Study on the High-Detectivity THz Antenna-Coupled Bolometer with Meander Structures

• Project/Area Number: 15H03990
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Shizuoka University
• Principal Investigator: HIROMOTO NORIHISA 静岡大学, 創造科学技術大学院, 教授 (60359073)
• Co-Investigator(Kenkyū-buntansha): 佐藤 弘明 静岡大学, 電子工学研究所, 助教 (00380113) ; 青木 誠 国立研究開発法人情報通信研究機構, 電磁波研究所リモートセンシング研究室, 研究員 (40744652) ; 猪川 洋 静岡大学, 電子工学研究所, 教授 (50393757)
• Research Collaborator: BRUENDERMANN Erik カールスルーエ工科大学, シンクロトロン放射光研究所, 研究科長 ; BANERJEE Amit 静岡大学, 電子工学研究所, 非常勤研究員 ; SAROJ RAMAN Tripathi 静岡大学, 工学部, 准教授
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥16,250,000 (Direct Cost: ¥12,500,000、Indirect Cost: ¥3,750,000); Fiscal Year 2017: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000); Fiscal Year 2016: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000); Fiscal Year 2015: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
• Keywords: テラヘルツ/赤外材料・素子 / 電子デバイス・素子 / 電子・電気材料 / マイクロ・ナノデバイス / マイクロ波・ミリ波・テラヘルツ波 / アンテナ結合常温検出器 / 計測工学

Outline of Final Research Achievements

Development of room-temperature terahertz (THz) detectors with high detectivity is especially important in wide fields of applications to industry, medicine, security and so on. We have studied antenna-coupled THz microbolometers with meander metal-lines of thermistors for this purpose. The noise-equivalent power (NEP) of the antenna-coupled microbolometer with a meander thermistor of titanium (Ti) is measured by using a 1 THz radiation source, which is much improved to the performance of the world class. The THz responsivity is consistent with the result of electric measurement and also electromagnetic simulation, showing the effectiveness of the receiving antenna.

Research Products

• [Int'l Joint Research] Karlsruhe Institute of Technology(ドイツ)
• [Int'l Joint Research] Universitas Indonesia(インドネシア)
• [Int'l Joint Research] Karlsruhe Institute of Technology(Germany)
• [Int'l Joint Research] Universitas Indonesia(Indonesia)
• [Journal Article] Characterization of Platinum and Titanium Thermistors for Terahertz Antenna-Coupled Bolometer Applications (2018)
  • Author(s): A. Banerjee, H. Satoh, Y. Sharma, N. Hiromoto, H. Inokawa
  • Journal Title: Sensors and Actuators A: Physical Volume: 273 Pages: 49-57
  • DOI: 10.1016/j.sna.2018.02.014
  • NAID: 120006635857
  • Peer Reviewed / Open Access
• [Journal Article] Optimization of narrow width effect on titanium thermistor in uncooled antenna-coupled terahertz microbolometer (2018)
  • Author(s): A. Banerjee, H. Satoh, D. Elamaran, Y. Sharma, N. Hiromoto, H. Inokawa
  • Journal Title: Jpn. J. Appl. Phys. Volume: 57 Issue: 4S Pages: 04FC09-04FC09
  • DOI: 10.7567/jjap.57.04fc09
  • NAID: 210000148874
  • Peer Reviewed / Open Access
• [Journal Article] Width dependence of platinum and titanium thermistor characteristics for application in room-temperature antenna-coupled terahertz microbolometer (2017)
  • Author(s): [J1]Amit Banerjee, Hiroaki Satoh, Ajay Tiwari, Catur Apriono, Eko Tjipto Rahardjo, Norihisa Hiromoto, and Hiroshi Inokawa
  • Journal Title: Jpn. J. Appl. Phys. Volume: 56 Issue: 4S Pages: 04CC07-04CC07
  • DOI: 10.7567/jjap.56.04cc07
  • NAID: 210000147559
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Presentation] Antenna-Coupled Titanium Microbolometers with Straight and Meander-Shape Thermistors for Terahertz Wave Detection (2018)
  • Author(s): D. Elamaran, A. Banerjee, H. Satoh, N. Hiromoto, H. Inokawa
  • Organizer: The 4th International Symposium toward the Future of Advanced Researches in Shizuoka University 2018
• [Presentation] Optimization of Narrow Width Effect on Titanium Thermistor for Room-Temperature Antenna-Coupled Terahertz Microbolometer Fabrication (2017)
  • Author(s): [D1]Amit Banerjee, Hiroaki Satoh, Tiwari Ajay, Norihisa Hiromoto and Hiroshi Inokawa
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜（神奈川県横浜市）
  • Year and Date: 2017-03-14
• [Presentation] Optimization of Narrow Width Effect on Titanium Thermistor in Uncooled Antenna-Coupled Terahertz Microbolometer (2017)
  • Author(s): A. Banerjee, H. Satoh, Y. Sharma, A. Tiwari, N. Hiromoto, H. Inokawa
  • Organizer: International Conference on Solid-State Devices and Materials (SSDM 2017)
  • Int'l Joint Research
• [Presentation] Optimization of Platinum and Titanium Thermistor in Uncooled Antenna-Coupled Terahertz Microbolometer Fabrication (2017)
  • Author(s): A. Banerjee, H. Satoh, Y. Sharma, A. Tiwari, N. Hiromoto, H. Inokawa
  • Organizer: International Conference organized by Department of Physics and Nanotechnology (ICONN 2017)
  • Int'l Joint Research
• [Presentation] Study on NEP for optimization of THz Antenna-Coupled Ti Microbolometers with Straight and Meander Shaped Thermistors (2017)
  • Author(s): D. Elamaran, A. Banerjee, H. Satoh, N. Hiromoto, H. Inokawa
  • Organizer: 第65回応用物理学会春季学術講演会
• [Presentation] 微細メアンダ線サーミスタを用いるテラヘルツアンテナ結合マイクロボロメータの研究開発 (2017)
  • Author(s): 廣本 宣久，A. Banerjee，佐藤 弘明，猪川 洋，青木 誠，E. Bruendermann
  • Organizer: 日本赤外線学会第27回研究発表会
• [Presentation] 微細メアンダ構造テラヘルツアンテナ結合マイクロボロメータの研究 (2017)
  • Author(s): 廣本 宣久，A. Banerjee，青木 誠，佐藤 弘明，猪川 洋
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] Fabrication of Room-Temperature Terahertz Microbolometer Arrays for Biomedical Imaging Applications (2017)
  • Author(s): A. Banerjee, H. Satoh, Y. Sharma, N. Hiromoto, H. Inokawa
  • Organizer: 70th Annual Session of Chemical Engineering Congress (CHEMCON 2017)
• [Presentation] Characterization of Room-Temperature Terahertz Antenna-Coupled Bolometers with Different Sensors: MOSFET, PN Junction Diode and Resistor of Silicon (2017)
  • Author(s): D. Elamaran, Y. Suzuki, H. Satoh, A. Banerjee, N. Hiromoto, H. Inokawa
  • Organizer: 19th Takayanagi Kenjiro Memorial Symposium
• [Presentation] Fabrication of Uncooled Antenna-Coupled Terahertz Microbolometer Arrays (2017)
  • Author(s): A. Banerjee, H. Satoh, Y. Sharma, N. Hiromoto, H. Inokawa
  • Organizer: 19th Takayanagi Kenjiro Memorial Symposium
• [Presentation] Investigation of Narrow Width Effect on Platinum and Titanium Thermistors for Room-Temperature Antenna-Coupled Terahertz Microbolometer Fabrication (2017)
  • Author(s): [C1]Amit Banerjee, Hiroaki Satoh, Ajay Tiwari, Norihisa Hiromoto and Hiroshi Inokawa
  • Organizer: 2017 International Symposium toward the Future of Advanced Researches in Shizuoka University
  • Place of Presentation: Shizuoka University, Hamamatsu, Japan
  • Int'l Joint Research
• [Presentation] Investigation of Narrow Width Effect on Titanium Thermistor for Room-Temperature Antenna-Coupled Terahertz Microbolometer Application (2016)
  • Author(s): [C2]Amit Banerjee, Hiroaki Satoh, Tiwari Ajay, Norihisa Hiromoto and Hiroshi Inokawa
  • Organizer: 6th Shizuoka University International Symposium 2016
  • Place of Presentation: Shizuoka University, Hamamatsu, Japan
  • Year and Date: 2016-12-08
  • Int'l Joint Research
• [Presentation] Comparative Investigation on Platinum and Titanium Thermistors for Room-Temperature Antenna-Coupled Terahertz Microbolometer Application (2016)
  • Author(s): [C3]Amit Banerjee, Hiroaki Satoh, Tiwari Ajay, Norihisa Hiromoto and Hiroshi Inokawa
  • Organizer: 29th International Microprocesses and Nanotechnology Conference (MNC 2016)
  • Place of Presentation: ANA Crowne Plaza Kyoto, Kyoto, Japan
  • Year and Date: 2016-11-08
  • Int'l Joint Research
• [Presentation] Comparative Study on Metal Resistor and MOSFET-Based THz Bolometers (2016)
  • Author(s): [C4]Hiroshi Inokawa, Ajay Tiwari, Takeo Ueta and Hiroaki Satoh, Catur Apriono, Eko Tjipto Rahardjo, Norihisa Hiromoto
  • Organizer: The 3rd Int. Conf. Nano Electronics Research and Education (ICNERE)
  • Place of Presentation: Royal Orchids Garden, Malang, Indonesia
  • Year and Date: 2016-10-31
  • Int'l Joint Research
• [Presentation] Width Dependence of Platinum and Titanium Thermistor Characteristics for Application in Room-Temperature Antenna-Coupled Terahertz Microbolometer (2016)
  • Author(s): [C5]Amit Banerjee, Hiroaki Satoh, Ajay Tiwari, Catur Apriono, Eko Tjipto Rahardjo, Norihisa Hiromoto and Hiroshi Inokawa
  • Organizer: 2016 Int. Conf. Solid State Devices and Materials (SSDM)
  • Place of Presentation: Tsukuba International Congress Center, Tsukuba, Japan
  • Year and Date: 2016-09-26
  • Int'l Joint Research
• [Presentation] Terahertz diagnostics of ultra-short pulses at high repetition rates from relativistic electron sources (2015)
  • Author(s): E. Bruendermann, A. S. Mueller, H. Inokawa and N. Hiromoto
  • Organizer: The Second International Symposium on Frontiers in THz Technology（FTT2015)
  • Place of Presentation: 浜松アクトシティコングレスセンター（静岡県浜松市）
  • Year and Date: 2015-08-31
  • Int'l Joint Research
• [Presentation] Study on THz Antenna-Coupled Bolometer utilizing SOI MOSFET (2015)
  • Author(s): T. Ueta, Y. Suzuki, H. Satoh, A. Tiwari, E. Bruendermann, H. Inokawa and N. Hiromoto
  • Organizer: The Second International Symposium on Frontiers in THz Technology（FTT2015)
  • Place of Presentation: 浜松アクトシティコングレスセンター（静岡県浜松市）
  • Year and Date: 2015-08-31
  • Int'l Joint Research
• [Presentation] Ray tracing method with Fresnel's transmission for a Silicon lens antenna irradiated with linearly polarized THz wav (2015)
  • Author(s): Catur A. S., Eko T. R., and N. Hiromoto
  • Organizer: The Second International Symposium on Frontiers in THz Technology（FTT2015)
  • Place of Presentation: 浜松アクトシティコングレスセンター（静岡県浜松市）
  • Year and Date: 2015-08-31
  • Int'l Joint Research
• [Presentation] SOI MOSFETを用いたTHz帯アンテナ結合ボロメータの検討 (2015)
  • Author(s): 猪川 洋、植田 剛央、鈴木 佑弥、廣本 宣久、佐藤 弘明
  • Organizer: 平成27年電気学会電子・情報・システム部門大会
  • Place of Presentation: 長崎大学 文教キャンパス（長崎市）
  • Year and Date: 2015-08-26
• [Presentation] テラヘルツ用アンテナ結合ボロメータの検討 (2015)
  • Author(s): 猪川 洋、ティワリ アジェイ、佐藤 弘明、青木 誠、武田 正典、廣本 宣久
  • Organizer: 信学技報 (IEICE Technical Report) Vol. 115, No. 170, ED2015-49 (2015-08) p. 15
  • Place of Presentation: 機械振興会館（東京都港区）
  • Year and Date: 2015-08-03
  • Invited