Budget Amount *help |
¥21,190,000 (Direct Cost: ¥16,300,000、Indirect Cost: ¥4,890,000)
Fiscal Year 2017: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2016: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
Fiscal Year 2015: ¥14,820,000 (Direct Cost: ¥11,400,000、Indirect Cost: ¥3,420,000)
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Outline of Final Research Achievements |
I have developed mist CVD, which is a thin film fabrication method using liquid droplets similar to spray pyrolysis and aerosol assisted CVD. In this budget, mist CVD had demonstrated its capability of accurately controlling thin film characteristics by the precise control of flow, which was made possible by focusing on the fact that the mist droplets were in the gas-liquid multiphase. Also, we succeeded in cathode-luminescence of Ga2O3 based materials fabricated by mist CVD, and it was a world first result.
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