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In-situ analysis of the growing surface by two dimensional detection of x-ray scattering at small glancing angle incidence

Research Project

Project/Area Number 13650012
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKobe University

Principal Investigator

FUJII Yoshikazu  Kobe University, Faculty of Engineering, Associate Professor, 工学部, 助教授 (80238534)

Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥3,300,000 (Direct Cost: ¥3,300,000)
Fiscal Year 2002: ¥500,000 (Direct Cost: ¥500,000)
Fiscal Year 2001: ¥2,800,000 (Direct Cost: ¥2,800,000)
KeywordsX-ray scattering at small glancing angle / crystal growth / in-situ observation / surface roughness / ultrahigh vacuum / X-ray CCD camera / photon count / 表面元素マッピング
Research Abstract

When x-rays are applied to the material surface at a grazing angle of incidence, the scattered x-rays including many information of structure on the surface layer are detectable. We estimated the structural change of the depth direction of a material surface layer by analyzing incidence angle dependence of the information that the scattered x-rays have, using that the penetration depth of x-rays changes by changing an incidence angle.
For analyzing the intensity oscillation of the specularly reflected x-ray with the layer-by-layer growth of the surface the simulation about some surface layer models was performed based on both of kinematical theory and dynamical theory of scattering. Then we constructed new measurement system of two dimensional distribution of scattered x-ray intensity. By this system we observed the two dimensional angular distribution of scattered x-ray intensity from the surfaces during crystal growth, and we estimated the intensity distribution of the specularly reflected x-rays and the scattered x-rays at another angle.
An x-ray energy and intensity two-dimensional detection system used a CCD element was designed, and using this system we detected distribution of scattered x-ray from several kind of specimen surfaces. It was found out that high space resolution of the detected X-ray could be derived by differential operation of the detected x-ray distribution. The suitable measurement condition of CCD to make the amount of light of 1 photon of the X-ray shine in 1 element cell of CCD for the energy measurement of photon was derived, and one photon count of scattered x-ray could be detected.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] Y.Fujii: "Characterization of the iron surface by analyzing differential intensities of scattered X-rays at small glancing angle incidence"Proc. 3rd Intern. Sympo. on Atomic Level Characterizations for New Materials and Devices '01. 3. 267-270 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 藤居義和: "結晶成長表面の微小角入射X線散乱による解析法の研究"神戸大学ベンチャービジネスラボラトリー年報. 6. 19-24 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Fujii: "Characterization of polycrystalline iron surface under high temperature by small glancing angle X-rays scattering"Prog. and Abst. of AsCA01. 4. A5-A42 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 藤居義和: "微小角入射X線散乱による表面近傍結晶構造解析の研究"神戸大学ベンチャービジネスラボラトリー年報. 7. 15-20 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Fujii, A. Tao, K. Ikeda, Y. Kusumi, E. Yanase, K. Nishio: "Characterization of the iron surface by analyzing differential intensities of scattered X-rays at small glancing angle incidence"ALC'01, Proc. of 3rd International Symposium on Atomic Level Characterizations for New Materials and Devices '01. 267-270 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Fujii: "Study of analysis method of growing surface by x-ray scattering at small glancing angle incidence"Annual Report of Venture Business Laboratory, Kobe University. Vol. 6. 19-24 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Fujii, K. Koike, T. Nakayama, K. Yoshida: "Characterization of polycrystalline iron surface under high temperature by small glancing angle X-rays scattering"AsCA01, Prog&Abs. of IVth meeting of asian crystallographic association at Indian Institute of Science Bangalore, India. A5-42. (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Fujii, H. Yasuda: "Study on structural analysis of crystals under surface by small glancing angle X-rays scattering"Annual Report of Venture Business Laboratory, Kobe University. Vol. 7. 15-20 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Fujii: "Characterization of polycrystalline iron surface under high temperature by small glancing angle X-rays scattering"Abs. of AsCA IVth. 4. 1 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] 藤居 義和: "微小角入射X線散乱による表面近傍結晶構造解析の研究"神戸大学ベンチャー・ビジネス・ラボラトリー年報. 7. 15-20 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Fujii: "Characterization of the Iron Surface by Analyzing Differential Intensities of Scattered X-rays at Small Glancing Angle Incidence"Proc. 3rd Intern. Sympo. on Atomic Level Characterizations for New Materials and Devices 01. 3. 1-4 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 藤居義和: "結晶成長表面の微小角入射X線散乱による解析法の研究"神戸ベンチャー・ビジネス・ラボラトリー年表. 6. 19-24 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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