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Ultra-high Speed and Ultra-precision Positioning by Friction Drive

Research Project

Project/Area Number 04402027
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 機械力学・制御工学
Research InstitutionShizuoka Institute of Science and Technology (1993)
Tokyo Institute of Technology (1992)

Principal Investigator

OTSUKA Jiro  Shizuoka Institute of Science and Technology, Department of Science and Engineering, Professor, 理工学部, 教授 (30016787)

Co-Investigator(Kenkyū-buntansha) KAGAWA Toshiharu  Tokyo Institute of Technology, Department of Engineering, Associate Professor, 工学部, 助教授 (50108221)
FUKADA Shigeo  Shizuoka University, Department of Engineering, Associate Professor, 工学部, 助教授 (70156743)
Project Period (FY) 1992 – 1993
Project Status Completed (Fiscal Year 1993)
Budget Amount *help
¥16,500,000 (Direct Cost: ¥16,500,000)
Fiscal Year 1993: ¥5,300,000 (Direct Cost: ¥5,300,000)
Fiscal Year 1992: ¥11,200,000 (Direct Cost: ¥11,200,000)
KeywordsFriction drive / Ultra-precision positioning / Ultra-high speed positioning / Nanometer / Positioning Accuracy / 超精密 / 超高速 / 位置決め
Research Abstract

The positioning apparatus is made which consists of the DC servometer, the drive wheel, the slider moved longitudinally by the friction force between the drive wheel and a slider, the table, its displacement measuring apparatus by laser and the controller. The following results can be obtained ;
1. For 1mum step responses repeated 100 times by PI control, the mean of the positioning errors E at 0.5 s after the table start, e.is -1.7nm, and their standard deviation, sigma, is 3.2 nm.
2. For 300 mm step responses, the modified velocity control is applied at the large displacement difference DELTAx between the target position x and table position y (DELTAx=x-y). Afterwards, at the small displacement of DELTAx, the table displacement feed-back control is applied. As a result of 100 times positioning trials, e=0.016 mum and sigma=0.17 mum at 2 s after the table start. The setting time, when the table comes into (〕SY.+-.〔)1 mum from the target position, is Ts=1.26s(mean).
3. There is a nonlinear elastic relationship between the small torque of the motor, T, and resultant small table displacement, y. Furthermore, for much smaller torque and table displacement, its relationship shows a better linearity, and plays an important role for obtaining nm positioning accuracy.
4. In comparison with the apparatus by the leadscrew drive, the driving force is larger for the apparatus by the friction drive. The noise and vibration during operation can not be measured.
5. This friction drive is applied to the driving system for the newly-developed nm surface grinder.

Report

(3 results)
  • 1993 Annual Research Report   Final Research Report Summary
  • 1992 Annual Research Report

Research Products

(28 results)

All Other

All Publications

  • [Publications] 高橋道郎・大塚二郎: "摩擦駆動による精密位置決めの研究(第5報)-押付力司変方式による位置決め精度向上" 精密工学会誌. 59. 637-642 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 高橋道郎・大塚二郎: "摩擦駆動による精密位置決めの研究(第6報)-高精度化と高速化" 精密工学会誌. 59. 1103-1108 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 大塚二郎・飯田昇・川瀬佳洋・秋野良平・深田茂生: "ねじ駆動による超精密位置決め(第3報)-ナノメータ精度位置決めと整定時間の短縮" 精密工学会誌. 59. 1655-1661 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 深田茂生・大塚二郎・泉原彰: "精密度形送りねじの潤滑摩擦特性(第2報)-平均接触面圧の影響とならし運転に伴う摩擦特性の変化" トライボロジスト. 38. 545-552 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Jiro OTSUKA,Shigeo FUKADA,Yoshito AOKI and Yoshito KAWASE: "Characteristic Comparison of 3Kinds of Leadscrews Used for Ultraprecision Positioning" Japanese Journal of Advanced Automation Technology. 4. 320-325 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] Jiro OTSUKA,Shigeo FUKADA,Yoshihiro KAWASE,Noboru IIDA and Yoshito AOKI: "Ultraprecision Positioning Using Lead screw Drive(2nd Report)-Nanometer Level Position" Int.J.Japan Society for Precision Enginecring. 27. 142-147 (1993)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.TAKAHASHI and J.OTSUKA: "Study of Precision Positioning by Friction Drive (5th Report) - Effects of Adjustable Normal Force on Drive Roller" J.of the Japan Society for Precision Engineering. 59,4 (in Japanese). 637-642 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] M.TAKAHASHI and J.OTSUKA: "Study of Precision Positioning by Friction Drive (6th Report) - Ultra-precise and Fast Positioning" J.of Japan Society for Precision Engineering. 59,7 (in Japanese). 1103-1108 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] J.OTSUKA, N.IIDA, Y.KAWASE, R.AKINO and S.FUKADA: "Ultra-precision Positioning Using Lead Screw Drive (3rd Report) - Nanometer Accuracy Positioning and Settling Time Reduction" J.of Japan Society for Precision Engineering. 59,10 (in Japanese). 1655-1661 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] J.OTSUKA, S.FUKADA, Y.AOKI and Y.KAWASE: "Characteristic Comparison of 3 Kinds of Leadscrews Used for Ultraprecision Positioning" Japanese J.of Advanced Automation Technology. 4,6. 320-325 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] J.OTSUKA, S.FUKADA, Y.KAWASE, N.IIDA and Y.AOKI: "Ultraprecision Positioning Using Lead Screw Drive (2nd Report) - Nanometer Level Positioning by Modifying Proportional Characteristic" Int.J.of the Japan Society for Precision Engineering. 27,2. 142-147 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1993 Final Research Report Summary
  • [Publications] 高橋道郎、大塚二郎: "摩擦駆動による精密位置決めの研究(第5報)-押付力可変方式による位置決め精度向上" 精密工学会誌. 59・4. 637-642 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 高橋道郎、大塚二郎: "摩擦駆動による精密位置決めの研究(第6報)-高精度化と高速化" 精密工学会誌. 59・7. 1103-1108 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 大塚二郎、深田茂生ほか: "ねじ駆動による超精密位置決の(第3報)-ナノメータ精度位置決めと整定時間短縮" 精密工学会誌. 59・10. 1655-1661 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 深田茂生、大塚二郎他: "精密位置決めの潤滑物性(第2報)-平均接触面圧の影響とならし運転に伴う摩擦特性変化" トライボロジスト. 38・6. 545-552 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] J.Otsuka,S.Fukada et al.: "Characteristic Comparison of 3 kinds of headserews Used for Ultraprecision Positioning" Japanese J.Odvaneed Outomation Technology. 4・6. 320-325 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] J.Otsuka,S.Fukada et al.: "Ultraprecision Positioning Using Leadscren Drive(2nd Report)-Nanometer livel Positioning" Jnt J.Japan Society for Precision Bginering. 27・2. 142-147 (1993)

    • Related Report
      1993 Annual Research Report
  • [Publications] 賀勢晋司、深田茂生: "機械要素(ねじ)の研究と手法" 精密工学会誌. 60・1. 27-30 (1994)

    • Related Report
      1993 Annual Research Report
  • [Publications] 大塚 二郎: "機精面からみた超精密・超高速位置決め技術(1)" 機械の研究. 44. 743-747 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 大塚 二郎: "機精面からみた超精密・超高速位置決め技術(2)" 機械の研究. 44. 861-865 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Jiro Otsuka: "Ultraprecision Positivning Vsing a Ledd Screw Drive(1et Report)-Fundamented Study using a Sliving Screw or A Ball Screw-" Int J.Japan Sogiety for Precision Eng. 26. 231-236 (1192)

    • Related Report
      1992 Annual Research Report
  • [Publications] Jiro Otsuka: "Nanumater Level Pwsitioning Vsing Three Kinds of head screws" Nanotechlogy. 2. 29-36 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] Jiro Otsuka: "Study of Precision Positioning by Friction Drive(2nd Report)-Trapezoidal Veloctiy Conrol-" Int.J.Japan Sociery for Precision Eng. 26. 800-805 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] shiheo Fukada: "Friction of Precision Trapezoidal Lead Screws Unden Luvrication (1st Report)-Effect of Revolution Sped and Oil Viscosity-" Japan J.Tribology. 36. 1447-1460 (1991)

    • Related Report
      1992 Annual Research Report
  • [Publications] Jiro Otsuka: "Characteristics of Friction Drive and Thein Applecation to Precison Pisitioning" Bull P.&.I.(Tokyo Institute of Technology). 67. 1-11 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 大塚 二郎: "ボールねじを位置決め用としてフル活用するため" 機械設計. 36. 17-24 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 深田 茂生: "滑り送りねじの摩擦と潤滑(1)" 日本ねじ研究協会法. 23. 211-219 (1992)

    • Related Report
      1992 Annual Research Report
  • [Publications] 深田 茂生: "滑り送りねじの摩擦と潤滑(2)" 日本ねじ研究協会法. 23. 249-261 (1992)

    • Related Report
      1992 Annual Research Report

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Published: 1992-03-31   Modified: 2016-04-21  

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