters

      Volume: vol.24,no.15 Pages: 1310-1312

    • Peer Reviewed
  • [Journal Article] (Invited) Direct wafer bonding and itsapplication to waveguide optical isolators2012

    • Author(s)
      T. Mizumoto, Y. Shoji, and R. Takei
    • Journal Title

      Materials

      Volume: vol.5 Pages: 985-1004

    • Peer Reviewed
  • [Journal Article] (Invited) Waveguide optical isolatorsfor integrated optics2012

    • Author(s)
      T. Mizumoto, R. Takei, and Y. Shoji
    • Journal Title

      IEEE Journal ofQuantum Electronics

      Volume: vol.48,no.2 Pages: 252-260

    • Peer Reviewed
  • [Journal Article] (InvitedPaper) Application of Wafer Direct Bonding Technique to Optical Non- reciprocal Devices2011

    • Author(s)
      T. Mizumoto and R. Takei
    • Journal Title

      IEEE PhotonicsJournal

      Volume: vol.3,no.3 Pages: 588-596

    • Peer Reviewed
  • [Journal Article] Effect of wafer pre-cleaning andplasma irradiation to wafer surfaces for plasma-assisted surface activated bonding2010

    • Author(s)
      R. Takei, K. Yoshida, and T. Mizumoto
    • Journal Title

      Japanese Journal of AppliedPhysics

      Volume: vol.49,no.8 Pages: 086204

    • Peer Reviewed
  • [Journal Article] Design andsimulation of silicon waveguide optical circulator employing nonreciprocal phase shift2010

    • Author(s)
      R. Takei and T. Mizumoto
    • Journal Title

      Japanese Journal ofApplied Physics

      Volume: vol.49,no.5 Pages: 052203

    • Peer Reviewed
  • [Presentation] The first demonstration of silicon waveguide optical circulator2013

    • Author(s)
      K. Mitsuya, Y. Shoji, and T. Mizumoto
    • Organizer
      2013Optical Fiber Communication Conference (OFC 2013)
    • Place of Presentation
      Anaheim (USA)
    • Year and Date
      2013-05-21
  • [Presentation] High isolation in silicon waveguideoptical isolator employing non- reciprocal phase shift2013

    • Author(s)
      Y. Shirato, Y. Shoji, and T. Mizumoto
    • Organizer
      2013 Optical Fiber Communication Conference (OFC2013)
    • Place of Presentation
      Anaheim (USA)
    • Year and Date
      2013-03-19
  • [Presentation] Silicon waveguide wavelength-selective switch for on-chip WDM communications2012

    • Author(s)
      K. Miura, Y. Shoji, and T. Mizumoto
    • Organizer
      IEEE Photonics Conference 2012 (IPC 2012)
    • Place of Presentation
      Burlingame (USA)
    • Year and Date
      2012-09-26
  • [Presentation] On-chip optical isolatorsand silicon photonics2012

    • Author(s)
      T. Mizumoto, Y. Shoji, and K. Sakurai
    • Organizer
      The 17th Opto-Electronics and CommunicationsConference (OECC 2012)
    • Place of Presentation
      Busan (Korea)
    • Year and Date
      2012-07-06
  • [Presentation] Single trench SiON wave- guide TE-TMmode converter2012

    • Author(s)
      K. Nakayama, Y. Shoji, and T. Mizumoto
    • Organizer
      The 2012 Conference onLasers and Electro-Optics (CLEO 2012)
    • Place of Presentation
      Sann Jose(USA)
    • Year and Date
      2012-05-07
  • [Presentation] Improvement in couplingefficiency between a silicon waveguide and a surface mounted photo detector using an apodized grating coupler2011

    • Author(s)
      A. Fujimoto, K. Uchiho, Y. Shoji, and T.Mizumoto
    • Organizer
      The17th Microoptics Conference (MOC'11)
    • Place of Presentation
      仙台コンベンションセンター(宮城)
    • Year and Date
      2011-11-01
  • [Presentation] Efficiency Improvement of SOIWaveguide Grating for Coupling to Surface Mounted Photodetector2011

    • Author(s)
      R. Takei, K. Uchiho, and T. Mizumoto
    • Organizer
      The 8th International Conference on Group IV Photonics
    • Place of Presentation
      London(UK)
    • Year and Date
      2011-09-15
  • [Presentation] Materials anddesigns for nonreciprocal optical devices2010

    • Author(s)
      T. Mizumoto
    • Organizer
      2010 MRS Fall meeting
    • Place of Presentation
      Boston (USA), Tutorial-J
    • Year and Date
      2010-11-29

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Published: 2014-08-29  

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