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2011 Fiscal Year Final Research Report

Study of interface passivation effect on band alignment at metal/semiconductor interface

Research Project

  • PDF
Project/Area Number 22760244
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionThe University of Tokyo

Principal Investigator

NISHIMURA Tomonori  東京大学, 大学院・工学系研究科, 技術専門職員 (10396781)

Project Period (FY) 2010 – 2011
Keywords電子デバイス・集積回路 / フェルミレベルピンニング
Research Abstract

The pinning level at metal/Ge interface is sensitive to the non metal element bonded to interface Ge and to the bond structure of Ge close to the interface. Whereas, the alleviation of Fermi level pinning depends on the inserting film, which is difficult to be explained only by simple models of interface level or by wave function penetration from metal.

  • Research Products

    (8 results)

All 2011 2010 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (6 results) Remarks (1 results)

  • [Journal Article] High-Electron-Mobility Gen-Channel Meta-Oxide-Semiconductor Field Effect Transisitors with High-Pressure Oxidized Y2O32011

    • Author(s)
      T. Nishimura, C. H. Lee, T. Tabata, S. K. Wang, K. Nagashio, K. Kita, and A. Toriumi
    • Journal Title

      Appl. Phys. Express

      Volume: Vol.6 Pages: 064201-1-3

    • DOI

      DOI:10.1143/APEX.4.064201

    • Peer Reviewed
  • [Presentation] 金属/Ge界面に導入した酸化膜と硫化膜がFermi-level pinningに与える影響の比較2011

    • Author(s)
      西村知紀,李忠賢,長汐晃輔,喜多浩之,鳥海明
    • Organizer
      2011年春季第58回応用物理学関係
    • Year and Date
      20110300
  • [Presentation] MIGS-metal layer formation model at metal/Ge Schottky barrier diode interface2011

    • Author(s)
      T. Nishimura and A. Toriumi
    • Organizer
      2011 IEEE 42nd Semiconductor Interface Specialists Conference(SISC)
    • Place of Presentation
      Arlington
    • Year and Date
      2011-12-02
  • [Presentation] A Study of Fermi-level Pinning in Ge Schottky and MIS Tunnel Junctions2011

    • Author(s)
      T. Nishimura, K. Nagashio, K. Kita and A. Toriumi
    • Organizer
      International Conference on Solid State Devices and Materials(SSDM)
    • Place of Presentation
      Nagoya
    • Year and Date
      2011-09-29
  • [Presentation] High-k/GeMOSFETにおける移動度特性の向上2011

    • Author(s)
      西村知紀,李忠賢,王盛凱,田畑俊行,長汐晃輔,喜多浩之,鳥海明
    • Organizer
      第16回ゲートスタック研究会-材料・プロセス・評価の物理-
    • Place of Presentation
      Tokyo
    • Year and Date
      2011-01-27
  • [Presentation] Electoron Mobility in High-k Ge MISFETs Goes up to Higher2010

    • Author(s)
      T. Nishimura, C. H. Lee, S. K. Wang, T. Tabata, K. Kita, K. Nagashio, and A. Toriumi
    • Organizer
      2010 Symposiaon VLSI Technology and
    • Place of Presentation
      Honolulu
    • Year and Date
      2010-06-17
  • [Presentation] Long Range Pinning Interaction in Ultra-thin Insulator-inserted Metal/Germanium Junctions2010

    • Author(s)
      T. Nishimura, K. Kita, K. Nagashio, and A. Toriumi
    • Organizer
      2010 Silicon Nanoelectronics Workshop
    • Place of Presentation
      Honolulu
    • Year and Date
      2010-06-13
  • [Remarks]

    • URL

      http://www.adam.t.u-tokyo.ac.jp

URL: 

Published: 2013-07-31  

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