Laser micro-machining using photonic nanojets controlled by in-situ measurement

2015 Fiscal Year Final Research Report

• Project/Area Number: 24246028
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Osaka University
• Principal Investigator: Takaya Yasuhiro 大阪大学, 工学(系)研究科(研究院), 教授 (70243178)
• Co-Investigator(Kenkyū-buntansha): Hayashi Terutake 大阪大学, 大学院工学研究科, 准教授 (00334011) ; Michihata Masaki 大阪大学, 大学院工学研究科, 助教 (70588855) ; Mzutani Yasuhiro 大阪大学, 大学院工学研究科, 准教授 (40374152)
• Project Period (FY): 2012-04-01 – 2016-03-31
• Keywords: フォトニック・ナノジェット / 超高アスペクト比微細加工 / 微粒子レンズ / 光放射圧 / フェムト秒パルスレーザー / 非熱的アブレーション加工 / 定在場スケール / 加工量計測

Outline of Final Research Achievements

A novel machining method using the photonic nanojet (PNJ) is proposed to fabricate a three dimensional mico-shape with nanometer scale. The femtosecond pulse PNJ machining system was developed using the tunable femtosecond Ti:Sapphire laser. The laser machining of the Si wafer with the material removal of sub-micrometer scale was achieved by employing the PNJ position control method using the microsphere stably attached to a micropipette. The chromatic confocal system is introduced to measure the position of the microsphere accurately. Using this technique, the interpolated PNJ standing wave scale enables to measure displacement with an accuracy of dozens of nananometers for the bases of in-process measurement. A novel scanning probe microscopy for imaging surface topography using the optically trapped microsphere is proposed. It was confirmed that the proposed method could resolve the surface topography with a sub-micron resolution by measuring the gratings with 1800 GPM.

Free Research Field

機械工学・生産工学・加工学