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Development of Carbon Nitride Biomaterial Hard Coating by Ion Beam Mixing Method

Research Project

Project/Area Number 09650136
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionNagoya University

Principal Investigator

MATSUMURO Akihito  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (80173889)

Co-Investigator(Kenkyū-buntansha) NAKAMOTO Takeshi  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (30198262)
MORI Toshihiko  Nagoya University, Engineering, Associate Professor, 工学研究科, 助教授 (90023340)
Project Period (FY) 1997 – 1998
Project Status Completed (Fiscal Year 1998)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 1998: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 1997: ¥2,600,000 (Direct Cost: ¥2,600,000)
KeywordsIon Beam Mixing Method / Carbon Nitride Film / Synthesis Condition / Mechanical Properties / Tribological Properties / Biomaterial / Hard Coating
Research Abstract

In order to develop carbon nitride biomaterial hard coating by ion beam mixing method, We investigated the subject under the following three heads : (l)synthesis of carbon nitride films on by ion beam mixing method ; (2)microstructure and tribological properties of carbon nitride films ; and (3) possibility of application for biomaterial hard coatings.
The following results were obtained :
1. We clarified that the formation condition of C-N thin film on silicon and titanium substrate by ion beam mixing method, in which carbon was evaporated by electron beam and nitrogen ions were simultaneously bombarded.
2. We clarified that C-N films were consisted of C-N network like the disordered turbostratic structure.
3. We clarified that the hardness was up to 20 GPa and the frictional coefficient was 0.2.
4. We concluded that the mechanical properties and the tribological properties of C-N film were suitable for biomaterial.

Report

(3 results)
  • 1998 Annual Research Report   Final Research Report Summary
  • 1997 Annual Research Report
  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] M.Kohzaki: "Preparation of carbon nitride thin films by ion beam assisted deposition and their mechanical properties" Thin Solid Films. 308-309. 239-244 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kohzaki: "Influence of deposition temperature on bonding state and microstructure of carbon nitride thin films prepared by ion-beam-assisted deposition" Jpn.J.Appl.Phys.36-14A. 2313-2318 (1997)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 神崎昌郎: "イオンビーム支援蒸着法による窒化炭素膜形成におけるArイオン添加の効果" 精密工学会誌. 64-1. 152-156 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] 松室昭仁: "ダイナミックイオンミキシング法によりTi-N系薄膜の形成とその機械的性質" 日本機械学会論文集. A64-618. 402-408 (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] A.Matsumuro: "Formation of TiN films with the preferred orientation by ion-beam-assisted deposition and their mechanical properties by nano-indentation method" Proc.CIMTEC'98. in print. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Hayashi: "Tribological properties of carbon nitride thin films prepared on titanium-nitride substrates by ion-beam-assisted deposition" Proc.CIMTEC'98. in print. (1998)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, M.Muramatsu, K.Yamaguchi: "Influence of deposition temperature on bonding state and microstructure of carbon nitride thin films prepared by ion-beam-assisted deposition." Jpn.J.Appl.Phys.36-14A. 2313-2318 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, M.Muramatsu, K.Yamaguchi: "Preparation of carbon nitride thin films by ion beam assisted deposition and their mechnical properties." Thin Solid Films. 308-309. 239-244 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Hayashi, A.Matsumuro, M.Muramatsu, K.Yamaguchi, Y.Takahashi: "Formation of Ti-N thin films prepared by dynamic ion mixing technique and their mechanical properties." Proc.IMMM'97. 591-598 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, M.Muramatsu, K.Yamaguchi: "Nano-indentation hardness and frictional characteristics of carbon nitride films produced by ion-beam-assisted deposition." Proc.Tribology in Manufacturing Processes'97. 310-315 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, M.Muramatsu, K.Yamaguchi: "Preparation of carbon nitride thin films by ion beam assisted deposition and their mechnical properties." Proc.ICMCTF'97. 203-203 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Hayashi, A.Matsumuro, M.Muramatsu, Y.Takahashi, M.Kohzaki, K.Yamaguchi: "Variation in the preferred-orientations and their mechanical properties of TiN thin films prepared by ion-beam-assisted deposition" Proc.SSAM-4. 279-282 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Hayashi, H.Yoshida, A.Matsumuro: "Visualization of atom-surface interaction using a molecular dynamics method." Proc.SSAM-4. 283-286 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kohzaki, A.Matsumuro, T.Hayashi, K.Yamaguchi: "Preparation of hard carbon nitride films and their microstructure" Proc.SSAM-4. 256-259 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] T.Hayashi、A.Matsumuro、M.Muramatsu、K.Yamaguchi: "Tribological properties of carbon-nitride thin films prepared on titanium-nitride substrates by ion-beam-assisted deposition." Proc.CIMTEC'98. (in print). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] A.Matsumuro、T.Watanabe、T.Hayashi、M.Muramatsu、Y.Takahashi、K.Yamaguchi: "Formation of TiN films with the preferred orientation by ion-beam-assisted deposition and their mechanical properties by nano-indentation method." Proc.CIMTEC'98. (in print). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1998 Final Research Report Summary
  • [Publications] M.Kohzaki: "Preparation of carbon nitride thin films by ion-beam assisted deposition and their mechanical proerties" Thin Solid Films. 308-309. 239-244 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kohzaki: "Influence of deposition temperature on bonding state and microstructure of carbon nitride thin films prepared by ion-beam-assiated deposition" Jpn.J.Appl.Phys.36-14A. 2313-2318 (1997)

    • Related Report
      1998 Annual Research Report
  • [Publications] 神崎昌郎: "イオンビーム支援蒸着法による窒化炭素膜形成におけるArイオン添加の効果" 精密工学会誌. 64-1. 152-156 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] 松室昭二: "ヂナミックイオンミキシング法によるTi-N系薄膜の形成とその機械的性質" 日本機械学会論文集. A64-618. 402-408 (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] A.Matsumuro: "Formation of TiN films with the preferred orientation by ion-beam-assisted deposition and their mechanical properties by nano-indentation method" Proc.CIMTEC '98. in print. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] T.Hayashi: "Tribological properties of carbon nitride thin films prepared on titanium-nitride substrates by ion-beam-assisted deposition" Proc.CIMTEC '98. in print. (1998)

    • Related Report
      1998 Annual Research Report
  • [Publications] M.Kohzaki: "Preparation of carbon nitride thin films by ion beam assisted deposition and their mechanical properties" Thin Solid Films. 308-309. 239-244 (1997)

    • Related Report
      1997 Annual Research Report
  • [Publications] 松室昭仁: "ダイナミックイオンミキシング法によるTi-N系薄膜の形成とその機械的性質" 日本機械学会論文集. 64-618(印刷中). (1998)

    • Related Report
      1997 Annual Research Report

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Published: 1997-04-01   Modified: 2016-04-21  

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