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Study on the High-Detectivity THz Antenna-Coupled Bolometer with Meander Structures

Research Project

Project/Area Number 15H03990
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionShizuoka University

Principal Investigator

HIROMOTO NORIHISA  静岡大学, 創造科学技術大学院, 教授 (60359073)

Co-Investigator(Kenkyū-buntansha) 佐藤 弘明  静岡大学, 電子工学研究所, 助教 (00380113)
青木 誠  国立研究開発法人情報通信研究機構, 電磁波研究所リモートセンシング研究室, 研究員 (40744652)
猪川 洋  静岡大学, 電子工学研究所, 教授 (50393757)
Research Collaborator BRUENDERMANN Erik  カールスルーエ工科大学, シンクロトロン放射光研究所, 研究科長
BANERJEE Amit  静岡大学, 電子工学研究所, 非常勤研究員
SAROJ RAMAN Tripathi  静岡大学, 工学部, 准教授
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥16,250,000 (Direct Cost: ¥12,500,000、Indirect Cost: ¥3,750,000)
Fiscal Year 2017: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2016: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Fiscal Year 2015: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Keywordsテラヘルツ/赤外材料・素子 / 電子デバイス・素子 / 電子・電気材料 / マイクロ・ナノデバイス / マイクロ波・ミリ波・テラヘルツ波 / アンテナ結合常温検出器 / 計測工学
Outline of Final Research Achievements

Development of room-temperature terahertz (THz) detectors with high detectivity is especially important in wide fields of applications to industry, medicine, security and so on. We have studied antenna-coupled THz microbolometers with meander metal-lines of thermistors for this purpose. The noise-equivalent power (NEP) of the antenna-coupled microbolometer with a meander thermistor of titanium (Ti) is measured by using a 1 THz radiation source, which is much improved to the performance of the world class. The THz responsivity is consistent with the result of electric measurement and also electromagnetic simulation, showing the effectiveness of the receiving antenna.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (27 results)

All 2018 2017 2016 2015 Other

All Int'l Joint Research (4 results) Journal Article (3 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 3 results,  Open Access: 2 results,  Acknowledgement Compliant: 1 results) Presentation (20 results) (of which Int'l Joint Research: 10 results,  Invited: 1 results)

  • [Int'l Joint Research] Karlsruhe Institute of Technology(ドイツ)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Universitas Indonesia(インドネシア)

    • Related Report
      2017 Annual Research Report
  • [Int'l Joint Research] Karlsruhe Institute of Technology(Germany)

    • Related Report
      2016 Annual Research Report
  • [Int'l Joint Research] Universitas Indonesia(Indonesia)

    • Related Report
      2016 Annual Research Report
  • [Journal Article] Characterization of Platinum and Titanium Thermistors for Terahertz Antenna-Coupled Bolometer Applications2018

    • Author(s)
      A. Banerjee, H. Satoh, Y. Sharma, N. Hiromoto, H. Inokawa
    • Journal Title

      Sensors and Actuators A: Physical

      Volume: 273 Pages: 49-57

    • DOI

      10.1016/j.sna.2018.02.014

    • NAID

      120006635857

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Optimization of narrow width effect on titanium thermistor in uncooled antenna-coupled terahertz microbolometer2018

    • Author(s)
      A. Banerjee, H. Satoh, D. Elamaran, Y. Sharma, N. Hiromoto, H. Inokawa
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 57 Issue: 4S Pages: 04FC09-04FC09

    • DOI

      10.7567/jjap.57.04fc09

    • NAID

      210000148874

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Width dependence of platinum and titanium thermistor characteristics for application in room-temperature antenna-coupled terahertz microbolometer2017

    • Author(s)
      [J1]Amit Banerjee, Hiroaki Satoh, Ajay Tiwari, Catur Apriono, Eko Tjipto Rahardjo, Norihisa Hiromoto, and Hiroshi Inokawa
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 4S Pages: 04CC07-04CC07

    • DOI

      10.7567/jjap.56.04cc07

    • NAID

      210000147559

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] Antenna-Coupled Titanium Microbolometers with Straight and Meander-Shape Thermistors for Terahertz Wave Detection2018

    • Author(s)
      D. Elamaran, A. Banerjee, H. Satoh, N. Hiromoto, H. Inokawa
    • Organizer
      The 4th International Symposium toward the Future of Advanced Researches in Shizuoka University 2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] Optimization of Narrow Width Effect on Titanium Thermistor for Room-Temperature Antenna-Coupled Terahertz Microbolometer Fabrication2017

    • Author(s)
      [D1]Amit Banerjee, Hiroaki Satoh, Tiwari Ajay, Norihisa Hiromoto and Hiroshi Inokawa
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Optimization of Narrow Width Effect on Titanium Thermistor in Uncooled Antenna-Coupled Terahertz Microbolometer2017

    • Author(s)
      A. Banerjee, H. Satoh, Y. Sharma, A. Tiwari, N. Hiromoto, H. Inokawa
    • Organizer
      International Conference on Solid-State Devices and Materials (SSDM 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optimization of Platinum and Titanium Thermistor in Uncooled Antenna-Coupled Terahertz Microbolometer Fabrication2017

    • Author(s)
      A. Banerjee, H. Satoh, Y. Sharma, A. Tiwari, N. Hiromoto, H. Inokawa
    • Organizer
      International Conference organized by Department of Physics and Nanotechnology (ICONN 2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on NEP for optimization of THz Antenna-Coupled Ti Microbolometers with Straight and Meander Shaped Thermistors2017

    • Author(s)
      D. Elamaran, A. Banerjee, H. Satoh, N. Hiromoto, H. Inokawa
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 微細メアンダ線サーミスタを用いるテラヘルツアンテナ結合マイクロボロメータの研究開発2017

    • Author(s)
      廣本 宣久,A. Banerjee,佐藤 弘明,猪川 洋,青木 誠,E. Bruendermann
    • Organizer
      日本赤外線学会第27回研究発表会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 微細メアンダ構造テラヘルツアンテナ結合マイクロボロメータの研究2017

    • Author(s)
      廣本 宣久,A. Banerjee,青木 誠,佐藤 弘明,猪川 洋
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Fabrication of Room-Temperature Terahertz Microbolometer Arrays for Biomedical Imaging Applications2017

    • Author(s)
      A. Banerjee, H. Satoh, Y. Sharma, N. Hiromoto, H. Inokawa
    • Organizer
      70th Annual Session of Chemical Engineering Congress (CHEMCON 2017)
    • Related Report
      2017 Annual Research Report
  • [Presentation] Characterization of Room-Temperature Terahertz Antenna-Coupled Bolometers with Different Sensors: MOSFET, PN Junction Diode and Resistor of Silicon2017

    • Author(s)
      D. Elamaran, Y. Suzuki, H. Satoh, A. Banerjee, N. Hiromoto, H. Inokawa
    • Organizer
      19th Takayanagi Kenjiro Memorial Symposium
    • Related Report
      2017 Annual Research Report
  • [Presentation] Fabrication of Uncooled Antenna-Coupled Terahertz Microbolometer Arrays2017

    • Author(s)
      A. Banerjee, H. Satoh, Y. Sharma, N. Hiromoto, H. Inokawa
    • Organizer
      19th Takayanagi Kenjiro Memorial Symposium
    • Related Report
      2017 Annual Research Report
  • [Presentation] Investigation of Narrow Width Effect on Platinum and Titanium Thermistors for Room-Temperature Antenna-Coupled Terahertz Microbolometer Fabrication2017

    • Author(s)
      [C1]Amit Banerjee, Hiroaki Satoh, Ajay Tiwari, Norihisa Hiromoto and Hiroshi Inokawa
    • Organizer
      2017 International Symposium toward the Future of Advanced Researches in Shizuoka University
    • Place of Presentation
      Shizuoka University, Hamamatsu, Japan
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Investigation of Narrow Width Effect on Titanium Thermistor for Room-Temperature Antenna-Coupled Terahertz Microbolometer Application2016

    • Author(s)
      [C2]Amit Banerjee, Hiroaki Satoh, Tiwari Ajay, Norihisa Hiromoto and Hiroshi Inokawa
    • Organizer
      6th Shizuoka University International Symposium 2016
    • Place of Presentation
      Shizuoka University, Hamamatsu, Japan
    • Year and Date
      2016-12-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Comparative Investigation on Platinum and Titanium Thermistors for Room-Temperature Antenna-Coupled Terahertz Microbolometer Application2016

    • Author(s)
      [C3]Amit Banerjee, Hiroaki Satoh, Tiwari Ajay, Norihisa Hiromoto and Hiroshi Inokawa
    • Organizer
      29th International Microprocesses and Nanotechnology Conference (MNC 2016)
    • Place of Presentation
      ANA Crowne Plaza Kyoto, Kyoto, Japan
    • Year and Date
      2016-11-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Comparative Study on Metal Resistor and MOSFET-Based THz Bolometers2016

    • Author(s)
      [C4]Hiroshi Inokawa, Ajay Tiwari, Takeo Ueta and Hiroaki Satoh, Catur Apriono, Eko Tjipto Rahardjo, Norihisa Hiromoto
    • Organizer
      The 3rd Int. Conf. Nano Electronics Research and Education (ICNERE)
    • Place of Presentation
      Royal Orchids Garden, Malang, Indonesia
    • Year and Date
      2016-10-31
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Width Dependence of Platinum and Titanium Thermistor Characteristics for Application in Room-Temperature Antenna-Coupled Terahertz Microbolometer2016

    • Author(s)
      [C5]Amit Banerjee, Hiroaki Satoh, Ajay Tiwari, Catur Apriono, Eko Tjipto Rahardjo, Norihisa Hiromoto and Hiroshi Inokawa
    • Organizer
      2016 Int. Conf. Solid State Devices and Materials (SSDM)
    • Place of Presentation
      Tsukuba International Congress Center, Tsukuba, Japan
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Terahertz diagnostics of ultra-short pulses at high repetition rates from relativistic electron sources2015

    • Author(s)
      E. Bruendermann, A. S. Mueller, H. Inokawa and N. Hiromoto
    • Organizer
      The Second International Symposium on Frontiers in THz Technology(FTT2015)
    • Place of Presentation
      浜松アクトシティコングレスセンター(静岡県浜松市)
    • Year and Date
      2015-08-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Study on THz Antenna-Coupled Bolometer utilizing SOI MOSFET2015

    • Author(s)
      T. Ueta, Y. Suzuki, H. Satoh, A. Tiwari, E. Bruendermann, H. Inokawa and N. Hiromoto
    • Organizer
      The Second International Symposium on Frontiers in THz Technology(FTT2015)
    • Place of Presentation
      浜松アクトシティコングレスセンター(静岡県浜松市)
    • Year and Date
      2015-08-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ray tracing method with Fresnel's transmission for a Silicon lens antenna irradiated with linearly polarized THz wav2015

    • Author(s)
      Catur A. S., Eko T. R., and N. Hiromoto
    • Organizer
      The Second International Symposium on Frontiers in THz Technology(FTT2015)
    • Place of Presentation
      浜松アクトシティコングレスセンター(静岡県浜松市)
    • Year and Date
      2015-08-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] SOI MOSFETを用いたTHz帯アンテナ結合ボロメータの検討2015

    • Author(s)
      猪川 洋、植田 剛央、鈴木 佑弥、廣本 宣久、佐藤 弘明
    • Organizer
      平成27年電気学会電子・情報・システム部門大会
    • Place of Presentation
      長崎大学 文教キャンパス(長崎市)
    • Year and Date
      2015-08-26
    • Related Report
      2015 Annual Research Report
  • [Presentation] テラヘルツ用アンテナ結合ボロメータの検討2015

    • Author(s)
      猪川 洋、ティワリ アジェイ、佐藤 弘明、青木 誠、武田 正典、廣本 宣久
    • Organizer
      信学技報 (IEICE Technical Report) Vol. 115, No. 170, ED2015-49 (2015-08) p. 15
    • Place of Presentation
      機械振興会館(東京都港区)
    • Year and Date
      2015-08-03
    • Related Report
      2015 Annual Research Report
    • Invited

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Published: 2015-04-16   Modified: 2019-03-29  

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