2016 Fiscal Year Final Research Report
Development and sophistication of new microfabrication technique of polyimide using supercritical carbon dioxide
| Project/Area Number |
26420765
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Properties in chemical engineering process/Transfer operation/Unit operation
|
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| Research Institution | Kanazawa University (2016)
Hiroshima University (2014-2015) |
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Principal Investigator |
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Keywords | ポリイミド / 超臨界二酸化炭素 / 微細加工 / 重合速度 / 高圧蒸着重合 |
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| Outline of Final Research Achievements |
In the present work, the new deposition technique of polyimide using supercritical carbon dioxide was developed and sophisticated. The polyimides that were consisted of 2,2-bis(3,4-anhydrodicarboxyphenyl)-hexafluoropropane (6FDA) and 2,2’-bis(trifluoromethyl)-4,4’-diaminobiphenyl (TFDB) (fluorinated polyiomide), and pyromellitic dianhydride (PMDA) and TFDB (Kapton-fluorinated polyimide) could be fully deposited inside the microscale trenches of Si wafer at the high level of feed monomer concentration.
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| Free Research Field |
プロセス工学、熱工学
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