• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

2013 Fiscal Year Final Research Report

Study on crystalline growth of phase transition oxides with various oxidation states and their electric transport characteristics

Research Project

  • PDF
Project/Area Number 23560013
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionTokai University

Principal Investigator

OKIMURA Kunio  東海大学, 工学部, 教授 (00194473)

Project Period (FY) 2011 – 2013
Keywords相転移酸化物 / バナジウム酸化物 / 絶縁体金属転移 / マグネリ相 / 結晶成長 / 薄膜堆積 / 相共存 / アニール効果
Research Abstract

In this project, we studied vanadium dioxide (VO2) with insulator-metal transition (IMT) and related oxide phases which possess different oxidation states such as VnO2n-1 and VnO2n+1. By using mass flow controller which enabled fine control of oxygen partial pressure, we successfully fabricated crystalline V2O3 films on sapphire and silicon substrates. Obtained V2O3 films transformed to VnO2n-1 and VnO2n+1 phases by post-annealing in oxygen atmosphere with adequate temperature and time. Through the study, electrical transport characteristics of VnO2n-1 and VnO2n+1 were partially clarified and the significance of phase coexistence in vanadium oxide thin films was shown.

  • Research Products

    (33 results)

All 2014 2013 2012 2011

All Journal Article (9 results) (of which Peer Reviewed: 9 results) Presentation (24 results)

  • [Journal Article] Temperature - dependent Raman and UPS studies on phase transition behavior of VO_2 films with M1 and M2 phases2014

    • Author(s)
      Kunio Okimura, Nurul Hanis Azhan, Tetsuya Hajiri, Shin-ichi Kimura, Mustapha Zaghrioui and Joe Sakai
    • Journal Title

      J. Appl. Phys.

      Volume: vol.115 Pages: 153501

    • Peer Reviewed
  • [Journal Article] Effects of energetic substrate-incident ions on the growth of crystalline vanadium dioxide films in inductively coupled plasma-assisted sputtering2014

    • Author(s)
      Md. Suruz Mian and Kunio Okimura
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: vol.53, No.3 Pages: 035802

    • Peer Reviewed
  • [Journal Article] Phase selective growth and characterization of vanadium dioxide films on silicon substrates2013

    • Author(s)
      Tomo Watanabe, Kunio Okimura, Shin-ichi Kimura, Tetsuya Hajiri and Joe Sakai
    • Journal Title

      J. Appl. Phys.

      Volume: vol.113 Pages: 163503

    • Peer Reviewed
  • [Journal Article] Pulsed laser-deposited VO_2 thin films on Pt layers2013

    • Author(s)
      Joe Sakai, Mustapha Zaghrioui, Vinh Ta Phuoc, Sylvain Roger, Cecile Autret-Lambert, and Kunio Okimura
    • Journal Title

      J. Appl. Phys.

      Volume: vol.113 Pages: 123503

    • Peer Reviewed
  • [Journal Article] Low-temperature oriented growth of vanadium dioxide films on CoCrTa metal template on Si and vertical metal-insulator transition2012

    • Author(s)
      Kunio Okimura, and Md.Suruz Mian
    • Journal Title

      J. Vac. Sci. Technol.

      Volume: A 30 Pages: 051502

    • Peer Reviewed
  • [Journal Article] Stress-induced VO_2 films with M2 monoclinic phase stable at room temperature grown by inductively coupled plasma-assisted reactive sputtering2012

    • Author(s)
      Kunio Okimura, Tomo Watanabe, and Joe Sakai
    • Journal Title

      J. Appl. Phys.

      Volume: vol.111 Pages: 073514

    • Peer Reviewed
  • [Journal Article] Photo-induced lattice softening of excited-state VO_22011

    • Author(s)
      Masaki Hada, Kunio Okimura and Jiro Matsuo
    • Journal Title

      Appl. Phys. Lett.

      Volume: 99 Pages: 051903

    • Peer Reviewed
  • [Journal Article] Epitaxial Growth of V_2O_3 Thin Films on c-Al_2O_3 in Reactive Sputtering and Its Transformation to VO_2 Films by Post-annealing2011

    • Author(s)
      Kunio Okimura and Yasushi Suzuki
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol.50, No.6 Pages: 065803

    • Peer Reviewed
  • [Journal Article] 反応性スパッタ法による相転移V_2O_3薄膜のサファイア基板上へのエピタキシャル成長2011

    • Author(s)
      沖村邦雄,鈴木康史
    • Journal Title

      Journal of the Vacuum Society of Japan (真空)

      Volume: Vol.54, No3 Pages: 169-172

    • Peer Reviewed
  • [Presentation] TiNバッファー層によるVO_2薄膜の結晶成長及び転移特性の改善2014

    • Author(s)
      モハメッドシュルズミヤ,沖村邦雄
    • Organizer
      第61回応用物理学会春季学術講演会予稿集
    • Place of Presentation
      青山学院大学(18a-E8-6)
    • Year and Date
      20140000
  • [Presentation] 反応性スパッタ法によるVO_2(B)薄膜の成長とアニールによるVO_2(M1)への変換2014

    • Author(s)
      ヌルーハニスアズハン,沖村邦雄
    • Organizer
      第61回応用物理学会春季学術講演会予稿集
    • Place of Presentation
      青山学院大学(19a-E8-8)
    • Year and Date
      20140000
  • [Presentation] ICP支援スパッタ法における基板入射イオンエネルギー分析とVO_2薄膜の低温成長に関する研究2013

    • Author(s)
      モハメッドシュルズミヤ,ヌルーハニスアズハン,沖村邦雄
    • Organizer
      第74回応用物理学会学術講演会予稿集
    • Place of Presentation
      同志社大学(16p-D3-3)
    • Year and Date
      20130000
  • [Presentation] スパッタ法により堆積したVO_2薄膜の電気的特性とポストアニールによる伝導型反転2013

    • Author(s)
      ヌルーハニスアズハン,沖村邦雄
    • Organizer
      第74回応用物理学会学術講演会予稿集
    • Place of Presentation
      同志社大学(16p-D3-5)
    • Year and Date
      20130000
  • [Presentation] Insulator-metal Transition of VO_2 Films on Noble Metal Bottom Electrodes2013

    • Author(s)
      J. Sakai, M. Zaghrioui, V. T. Phuoc, J. Wolfman, and K. Okimura
    • Organizer
      2013JSAP-MRS Joint Symposium
    • Place of Presentation
      同志社大学(19a-M6-8, JSAP-MRS-E-008)
    • Year and Date
      20130000
  • [Presentation] Layered growth of vanadium dioxide films on Ti/Si by inductively coupled plasma assisted sputtering method and out-of-plane electrical switching characteristics2013

    • Author(s)
      Md. Suruz Mian and Kunio Okimura
    • Organizer
      Proceedings of. 12^<th> International Symposium on Sputtering and Plasma Proccess (ISSP 2013)
    • Place of Presentation
      Kyoto
    • Year and Date
      20130000
  • [Presentation] Electrical Properties of Post-annealed VO_2 Thin Films on Silicon Substrates with Metal-Insulator Transition2013

    • Author(s)
      Nurul Hanis Azhan and Kunio Okimura
    • Organizer
      Proceedings of. 12^<th> International Symposium on Sputtering and Plasma Proccess (ISSP 2013)
    • Place of Presentation
      Kyoto
    • Year and Date
      20130000
  • [Presentation] ICP支援スパッタ法によるTi/Si(100)上へのVO_2薄膜の低温成長と積層方向スイッチング2013

    • Author(s)
      モハメッドシュルズミヤ,沖村邦雄
    • Organizer
      第60回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工大(29p-F2-19)
    • Year and Date
      20130000
  • [Presentation] ガラス基板上M2相VO_2薄膜の結晶構造変態と金属-絶縁体転移特性2013

    • Author(s)
      沖村邦雄,渡部智,坂井穣
    • Organizer
      第60回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工大(29p-F2-18)
    • Year and Date
      20130000
  • [Presentation] Electrical Properties of VO_2 Thin Films and Post-annealing Effects on the Growth of Non-stoichiometric VOx2013

    • Author(s)
      Nurul Hanis Azhan and Kunio Okimura
    • Organizer
      MJIIT-JUC Joint Symposium 2013 (MJJS 2013)
    • Place of Presentation
      Tokai University, Hiratsuka, Japan(Proceedings ES-2-2)
    • Year and Date
      2013-11-06
  • [Presentation] ストレス誘起M_2相VO_2薄膜の電子状態と相転移特性2012

    • Author(s)
      渡部智,モハメッドシュルズミヤ,沖村邦雄,坂井穣
    • Organizer
      第73回応用物理学会学術講演会予稿集
    • Place of Presentation
      愛媛大学・松山大学(12a-C13-4)
    • Year and Date
      20120000
  • [Presentation] ICP支援スパッタ法によるTi/Si(100)上へのVO_2薄膜の低温成長2012

    • Author(s)
      モハメッドシュルズミヤ,沖村邦雄
    • Organizer
      第73回応用物理学会学術講演会予稿集
    • Place of Presentation
      愛媛大学・松山大学(12a-C13-5)
    • Year and Date
      20120000
  • [Presentation] ICP支援スパッタ法による金属膜上へのVO_2薄膜の成長と積層方向スイッチング特性2012

    • Author(s)
      モハメッドシュルズミヤ,沖村邦雄
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(17p-F6-12)
    • Year and Date
      20120000
  • [Presentation] ICP支援スパッタ法におけるストレス誘起M2相VO_2薄膜の成長とその特性2012

    • Author(s)
      渡部智,沖村邦雄,坂井穣
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(17p-F6-13)
    • Year and Date
      20120000
  • [Presentation] 反応性スパッタ法によるマグネリ相を含む低酸化度バナジウム酸化膜堆積2012

    • Author(s)
      鈴木康史,沖村邦雄
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(17p-F6-14)
    • Year and Date
      20120000
  • [Presentation] Vanadium Dioxide Film Growth onn Titanium Metal Layer on Si (100) by Inductively Coupled Plasma Assisted Sputtering Method2012

    • Author(s)
      Md. Suruz Mian and Kunio Okimura
    • Organizer
      MJIIT-JUC Joint Symposium 2012 (MJJS 2012)
    • Place of Presentation
      MJIIT, UTM, KL, Malaysia(Proceedings ESE-8)
    • Year and Date
      2012-11-21
  • [Presentation] Electrical Properties of Vanadium Dioxide Thin Films on Silicon Substrate with Metal-Insulator Transition2012

    • Author(s)
      Nurul Hanis Azhan and Kunio Okimura
    • Organizer
      MJIIT-JUC Joint Symposium 2012 (MJJS 2012)
    • Place of Presentation
      MJIIT, UTM, KL, Malaysia(Proceedings ESE-8)
    • Year and Date
      2012-11-21
  • [Presentation] 反応性スパッタ法によるマグネリ相酸化バナジウム薄膜の堆積と相転移特性2012

    • Author(s)
      鈴木康史,沖村邦雄
    • Organizer
      第53回真空に関する連合講演会予稿集
    • Place of Presentation
      甲南大学ポートアイランドキャンパス(15P-16)
    • Year and Date
      2012-11-15
  • [Presentation] ICP支援スパッタ法によるM_2相VO_2薄膜の成長と相転移特性2011

    • Author(s)
      渡部智,モハメッドシュルズミヤ,沖村邦雄
    • Organizer
      第72回応用物理学会学術講演会予稿集
    • Place of Presentation
      山形大学(1a-ZK-1)
    • Year and Date
      20110000
  • [Presentation] サファイアc面基板上にスパッタ成膜したV_2O_3薄膜の相転移特性と膜中ストレスの影響2011

    • Author(s)
      鈴木康史,沖村邦雄
    • Organizer
      第72回応用物理学会学術講演会予稿集
    • Place of Presentation
      山形大学(1a-ZK-3)
    • Year and Date
      20110000
  • [Presentation] c面サファイア基板上バナジウム酸化膜におけるマグネリ相を含む相共存モデル2011

    • Author(s)
      鈴木康史,沖村邦雄
    • Organizer
      第52回真空に関する連合講演会予稿集
    • Place of Presentation
      学習院大学(17P-39)
    • Year and Date
      2011-11-17
  • [Presentation] Growth of phase transition VO_2 films with M_2 phase in inductively coupled plasma assisted reactive sputtering2011

    • Author(s)
      T. Watanabe, Md. Suruz Mian, K.Okimura and J. Sakai
    • Organizer
      15^<th> International Conference on Thin Films
    • Place of Presentation
      KyotoTERSSA(P-S2-44)
    • Year and Date
      2011-11-10
  • [Presentation] Growth of vanadium dioxide thin films with metal-insulator transition on CoCrTa/Si at low temperature2011

    • Author(s)
      Md. Suruz Mian and Kunio Okimura
    • Organizer
      15^<th> International Conference on Thin Films
    • Place of Presentation
      KyotoTERSSA(P-S2-33)
    • Year and Date
      2011-11-10
  • [Presentation] Effects of phase coexistence and stress on the metal-insulator transition of V_2O_3 films grown on c-plane sapphire in reactive sputtering2011

    • Author(s)
      K.Okimura and Y. Suzuki
    • Organizer
      11^<th> International Conference on Sputtering & Plasma Processes (ISSP2011) TF 1-5
    • Place of Presentation
      Kyoto research Park
    • Year and Date
      2011-07-08

URL: 

Published: 2015-07-16  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi