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Characterization at atomic level and nanoprocessing of material using high-voltage electron microscopy

Research Project

Project/Area Number 07305031
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section総合
Research Field Physical properties of metals
Research InstitutionNAGOYA UNIVERSITY

Principal Investigator

SAKA Hiroyasu  DEPARTMENT OF QUANTUM ENGINNERING NAGOYA UNIVERSITY,PROFESSOR, 工学部, 教授 (90023267)

Co-Investigator(Kenkyū-buntansha) KINOSHITA Chiken  KYUSHUU UNIV., DEPARTMENT OF NUCLEAR ENGINEERING,PROFESSOR, 工学部, 教授 (50037917)
YAMAMOTO Naoki  TOKYO INST.TECHNOLOGY,DEPARTMENT OF PHYSICS,ASSOCIATE PROFESSOR, 理学部, 助教授 (90108184)
MAEDA Koji  TOKYOU UNIV., DEPARTMENT OF APPLIED PHYSICS,PROFESSOR, 工学系研究科, 教授 (10107443)
HIRAGA Kenji  TOHOKU UNIV., INSTITUTE FOR MATERIALS RESEARCH,PROFESSOR, 金属材料研究所, 教授 (30005912)
OHNUKI Somei  HOKKAIDOU UNIV., DEPARTMENT OF MATERIALS SCIENCE,PROFESSOR, 工学部, 教授 (10142697)
石田 洋一  東京大学, 工学部, 教授 (60013108)
高橋 平七郎  北海道大学, エネルギー先端工学研究センター, 教授 (80001337)
Project Period (FY) 1995 – 1996
Project Status Completed (Fiscal Year 1996)
Budget Amount *help
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 1996: ¥3,700,000 (Direct Cost: ¥3,700,000)
KeywordsHigh-voltage electron microscopy / Evaluation at atomic level / nanoprocessing / Elemental mapping / Interface / Surface / Phase transformation / Radiation damage / 原子レベル評価 / 高分解能動観察 / 局所元素分析 / 表面・界面 / ミキシング
Research Abstract

Fundamental structure and microstructure of a variety of ceramics was characterized on atomic resolution. A new method for characterization of materials by the element mapping was established. Precise analysis of EELS spectra led to determination of electronic structure and elemental analysis from nanometer regions. Local concentration of oxygen in YBCO was determined by the critical voltage effect.
Nucleation and growth of the ordered phase in the order-disorder transition was observed by high resolution electron microscopy. Behavior of defects such as dislocations and point defects and also melting process of crystals were observed dynamically. Nano-processing of diamond thin foils was attempted to improve its performance. Radiation damage of materials was also observed.
Growth process at the crystal surface and sputtering by electron beam were observed. Diordering and amorphitization of intermetallic compound by electron irradiation was studied and a method of nanocharacterization using an electron beam was established. Electron tomography was applied to identifying structural defects in LSI and its nanoprocessing.

Report

(3 results)
  • 1996 Annual Research Report   Final Research Report Summary
  • 1995 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] T.Kamino,T.Yaguchi,M.Tomita and H.Saka: "In-situ high-resolution electron microscopy atudy on a surface reconstruction of Au-deposited Si at very high temperature" Philosophical magazine, A. 75. 105-114 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Saka and G.Nagaya: "Plan-view transmission electron microscopy observation of a crack tip in silicon" Philosophical Magazine Letters. 72. 251-255 (1995)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Ha-G.Jeong,K.Hiraga,M.Mabuchi and K.Higashi: "Interface structure of Si_3 N_4-whisker-reinforced Al-Mg-Si alloy studied by high-resolution electron microscopy" Philosophical Magazine, A. 74. 73-80 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Jumonii,S.Ueta,A.Miyahara,M.Kato and A.Sato: "Rapid work hardening caused by cube cross slip in Ni_3 Al single crystals" Philosophical Magazine, A. 73. 345-364 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sasaki,H.Saka and T.Arii: "Vibrational motion of grain boundary in intermetallic compound induced by electron beam irradiation" Materials Transactions JIM. 37. 1037-1043 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Suzuki,N.Maeda and S.Takeuchi: "High resolution electron microscopy of dissociated dislocations in silicon with a normal-incident electron beam" Philosophical Magazine, A. 73. 431-441 (1996)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kamino, T.Yagchi, M.Tomita and H.Saka: "In-situ high resolution electron microsopy study on a surface reconstructin of Au-deposited Si at very high temperature" Philosophiocal Magazine A. 75. 105-114 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] H.Saka and G.Nagaya: "Plan-view transmission electron microscopy observation of a crack tip in silicon" Philosophiocal Magazine Letters. 72. 251-255 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] Ha-G.Jeong, K.Hiraga, M.Mabuchi and K.Higashi: "Interface structure of Si3N4-whisker reinforced Al-Mg-Si alloy studied by high resolution electron microscipy" Philosophiocal Magazine A. 74. 73-80 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.H.Jumonji, S.Ueta, A.Miyahara, M.Kato and A.Sato: "Rapid work hardening caused by cube cross slip in Ni3Al single crystals" Philosophiocal Magazine A. 73. 345-364 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Sasaki, H.Saka and T.Arii: "Vibrational motion of grain boundary in intermetallic compound induced by electron beam irradiation" Materials Transaction, JIM. 37. 1037-1043 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] K.Suzuki, N.Maeda and S.Takeuchi: "High resolution electron microscopy of dissociated dislocations in silicon with a normal-incident electron beam" Philosophiocal Magazine A. 73. 431-441 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1996 Final Research Report Summary
  • [Publications] T.Kamino,T.Yaguchi,M.Tomita and H.Saka: "In-situ high-resolution electron microscopy study on a surface reconstruction of Au-deposited Si at very high temperature" Philosophical magazine,A. 75. 105-114 (1997)

    • Related Report
      1996 Annual Research Report
  • [Publications] H.Saka and G.Nagaya: "Plan-view transmission electron microscopy observation of a crack tip in silicon" Philosophical Magazine Letters. 72. 251-255 (1995)

    • Related Report
      1996 Annual Research Report
  • [Publications] Ha-G.Jeong,K.Hiraga,M.Mabuchi and K.Higashi: "Interface structure of Si_3N_4-whisker-reinforced Al-Mg-Si alloy studies by high-resolution electron microscopy" Philosophical Magazine,A. 74. 73-80 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Junonji,S.Ueta,A.Miyahara,M.Kato and A.Sato: "Rapid work hardening caused by cube cross slip in Ni_3Al single crystals" Philosophical Magazine,A. 73. 345-364 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Sasaki,H.Saka and T.Arii: "Vibrational motion of grain boundary in intermetallic compound induced by electron beam irradiation" Materials Transactions JIM. 37. 1037-1043 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] K.Suzuki,N.Maeda and S.Takeuchi: "High resolution electron microscopy of dissociated dislocations in silicon with a normal-incident electron beam" Philosophical Magazine,A. 73. 431-441 (1996)

    • Related Report
      1996 Annual Research Report
  • [Publications] Kaneko.Y,Saka.H et al: "Evidence for Suzuki effect in an Fe-Ni-Cr steel" Philosophical Magazine A. 71. 399-407 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] A.Muroga,H.Saka: "Analysis of rolling contact fatiguel microstructure using focused in beam sputleving and TEM" Scripta Met.et Materialia. 33. 151-156 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] H.Saka,G.Nagaya: "Plan-view transmission electron microscopy observation of a crack tip in Si" Philosophical Magazine Letters. 72. 251-255 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] A.Mastumoto,H.Saka: "Effect of a superimposition of a normal stressi on the grild stiess of β-Ca to in direct shear" Philosophical Magazine A. 72. 1189-1199 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] S.Tsuji,H.Saka et al: "Cross-soctional characterization of thin-fil transistors with TEM" J Vac Sci Techrol B. 13. 1313-1357 (1995)

    • Related Report
      1995 Annual Research Report
  • [Publications] T.Kamino,H.Saka et al: "Dynamic observation of in situ sintering of SiC crystals at new atomic resolutin" Materials Transactions,JIM. 36. 73-75 (1995)

    • Related Report
      1995 Annual Research Report

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Published: 1996-04-01   Modified: 2016-04-21  

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