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Real time analysis on the growing crystal surface by X-ray scattering at small glancing angle incidence

Research Project

Project/Area Number 11650016
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKobe University

Principal Investigator

FUJII Yoshikazu  Kobe University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (80238534)

Project Period (FY) 1999 – 2000
Project Status Completed (Fiscal Year 2000)
Budget Amount *help
¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2000: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 1999: ¥3,200,000 (Direct Cost: ¥3,200,000)
KeywordsX-ray scattering at small glancing angle / crystal growth / X-ray CCD camera / surface step / in-situ observation / ultrahigh vacuum / X-ray energy two-dimensional detection system / PbSe (111) crystal surface / 微小角入射X線散乱
Research Abstract

We have performed in situ observation of the epitaxial growth of PbSe (111) surfaces, and the oscillation of the specularly reflected X-ray intensity showing the layer-by-layer growth of the surface was successfully observed even using a rotating-anode source. But the amplitudes of the oscillation were very small to utilize the monitor of crystal growth. Then we constructed a new measurement system of two-dimensional angular distribution of scattered x-ray energy. We also estimated the intensity ratios between the specularly reflected X-rays and the scattered X-rays at another angle.
About various incident angles and various scattered angels, the amplitudes of the intensity oscillations were calculated with simulation models based on dynamical scattering theory. The most suitable condition that the amplitude of the oscillation of the scattered X-ray intensity grew big was looked for. The amplitude grew the biggest at the incident angle as same as the critical angle of the total reflection as that result.
"An x-ray energy two-dimensional detection system" was designed and started. The X-ray distribution that it was scattered from the surface of the iron was measured with three kinds of detection vessels of SC, SSD and the X-ray energy two-dimensional detection system, which used a CCD element, and a comparative experiment was done. To make the amount of light of 1 photon of the X-ray shine in 1 element cell of CCD, it was found out that energy of the detected X-ray could be measured. And, the idea for the most suitable measurement condition of CCD for the energy measurement of photon, dark electric current noise to be reduced was asked. Moreover, some experiments by CCD of the X-ray were done, and the possibility of the new X-ray microscope, which can be observed the surface of the material, was found.

Report

(3 results)
  • 2000 Annual Research Report   Final Research Report Summary
  • 1999 Annual Research Report
  • Research Products

    (8 results)

All Other

All Publications (8 results)

  • [Publications] Y.Fujii: "Small Angel Glancing X-ray Scattering for Surface Characterization of Ion-Implanted Industrial Materials"Ion Implantation Technology-98. 1. 1121-1124 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] 藤居義和: "超高真空表面X線回折装置による結晶成長表面のその場観察"神戸ベンチャー・ビジネス・ラボラトリー年表. 4. 75-80 (1999)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Fujii, T.Kashihara, K.Yokoyama, S.Nakagawa, J.Nagaya, T.Nakayama and K.Yoshida: "Small Angle Glancing X-ray Scattering for Surface Characterization of Ion-Implanted Industrial Materials"Ion Implantation Technology-98 (Proc. of 12th Int'l. Conf. on Ion Implantation Technology, kyoto). 1121-1124 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Fujii and Kentaroh Yoshida: "In situ observation of growing crystal surfaces by a compact UHV x-ray diffractometer for surface glancing scttering"Annual Report of Venture Business Laboratory, Kobe University. Vol.4. 75-80 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2000 Final Research Report Summary
  • [Publications] Y.Fujii: "Small Angel Glancing X-ray Scattering for Surface Characterization of Ion-Implanted Industrial Materials"Ion Implantation Technology-98. 1. 1121-1124 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] 藤居義和: "超高真空表面X線回折装置による結晶成長表面のその場観察"神戸ベンチャー・ビジネス・ラボラトリー年表. 4. 75-80 (1999)

    • Related Report
      2000 Annual Research Report
  • [Publications] Y.Fujii: "Small Angle Glancing X-ray Scattering for Surface Characterization of Ion-Implanted Industrial Materials"Ion Implantation Technology-98. 1. 1121-1124 (1999)

    • Related Report
      1999 Annual Research Report
  • [Publications] 藤居義和: "超高真空表面X線回折装置による結晶成長表面のその場観察"神戸大学ベンチャー・ビジネス・ラボラトリー年報. 4. 75-80 (1999)

    • Related Report
      1999 Annual Research Report

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Published: 1999-04-01   Modified: 2016-04-21  

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