2012 Fiscal Year Final Research Report
Investigation of the formation process of transparent conductive film by using superheated steam and/or water plasma jet
| Project/Area Number |
22656139
|
|---|
| Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
Physical properties of metals
|
|---|
| Research Institution | Tokyo University of Science |
|---|
Principal Investigator |
|
|---|
| Project Period (FY) |
2010 – 2012
|
| Keywords | 過熱蒸気 / 水熱反応 / 水プラズマ / 大気圧プラズマ / 透明導電膜 / 膜改質 |
|---|
| Research Abstract |
Reforming processes from metal film to hydroxide or oxide films by using superheated steam and/or atmospheric pressure water-plasma were investigated. The process of superheated steam was effective to promote dehydration or oxidation reaction. Homogeneous reforming on the surface was induced by scanning of a water-plasma plume. Transparent conductive film was successfully formed by hydrothermal reaction of Zn-Mg alloy film. As the conclusion, the hydrothermal treatment in the pure liquid water and subsequent reforming under the gaseous phases such as the superheated steam or the water-plasma were useful process for making the functional films.
|
