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1993 Fiscal Year Final Research Report Summary

Ultra-high Speed and Ultra-precision Positioning by Friction Drive

Research Project

Project/Area Number 04402027
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field 機械力学・制御工学
Research InstitutionShizuoka Institute of Science and Technology (1993)
Tokyo Institute of Technology (1992)

Principal Investigator

OTSUKA Jiro  Shizuoka Institute of Science and Technology, Department of Science and Engineering, Professor, 理工学部, 教授 (30016787)

Co-Investigator(Kenkyū-buntansha) KAGAWA Toshiharu  Tokyo Institute of Technology, Department of Engineering, Associate Professor, 工学部, 助教授 (50108221)
FUKADA Shigeo  Shizuoka University, Department of Engineering, Associate Professor, 工学部, 助教授 (70156743)
Project Period (FY) 1992 – 1993
KeywordsFriction drive / Ultra-precision positioning / Ultra-high speed positioning / Nanometer / Positioning Accuracy
Research Abstract

The positioning apparatus is made which consists of the DC servometer, the drive wheel, the slider moved longitudinally by the friction force between the drive wheel and a slider, the table, its displacement measuring apparatus by laser and the controller. The following results can be obtained ;
1. For 1mum step responses repeated 100 times by PI control, the mean of the positioning errors E at 0.5 s after the table start, e.is -1.7nm, and their standard deviation, sigma, is 3.2 nm.
2. For 300 mm step responses, the modified velocity control is applied at the large displacement difference DELTAx between the target position x and table position y (DELTAx=x-y). Afterwards, at the small displacement of DELTAx, the table displacement feed-back control is applied. As a result of 100 times positioning trials, e=0.016 mum and sigma=0.17 mum at 2 s after the table start. The setting time, when the table comes into (〕SY.+-.〔)1 mum from the target position, is Ts=1.26s(mean).
3. There is a nonlinear elastic relationship between the small torque of the motor, T, and resultant small table displacement, y. Furthermore, for much smaller torque and table displacement, its relationship shows a better linearity, and plays an important role for obtaining nm positioning accuracy.
4. In comparison with the apparatus by the leadscrew drive, the driving force is larger for the apparatus by the friction drive. The noise and vibration during operation can not be measured.
5. This friction drive is applied to the driving system for the newly-developed nm surface grinder.

  • Research Products

    (11 results)

All Other

All Publications (11 results)

  • [Publications] 高橋道郎・大塚二郎: "摩擦駆動による精密位置決めの研究(第5報)-押付力司変方式による位置決め精度向上" 精密工学会誌. 59. 637-642 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 高橋道郎・大塚二郎: "摩擦駆動による精密位置決めの研究(第6報)-高精度化と高速化" 精密工学会誌. 59. 1103-1108 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大塚二郎・飯田昇・川瀬佳洋・秋野良平・深田茂生: "ねじ駆動による超精密位置決め(第3報)-ナノメータ精度位置決めと整定時間の短縮" 精密工学会誌. 59. 1655-1661 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 深田茂生・大塚二郎・泉原彰: "精密度形送りねじの潤滑摩擦特性(第2報)-平均接触面圧の影響とならし運転に伴う摩擦特性の変化" トライボロジスト. 38. 545-552 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Jiro OTSUKA,Shigeo FUKADA,Yoshito AOKI and Yoshito KAWASE: "Characteristic Comparison of 3Kinds of Leadscrews Used for Ultraprecision Positioning" Japanese Journal of Advanced Automation Technology. 4. 320-325 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Jiro OTSUKA,Shigeo FUKADA,Yoshihiro KAWASE,Noboru IIDA and Yoshito AOKI: "Ultraprecision Positioning Using Lead screw Drive(2nd Report)-Nanometer Level Position" Int.J.Japan Society for Precision Enginecring. 27. 142-147 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.TAKAHASHI and J.OTSUKA: "Study of Precision Positioning by Friction Drive (5th Report) - Effects of Adjustable Normal Force on Drive Roller" J.of the Japan Society for Precision Engineering. 59,4 (in Japanese). 637-642 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.TAKAHASHI and J.OTSUKA: "Study of Precision Positioning by Friction Drive (6th Report) - Ultra-precise and Fast Positioning" J.of Japan Society for Precision Engineering. 59,7 (in Japanese). 1103-1108 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.OTSUKA, N.IIDA, Y.KAWASE, R.AKINO and S.FUKADA: "Ultra-precision Positioning Using Lead Screw Drive (3rd Report) - Nanometer Accuracy Positioning and Settling Time Reduction" J.of Japan Society for Precision Engineering. 59,10 (in Japanese). 1655-1661 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.OTSUKA, S.FUKADA, Y.AOKI and Y.KAWASE: "Characteristic Comparison of 3 Kinds of Leadscrews Used for Ultraprecision Positioning" Japanese J.of Advanced Automation Technology. 4,6. 320-325 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.OTSUKA, S.FUKADA, Y.KAWASE, N.IIDA and Y.AOKI: "Ultraprecision Positioning Using Lead Screw Drive (2nd Report) - Nanometer Level Positioning by Modifying Proportional Characteristic" Int.J.of the Japan Society for Precision Engineering. 27,2. 142-147 (1993)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1995-03-27  

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