2012 Fiscal Year Final Research Report
Synthesis and Mechanical Characterization of Nano-Columnar DLC Coating Toward Application of MEMS
| Project/Area Number |
22560089
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Shibaura Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2010 – 2012
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| Keywords | DLC / ナノカラム構造化 / 自己組織化 / カラム間グラファイト化 / 電子ビーム / 異常弾性挙動 / カラム間選択ドーピング / 接触角制御 |
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| Research Abstract |
Nano-columnar DLC (Diamond-Like Carbon) or amorphous carbon coating was made by PVD (Physical Vapor Deposition) method with electron beam irradiation. Its nano-structure and exotic mechanical properties were analyzed by AFM (Atomic Force Microscope) to investigate the nano-columnar structure and its relationship in the surface contact angle from hydrophilic to hydrophobic states.
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