2013 Fiscal Year Final Research Report
Development of precision hybrid diamond tool and its application to micro-device fabrication
| Project/Area Number |
23360067
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Chiba University |
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Principal Investigator |
MORITA Noboru 千葉大学, 工学(系)研究科(研究院), 教授 (30239660)
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| Co-Investigator(Kenkyū-buntansha) |
SOUTA Matsusaka 千葉大学, 大学院・工学研究科, 助教 (30334171)
HIDAI Hirofumi 千葉大学, 大学院・工学研究科, 准教授 (60313334)
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| Project Period (FY) |
2011-04-01 – 2014-03-31
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| Keywords | 微細加工 / AFM / FIB / カンチレバー |
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| Research Abstract |
The purpose of this study was to develop high precision micro-diamond tool and to apply device fabrication with micro-structure. A diamond cutting tool was fabricated with silicon mold, and CVD diamond deposition, and then the edge with point, front, and side angles was conditioned with FIB. The diamond tool was attached to tool holders. In order to attach in desired position accurately, tool fabrication machine was fabricated. High-aspect ratio V-groove machining was demonstrated with the developed tools.
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