2015 Fiscal Year Final Research Report
Development of Highly-Durable Surface Textured Forming Die by In-Plane Hetero-Structuring of Diamond Like Carbon Films
Project/Area Number |
26820327
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Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Multi-year Fund |
Research Field |
Material processing/Microstructural control engineering
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Research Institution | Tokyo Metropolitan University |
Principal Investigator |
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Project Period (FY) |
2014-04-01 – 2016-03-31
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Keywords | 表面テクスチャリング / ドライ加工 / ダイヤモンド状炭素 / マイクロ金型 / ヘテロ構造 / 耐摩耗性 / ボールオンディスク試験 / イオン化物理蒸着法 |
Outline of Final Research Achievements |
To realize release of stress concertation at edge of textured surface under dry sliding friction, the present study porpposed in-plain hetero-structured DLC films, which has a textured structure filled with DLC films with different hardness. By combining ionized vapor deposition, oxygen plasma etching, and plasma enhanced chemical vapor deposition, proposed structure was achieved successfully in an single vacuum system. Tribological properties of fabricated hetero-structured DLC films under dry friction showed the expected function of prior wear of soft phase DLC for the self-construction of textured structure. Structural design in view of wear properties of the in-plain hetero-structured DLC film was theoretically discussed using Archard’s and Bhushan’s wear equations.
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Free Research Field |
工学
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