2013 Fiscal Year Final Research Report
Investigation by Complementary Approach on Fluid-Surface Interaction from Molecular Scale
| Project/Area Number |
23760153
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Fluid engineering
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| Research Institution | Nagoya University |
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Principal Investigator |
YAMAGUCHI Hiroki 名古屋大学, 工学(系)研究科(研究院), 准教授 (50432240)
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| Project Period (FY) |
2011 – 2013
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| Keywords | 流体工学 / 表面相互作用 / 適応係数 / 分子線散乱実験 |
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| Research Abstract |
To investigate the gas-surface interaction on non-metal surfaces widely used in the micro-technology, a novel measurement system for the thermal accommodation coefficient, which represents energy transfer between gas and surface, was proposed. Even though there were some troubles on a molecular beam scattering experimental apparatus, numerical analyses by the molecular dynamics method gave a qualitative characteristics on the gas-surface interaction. By setting appropriate conditions obtained from the numerical results, the successive measurements will lead to the understanding on characteristics of the interaction.
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