Development of a form measuring device for machined planar surface by multi point method

2015 Fiscal Year Final Research Report

• Project/Area Number: 25420057
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Production engineering/Processing studies
• Research Institution: Kyushu Institute of Technology
• Principal Investigator: Shimizu Hiroki 九州工業大学, 大学院工学研究院, 准教授 (50323043)
• Co-Investigator(Kenkyū-buntansha): TAMARU YUUMA 九州工業大学, 大学院工学研究院, 助教 (30284590)
• Co-Investigator(Renkei-kenkyūsha): SAKAMOTO KENJI 九州工業大学, マイクロ化総合技術センター, 准教授 (10379290)
• Research Collaborator: TAKEUCHI SHUUZOU 北九州学術推進機構(FAIS), 半導体技術センター, 主任研究員
• Project Period (FY): 2013-04-01 – 2016-03-31
• Keywords: 形状測定 / 平面度 / 真直度 / MEMS / 多点法

Outline of Final Research Achievements

Multi sensor devices which measure displacement of three of five points simultaneously were designed for realizing on-machine measurement of machined planar surface with high accuracy. A total process was developed to fabricate this large scale micro electro mechanical systems (MEMS) device. By using this process, prototypes of proposed devices were manufactured. In addition, a data processing code for reconstructing a planar shape by connecting straightness data acquired by a multi sensor device was programmed. Furthermore, property of accumulated error in a planar form measurement was calculated by Monte Carlo method.

Free Research Field

計測工学