2023 Fiscal Year Final Research Report
Development of high-performance deformable mirror with nobel structure
| Project/Area Number |
22K18752
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| Research Category |
Grant-in-Aid for Challenging Research (Exploratory)
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| Allocation Type | Multi-year Fund |
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| Review Section |
Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
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| Research Institution | Nagoya University |
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Principal Investigator |
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| Project Period (FY) |
2022-06-30 – 2024-03-31
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| Keywords | X線ミラー / 形状可変鏡 / X線光学 |
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| Outline of Final Research Achievements |
X-ray optics mainly handles light with wavelengths from 10 to 0.01 nm, so mirrors with extremely high shape accuracy are required for ideal experiments. However, even with current state-of-the-art technology, there is still an fabrication error of around 2 nm in the mirror fabrication. To solve this problem, we proposed a monolithic deformable mirror based on a single-crystal piezoelectric element. The design was carefully considered using finite element simulation, and a prototype was fabricated. The performance was evaluated using visible light interferometry and X-ray interferometry, and was found to have high stability and reproducibility. It was confirmed that the performance of the proposed device can be applied to actual X-ray experiments.
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| Free Research Field |
X線光学
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| Academic Significance and Societal Importance of the Research Achievements |
本研究で開発された高性能な形状可変鏡は，様々な領域で波面収差の補正を実施できるポテンシャルを有していた．例えば，X線顕微鏡，X線望遠鏡，X線ナノビーム，X線（EUV）リソグラフィにおいては，残存する波面収差によって性能劣化が引き起こされている．安定かつ再現性良くこれを補正することが可能となり，これらの性能向上へとつながることが予想される．X線光学における技術向上が次世代のX線光学を拓くために必要であり，本研究で得られた形状可変鏡はその一助になると考える．
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