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Trial Manufacture of Ultra-precision Positioning Apparatus with High Speed Using Plastic

Research Project

Project/Area Number 02555048
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械力学・制御工学
Research Institutiontokyo Institute of Technology

Principal Investigator

OTSUKA Jiro  Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate Professor, 精密工学研究所, 助教授 (30016787)

Co-Investigator(Kenkyū-buntansha) YAMAGUCHI Toshiharu  Nippon Seiko Co., Precision Manufacturing Technology Division, General Manager, 精密生産技術部, 部長
岳 杜夫  三菱瓦斯化学(株), 電子材料事業本部, 部長
FUKADA Shigeo  Shinshu University, Department of Engineering, Associate Professor, 工学部, 助教授 (70156743)
KAGAWA Toshiharu  Tokyo Institute of Technology Department of Engineering, Lecturer, 工学部, 講師 (50108221)
MORIO Gaku  Mitsubishi Gas Kagaku Co., Electrical Material Division, General Manager
Project Period (FY) 1990 – 1991
Project Status Completed (Fiscal Year 1991)
Budget Amount *help
¥13,000,000 (Direct Cost: ¥13,000,000)
Fiscal Year 1991: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 1990: ¥10,500,000 (Direct Cost: ¥10,500,000)
KeywordsUltra-precision Positioning / Plastic / Speedy Positioning / Nanometer / Feedback Control
Research Abstract

An ultra-precision positioning apparatus with high speed and high accuracy is trially designed and manufactured, aiming at the use for semi-conductor lithography and ultra-precision machine tool.
(1)To obtain high speed,
a plastic BT resin is used to make a table lighter and to absorb the vibration, and an Anti Residual Vibration(ARV)system which absorb the inertia force caused by the table acceleration and deceleration is applied on the experimental apparatus to prevent the residual vibration.
(2)To obtain high accuracy,
control method is improved ; after a proportional gain is changed to a higher one during course positioning, the integral control is applied for fine positioning.
As a result,
(1)20 -60 ms shorter settling t+me can be obtained when using the ARV system for 1.5- 4.5 kg table mass.
(2)The positioning accuracy of dispersion error 0 nm and deviation error 3.2 nm can be obtained with the settling time of 251 ms.

Report

(3 results)
  • 1991 Annual Research Report   Final Research Report Summary
  • 1990 Annual Research Report
  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] Jiro OTSUKA: "Nanometer Positioning by Bit Control Using 3 Kinds of Leadscrews" Proc.the SEIKEN Symposium(International). 1. 59-66 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 川瀬 佳洋,大塚二郎,深田 茂生ほか: "ねじ駆動による超精密位置決め(第2報)ー比例ゲイン特性の改善によるナノメ-タ位置決め" 精密工学会誌. 57. 1211-1216 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 大塚 二郎,深田 茂生ほか: "超精密位置決めにおける3種類の送りねじの特性比較" 日本機械学会論文集. 57. 3293-3299 (1991)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] 青木 芳人,川瀬 佳洋,深田 茂生,大塚 二郎: "ねじ駆動による超精密位置決め(第1報)ーずべりねじとボ-ルねじによる基礎的研究" 精密工学会誌. N5646. 2033-2038 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeo Fukada and Jiro Otsuka: "Ultra-Precision Positioning Using Screw Drive" Proc.Sino-Japan Conference on Ultra-Precision Machining. 10. 1-6 (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshito Aoki, Yoshihiro Kawase, Shigeo Fukada, and Jiro Otsuka: "Ultra-precision Positioning Using Screw Drive (1st Report) - Fundamental Study by Sliding Screw and Ball Screw" J. Japan Society for Precision Engineering (in Japanese). 56-11. 2033-2038 (1990)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Shigeo Fukada and Jiro Otsuka: "Ultra-precision Positioning Using Screw Drive" Proc. 3rd Sino-Japan Conference on Ultra-precision Machining. 1-6. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Jiro Otsuka: "Nanometer Positioning by Bit Control Using Three Kinds of Lead screws" Proc. 16th SEIKEN Symposium (International). 59-66. (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Yoshihiro Kawase, Jiro Otsuka, Shigeo Fukada et al.: "Ultra-precision Positioning Using Screw Drive (2nd Report) - Nanometer Positioning" J. Japan Society for Precision Engineering (in Japanese). 57-7. 1211-1216 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Jiro Otsuka and Shigeo Fukada: "Characteristic Comparison of Three Kinds of Lead screws for Ultra-precision Positioning" Trans. Japan Society of Mechanical Engineers (in Japanese). 57-542C. 3293-3299 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1991 Final Research Report Summary
  • [Publications] Jiro OTSUKA: "Nanometer Positioning by Bit Control Using 3 Kinds of Leadscrews" Proc.the SEIKEN Symposium(International). 1. 59-66 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 川瀬 佳洋、大塚 二郎, 深田 茂生ほか: "ねじ駆動による超精密位置決め(第2報)-比例ゲイン特性の改善によるナノメ-タ位置決め" 精密工学会誌. 57. 1211-1216 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 大塚 二郎、深田 茂生ほか: "超精密位置決めにおける3種類の送りねじの特性比較" 日本機械学会論文集. 57. 3293-3299 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 大塚 二郎: "摩擦力を用いた位置決めで超高速・超精密を達成" 東京工大クロニクル. No.246. 12- (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 大塚 二郎: "摩擦駆動による精密位置決め" 学術月報. 44. 69- (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 高橋 道郎、大塚 二郎,深田 茂生ほか: "摩擦駆動による精密位置決めの研究(第4報)-すベりの制御による整定時間の短縮" 精密工学会誌. 57. 2048-2053 (1991)

    • Related Report
      1991 Annual Research Report
  • [Publications] 青木 芳人,川瀬 佳洋,深田 茂生,大塚 二郎: "ねじ駆動による超精密位置決め(第1報)ーすべりねじとボ-ルねじによる基礎的研究" 精密工学会誌. 56. 2033-2038 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] S.Fukada and J.Otsuka: "Ultraーprecision Positioning Using Screw Drive" Proc.of the 3rd SinoーJapan Conference on Uitraーprecision Machining.T10. 1-6 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 大塚 二郎: "超精密位置決めはどこまで進んだかーメカニズムを中心として" 機械設計. 34. 34-42 (1990)

    • Related Report
      1990 Annual Research Report
  • [Publications] 高橋 道郎,大塚 二郎: "摩擦駆動による精密位置決め" 精密工学会誌. 56. 1611-1614 (1990)

    • Related Report
      1990 Annual Research Report

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Published: 1990-04-01   Modified: 2016-04-21  

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