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Direct synthesis of graphene on an insulator substrate by chemical vapor deposition using metal vapor catalysts and development of high efficiency MOS type electron emission devices

Research Project

Project/Area Number 15H05522
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionNational Institute of Advanced Industrial Science and Technology (2016-2017)
University of Tsukuba (2015)

Principal Investigator

Murakami Katsuhisa  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (20403123)

Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥21,580,000 (Direct Cost: ¥16,600,000、Indirect Cost: ¥4,980,000)
Fiscal Year 2017: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2016: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
Fiscal Year 2015: ¥9,100,000 (Direct Cost: ¥7,000,000、Indirect Cost: ¥2,100,000)
Keywordsグラフェン / 化学気相成長 / 電子放出デバイス / 真空ナノエレクトロニクス / 平面型電子放出デバイス
Outline of Final Research Achievements

Direct synthesis of graphene on an insulating substrate by gallium vapor as a catalyst was developed. From the observation of the initial growth process of graphene, the crystal nuclei were generated at the initial stage of graphene growth, and then, crystal nuclei grew, and the nuclei were connected to each other. In addition, the atomic level structure analysis by the high-resolution transmission electron microscope showed that the crystal domain size of graphene was in the range from 50 to 200 nm, and the inside of the domain was perfect crystal structure without any defects.
Planar type electron emission devices based on a graphene-oxide-semiconductor structure were fabricated by using the developed direct synthesis method of graphene. Their electron emission properties were further evaluated. It is found that the electron emission efficiency improves by 100 times or more compared with the conventional device.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • Research Products

    (44 results)

All 2018 2017 2016 2015

All Journal Article (9 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results,  Acknowledgement Compliant: 2 results) Presentation (32 results) (of which Int'l Joint Research: 7 results,  Invited: 5 results) Patent(Industrial Property Rights) (3 results)

  • [Journal Article] Electron emission properties of graphene-oxide-semiconductor planar-type electron emission devices2018

    • Author(s)
      Murakami Katsuhisa、Tanaka Shunsuke、Iijima Takuya、Nagao Masayoshi、Nemoto Yoshihiro、Takeguchi Masaki、Yamada Yoichi、Sasaki Masahiro
    • Journal Title

      Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

      Volume: 36 Issue: 2

    • DOI

      10.1116/1.5006866

    • NAID

      120007133905

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Annealing effect on electron emission properties of graphene-oxide-semiconductor planar-type electron emission devices2017

    • Author(s)
      Murakami Katsuhisa、Nagao Masayoshi、Iijima Takuya、Yamada Yoichi、Sasaki Masahiro、Nemoto Yoshihiro、Takeguchi Masaki
    • Journal Title

      Technical digest 30th International Vacuum Nanoelectronics Conference

      Volume: - Pages: 114-115

    • DOI

      10.1109/ivnc.2017.8051568

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Process technology for volcano-structured double-gate Spindt-type field emitter arrays2017

    • Author(s)
      Nagao Masayoshi、Murakami Katsuhisa、Gotoh Yasuhito、Neo Yoichiro、Mimura Hidenori
    • Journal Title

      Technical digest 30th International Vacuum Nanoelectronics Conference

      Volume: - Pages: 122-123

    • DOI

      10.1109/ivnc.2017.8051572

    • Related Report
      2017 Annual Research Report
  • [Journal Article] グラフェンを用いた低真空・低電圧で動作可能な高効率平面型電子放出デバイス2017

    • Author(s)
      村上勝久、古家遼、飯島拓也、長尾 昌善、根本 善弘、竹口 雅樹、鷹尾祥典、山田洋一、佐々木正洋
    • Journal Title

      信学技報

      Volume: 117 Pages: 1-4

    • Related Report
      2017 Annual Research Report
  • [Journal Article] 微小電子源の作製技術を利用した超小型エレクトロスプレースラスタの試作2017

    • Author(s)
      村上勝久、長尾昌善、井上直樹、鷹尾祥典、Khumpuang Sommawan, 原史朗
    • Journal Title

      信学技報

      Volume: 117 Pages: 47-50

    • Related Report
      2017 Annual Research Report
  • [Journal Article] マルチエミッタ評価装置によるボルケーノ構造スピント型エミッタの動作チップの放出電流測定2017

    • Author(s)
      田口広大、村田英一、六田英治、下山宏、長尾昌善、村上勝久
    • Journal Title

      信学技報

      Volume: 117 Pages: 39-42

    • Related Report
      2017 Annual Research Report
  • [Journal Article] グラフェンをゲート電極に用いた平面型電子放出素子2016

    • Author(s)
      村上 勝久、田中 駿丞、長尾 昌善、根本 善弘 、竹口 雅樹、藤田 淳一
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: 166 Pages: 37-40

    • Related Report
      2016 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Electron emission properties of graphene-oxide-semiconductor planar-type electron emission devices2016

    • Author(s)
      Katsuhisa Murakami, Shunsuke Tanaka, Takuya Iijima, Masayoshi Nagao, Yoshihiro Nemoto, Masaki Takeguchi, Jun-ichi Fujita
    • Journal Title

      Technical digest 29th International Vacuum Nanoelectronics Conference

      Volume: - Pages: 61-62

    • DOI

      10.1109/ivnc.2016.7551466

    • NAID

      120007133905

    • Related Report
      2016 Annual Research Report
  • [Journal Article] Direct synthesis of large area graphene on insulating substrate by gallium vaporassisted chemical vapor deposition2015

    • Author(s)
      K. Murakami, S. Tanaka, A. Hirukawa, T. Hiyama, T. Kuwajima, E. Kano, M. Takeguchi, and J. Fujita
    • Journal Title

      Appl. Phys. Lett.

      Volume: 106 Issue: 8 Pages: 093112-093112

    • DOI

      10.1063/1.4942885

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] 高放出効率を目指した平面型グラフェン電子源の試作2018

    • Author(s)
      古家遼、村上勝久、長尾昌善、鷹尾祥典
    • Organizer
      平成29年度宇宙輸送シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] マトリクス駆動とビーム集束を実現するボルケーノ構造ダブルゲートスピント型電子源2018

    • Author(s)
      長尾昌善、村上勝久、後藤康仁、根尾陽一郎、三村秀典
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 放電ガスにKrを用いたHPPMSによるSpindt型エミッタ作製の試み2018

    • Author(s)
      谷口日向, 中野武雄, 大家渓, 長尾昌善、大崎壽, 村上勝久
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 超小型イオンエンジン用高効率平面型グラフェン電子源の開発2018

    • Author(s)
      古家遼、村上勝久、長尾昌善、鷹尾祥典
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] SEM搭載電子源としてのGOS型電界電子放出陰極2018

    • Author(s)
      宮路丈司、村上勝久、長尾昌善、根尾陽一郎、三村秀典
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 絶縁基板上へのグラフェン直接合成とグラフェン/酸化膜/Si積層構造からの高効率電子放出2018

    • Author(s)
      村上勝久、宮路丈司、古家遼、飯島拓也、長尾昌善、根本善弘、竹口正樹、鷹尾祥典、山田洋一、佐々木正洋、根尾陽一郎、三村秀典
    • Organizer
      第15回真空ナノエレクトロニクスシンポジウム
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 低真空・低電圧で動作するグラフェンを用いた高効率平面型電子源2018

    • Author(s)
      村上勝久、宮路丈司、古家遼、安達学、飯島拓也、長尾昌善、根本善弘、竹口正樹、鷹尾祥典、山田洋一、佐々木正洋、根尾陽一郎、三村秀典
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] GOS(Graphene-Oxide-Semiconductor)型電子源の電子放出特性2017

    • Author(s)
      飯島拓也、田中駿丞、長尾昌善、根本善弘、竹口雅樹、山田洋一、佐々木正洋、藤田淳一、村上勝久
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Annealing effect on electron emission properties of graphene-oxide-semiconductor planar-type electron emission devices2017

    • Author(s)
      K. Murakami, T. Iijima, M. Nagao, Y. Nemoto, M. Takeguchi, Y. Yamada, M. Sasaki
    • Organizer
      30th International Vacuum Nanoelectronics Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Process technology for volcano-structured double-gate Spindt-type field emitter arrays2017

    • Author(s)
      M. Nagao K. Murakami, Y. Goto, Y. Neo, H. Mimura
    • Organizer
      30th International Vacuum Nanoelectronics Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] プラズマ電位を制御した HPPMS による Spindt 型エミッタの作製(3)2017

    • Author(s)
      .谷口日向, 中野武雄, 大家渓, 長尾昌善、大崎壽, 村上勝久
    • Organizer
      2017年真空・表面科学合同講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ミニマルファブを用いたエレクトロスプレースラスタの試作2017

    • Author(s)
      長尾昌善、井上直樹、鷹尾祥典、辰巳憲之、村上勝久、Khumpuang Sommawan, 原史朗
    • Organizer
      第78回応用物理学会秋期学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] マルチエミッタ評価装置によるボルケーノ構造スピント型エミッタの個々の動作チップの放出電流測定2017

    • Author(s)
      田口広大、村田英一、六田英治、下山宏、長尾昌善、村上勝久
    • Organizer
      第78回応用物理学会秋期学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 微小電子源の作製技術を利用した超小型エレクトロスプレースラスタの試作2017

    • Author(s)
      村上勝久、長尾昌善、井上直樹、鷹尾祥典、Khumpuang Sommawan, 原史朗
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] グラフェンを用いた低真空・低電圧で動作可能な高効率平面型電子放出デバイス2017

    • Author(s)
      村上勝久、古家遼、飯島拓也、長尾 昌善、根本 善弘、竹口 雅樹、鷹尾祥典、山田洋一、佐々木正洋
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] High-density electrospray thruster using FEA fabrication technique2017

    • Author(s)
      M. Nagao, N. Inoue, Y. Takao, K. Murakami
    • Organizer
      Korea-Japan Vacuum Nanoelectronics Symposium
    • Related Report
      2017 Annual Research Report
  • [Presentation] Graphene-oxide-semiconductor planar type electron emission device2017

    • Author(s)
      K. Murakami, M. Nagao
    • Organizer
      Korea-Japan Vacuum Nanoelectronics Symposium
    • Related Report
      2017 Annual Research Report
  • [Presentation] HPPMSを用いたSpindt型エミッタの作製におけるキャビティの穴径依存性2017

    • Author(s)
      谷口日向, 中野武雄, 大家渓, 長尾昌善、大崎壽, 村上勝久
    • Organizer
      スパッタリングおよびプラズマプロセス技術部会第14回技術交流会・第156回定例研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 金属蒸気触媒CVDによるグラフェンの絶縁基板上直接合成とデバイス応用2017

    • Author(s)
      村上 勝久、田中 駿丞、飯島 拓也、長尾 昌善、根本 善弘、竹口 雅樹、山田 洋 一、佐々木 正洋、藤田 淳一
    • Organizer
      共用・計測合同シンポジウム201
    • Place of Presentation
      NIMS千現地区(茨城県つくば市)
    • Related Report
      2016 Annual Research Report
  • [Presentation] グラフェンを用いた低真空・低電圧で動作可能な高効率平面型電子放出素子2017

    • Author(s)
      村上 勝久、田中 駿丞、 飯島 拓也、長尾 昌善、根本 善弘、竹口 雅樹、山田 洋一、佐々木 正洋、藤田 淳一
    • Organizer
      第14回真空ナノエレクトロニクスシンポジウム
    • Place of Presentation
      アクトシティ浜松(静岡県浜松市)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] グラフェンを利用した電子源の最近の動向2016

    • Author(s)
      村上 勝久
    • Organizer
      第13回真空ナノエレクトロニクスシンポジウム
    • Place of Presentation
      機械振興会館(東京都港区)
    • Year and Date
      2016-03-04
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Electron emission properties of graphene-oxide-semiconductor planar-type electron emission device2016

    • Author(s)
      村上 勝久、田中 駿丞、飯島 拓也、長尾 昌善、根本 善弘, 竹口 雅樹、藤田 淳一
    • Organizer
      29th International Vacuum Nanoelectronics Conference
    • Place of Presentation
      The University of British Columbia (Vancouver, Canada)
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Planar type electron emission devices using graphene gate electrode2016

    • Author(s)
      村上 勝久
    • Organizer
      The 8th Japan-Korea Vacuum Nanoelectronics Symposium
    • Place of Presentation
      Sizuoka University (Hamamatsu, Shizuoka)
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication and characterization of planar-type electron emission devices based on graphene-oxide-semic onductor structure2016

    • Author(s)
      村上 勝久、田中 駿丞、長尾 昌善、根本 善弘、竹口 雅樹、藤田 淳一
    • Organizer
      11th International Vacuum Electron Sources Conference
    • Place of Presentation
      Koreana Hotel (Seoul, Korea)
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GOS(Graphene-Oxide-Semiconductor)型電子放出素子の電子放出特性2016

    • Author(s)
      村上 勝久、田中 駿丞、長尾 昌善、根本 善弘、竹口 雅樹、藤田 淳一
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ (新潟県新潟市)
    • Related Report
      2016 Annual Research Report
  • [Presentation] グラフェンをゲート電極に用いた平面型電子放出素子2016

    • Author(s)
      村上 勝久、田中 駿丞、長尾 昌善、根本 善弘 、竹口 雅樹、藤田 淳一
    • Organizer
      電子デバイス研究会「電子管と真空ナノエレクトロニクス及びその評価技術」
    • Place of Presentation
      三重大学(三重県津市)
    • Related Report
      2016 Annual Research Report
  • [Presentation] 大面積グラフェン合成手法の確立とグラフェンナノエレクトロニクスへの展開2016

    • Author(s)
      村上勝久
    • Organizer
      第1回NRP育成対象者成果発表会
    • Place of Presentation
      日経ビル6階大手町セミナールーム2 (東京都千代田区)
    • Related Report
      2016 Annual Research Report
  • [Presentation] GOS(Graphene-Oxide-Semiconductor)型電子放出素子の電子放出特性2016

    • Author(s)
      村上勝久
    • Organizer
      電子線応用技術研究会
    • Place of Presentation
      日立ハイテクノロジーズ本社(東京都千代田区)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Fabrication of GOS(Graphene/Oxide/Semiconductor) Type Electron Emission Devices2015

    • Author(s)
      Shunsuke Tanaka, Katsuhisa Murakami, Masayoshi Nagao, Jun-ichi Fujita
    • Organizer
      International Display Workshop
    • Place of Presentation
      大津プリンスホテル(滋賀県大津市)
    • Year and Date
      2015-12-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ga蒸気触媒CVD法におけるグラフェン初期成長過程の観察2015

    • Author(s)
      顧 西子、田中 駿丞、飯島 拓也、村上 勝久、藤田 淳一
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] GOS(Graphene/Oxide/Semiconductor)型電子放出素子の作製2015

    • Author(s)
      村上 勝久、宮下 晃、田中 駿丞、顧 西子、飯島 拓也、長尾 昌善、藤田 淳一
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Direct growth of large area graphene on insulator substrate by chemical vapor deposition using gallium vapor catalysts2015

    • Author(s)
      Katsuhisa Murakami, Shunsuke Tanaka, Ayaka Hirukawa, Tomoya kuwajima, Emi Kano, Masaki Takeguchi, Jun-ichi Fujita
    • Organizer
      The Sixteenth International Conference on the Science and Application of Nanotubes
    • Place of Presentation
      名古屋大学(愛知県名古屋市)
    • Year and Date
      2015-06-29
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Patent(Industrial Property Rights)] 電子源及び電子線照射装置並びに電子源2017

    • Inventor(s)
      村上勝久、長尾昌善
    • Industrial Property Rights Holder
      村上勝久、長尾昌善
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-197923
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] グラフェンの成膜方法及びその装置2017

    • Inventor(s)
      村上勝久、長尾昌善
    • Industrial Property Rights Holder
      村上勝久、長尾昌善
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-249655
    • Filing Date
      2017
    • Related Report
      2017 Annual Research Report
  • [Patent(Industrial Property Rights)] グラフェン膜、電子透過電極及び電子放出素子2015

    • Inventor(s)
      村上 勝久、藤田 淳一
    • Industrial Property Rights Holder
      国立大学法人筑波大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-167777
    • Filing Date
      2015-08-17
    • Related Report
      2015 Annual Research Report

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Published: 2015-04-16   Modified: 2019-03-29  

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