2013 Fiscal Year Annual Research Report
サブナノメートルの分解能を実現する走査型熱顕微鏡の開発
Project/Area Number |
23310068
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Research Institution | National Institute for Materials Science |
Principal Investigator |
CUSTANCE Oscar 独立行政法人物質・材料研究機構, 極限計測ユニット, グループリーダー (00444555)
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Project Period (FY) |
2011-04-01 – 2014-03-31
|
Keywords | 走査型熱顕微鏡 / 原子間力顕微鏡 |
Research Abstract |
In fiscal year 2014, we completed the construction of the scanning thermal microscope. We have tested the microscope that is able to produce atomic resolution images in atomic force microscopy (AFM) mode using standard silicon cantilevers using optical interferometric detection of the cantilever dynamics. We tested that we can use the heating tips designed by IBM and performed scanning thermal imaging of a diamond (111) single crystal simultaneously measuring the cantilever displacement over the surface with our optical interferometer with tens of picometer resolution. Accordingly, we are able to decouple thermal signals from the topographic signals. In summary, the scanner thermal microscope we aimed to develop under this project is fully operative.
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Current Status of Research Progress |
Reason
25年度が最終年度であるため、記入しない。
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Strategy for Future Research Activity |
25年度が最終年度であるため、記入しない。
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Research Products
(4 results)