2014 Fiscal Year Final Research Report
Improvement of the performance of Three Dimensional large scale stage by simultaneous measurement of location and metrological frame
| Project/Area Number |
24560305
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Tokyo Denki University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
OZAKI Miyu 東京電機大学, 大学院工学研究科, 助教 (80550590)
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Keywords | 三次元ステージ / 運動軸の形状偏差 / 参照鏡の形状偏差 / 測定フレーム |
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| Outline of Final Research Achievements |
The reference mirrors are placed on each axis of the movable stage with two orthogonal axes. The displacement signal from the laser interferometers is detected, which include the shape of the axes and the profile of reference mirrors. If neither shape of axes nor profile of the reference mirrors exist, this mechanism can measure the tow directional location of stage. In order to measure the shape of axes and the profile of reference mirrors, the signal is detected by the laser interferometers, making the stage move. The shape of the axes and the profile of reference mirrors are separated in two dimensional direction from the signal from the laser interferometers.
Moreover, adding one axis to the above results, The shape of the axes and the profile of reference mirrors are separated in three dimensional direction.
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| Free Research Field |
精密測定
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