1991 Fiscal Year Final Research Report Summary
Trial Manufacture of Ultra-precision Positioning Apparatus with High Speed Using Plastic
Grant-in-Aid for Developmental Scientific Research (B)
|Allocation Type||Single-year Grants |
|Research Institution||tokyo Institute of Technology |
OTSUKA Jiro Tokyo Institute of Technology, Precision and Intelligence Laboratory, Associate Professor -> 東京工業大学, 精密工学研究所, 助教授 (30016787)
YAMAGUCHI Toshiharu Nippon Seiko Co., Precision Manufacturing Technology Division, General Manager, 精密生産技術部, 部長
岳 杜夫 三菱瓦斯化学(株), 電子材料事業本部, 部長
FUKADA Shigeo Shinshu University, Department of Engineering, Associate Professor, 工学部, 助教授 (70156743)
KAGAWA Toshiharu Tokyo Institute of Technology Department of Engineering, Lecturer, 工学部, 講師 (50108221)
MORIO Gaku Mitsubishi Gas Kagaku Co., Electrical Material Division, General Manager
|Project Period (FY)
1990 – 1991
|Keywords||Ultra-precision Positioning / Plastic / Speedy Positioning / Nanometer / Feedback Control|
An ultra-precision positioning apparatus with high speed and high accuracy is trially designed and manufactured, aiming at the use for semi-conductor lithography and ultra-precision machine tool.
(1)To obtain high speed,
a plastic BT resin is used to make a table lighter and to absorb the vibration, and an Anti Residual Vibration(ARV)system which absorb the inertia force caused by the table acceleration and deceleration is applied on the experimental apparatus to prevent the residual vibration.
(2)To obtain high accuracy,
control method is improved ; after a proportional gain is changed to a higher one during course positioning, the integral control is applied for fine positioning.
As a result,
(1)20 -60 ms shorter settling t+me can be obtained when using the ARV system for 1.5- 4.5 kg table mass.
(2)The positioning accuracy of dispersion error 0 nm and deviation error 3.2 nm can be obtained with the settling time of 251 ms.
Research Products (10 results)