2013 Fiscal Year Final Research Report
Digital hologram measurements of thermohydrodynamic behavior at a thermally-assisted UV nanoimprint process
| Project/Area Number |
23560243
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Thermal engineering
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| Research Institution | Tokyo University of Science |
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Principal Investigator |
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| Project Period (FY) |
2011 – 2013
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| Keywords | 流体計測 / ホログラム / インプリント / 光硬化樹脂 |
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| Research Abstract |
This study reports on a technique for measuring four-dimensional flow of UV curable resin during the process of nanoimprinting by employing a micro-digital-holographic particle-tracking velocimetry (micro-DHPTV) technique. In this study, high time-resolution measurements of flow field of UV curable resin at a press process step accompanied by a heating of UV-NIL were carried. The temperature dependence of UV curable resin was evaluated by measuring the UV curable resin while varying its temperature.
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