| Project/Area Number |
15H03593
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Quantum beam science
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| Research Institution | Japan Atomic Energy Agency |
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Principal Investigator |
Soyama Kazuhiko 国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門 J－PARCセンター, 研究職 (90343912)
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| Co-Investigator(Kenkyū-buntansha) |
林田 洋寿 一般財団法人総合科学研究機構(総合科学研究センター(総合科学研究室)及び中性子科学センター(研究開発, 中性子科学センター, 副主任研究員 (50444477)
山村 和也 大阪大学, 工学研究科, 教授 (60240074)
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| Project Period (FY) |
2015-04-01 – 2018-03-31
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| Project Status |
Completed (Fiscal Year 2017)
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| Budget Amount *help |
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2017: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2016: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2015: ¥11,960,000 (Direct Cost: ¥9,200,000、Indirect Cost: ¥2,760,000)
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| Keywords | 中性子顕微鏡 / 大気圧マイクロ波プラズマジェット / ウォルターミラー / スーパーミラー / イオンビームスパッタ法 / レプリカ法 / 磁気イメージング / Neutron / Microscope / supermirror / Wolter mirror / レプリカミラー / マンドレル / 中性子検出器 / 量子ビーム / 磁性 / 計測工学 / 超精密金型転写 |
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| Outline of Final Research Achievements |
In order to realize a neuron microscope, we are developing Wolter type I supermirror as a magnetic imaging device that is a rotationally symmetric mirror consisting of an elliptical mirror followed by a hyperbolic mirror. In this study, NiC/Ti supermirror device is fabricated by demolding of the multilayer deposited on the surface of the high-precision mandrel. Figure error of the mandrel is corrected by numerically controlled plasma chemical vaporization machining (NC-PCVM) which can correct the figure error deterministically without forming subsurface damage.NC-PCVM had been used to correct the flatness and/or thickness distribution of the plane substrate with nanometer order accuracy. We achieved submicrometer order figure accuracy (230 nm) by applying NC-PCVM figure correction with compensation of surface temperature change caused by plasma irradiation. We found the parameters of the coating, electroforming and demolding processes on the self stand supermirror.
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