Study on strain fields and surface reconstructions of GaN crystals which have microstructure in mesoscopic scale.

• Project/Area Number: 15K04667
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Crystal engineering
• Research Institution: Japan Women's University
• Principal Investigator: Akimoto Koichi 日本女子大学, 理学部, 教授 (40262852)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000); Fiscal Year 2017: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
• Keywords: Ｘ線回折 / 窒化ガリウム / メゾスコピック / Ｘ線トポグラフィー / 結晶欠陥 / 電子回折 / Ｘ線ＣＴＲ散乱 / 表面構造 / 化合物半導体 / 結晶工学 / シンクロトロン放射光 / CTR散乱 / 格子ひずみ

Outline of Final Research Achievements

Gallium nitride (GaN) has attracted much attention as the materials for the power devices instead of Silicon. We have been studied the cross section of GaN epitaxial layers on GaN substrates by X-ray topography using CCD camera. At the growth interface, we found large and sudden variation of a lattice spacing. We have been studied GaN surface structures normal to the surface by X-ray crystal truncation rod (CTR) scattering. We found CTR scattering intensity of c-plane GaN depends on the crystallinity of GaN films.

Research Products

• [Journal Article] Polarity Determination of GaN Thin Films by Anomalous X-Ray Diffraction (2015)
  • Author(s): 秋本晃一
  • Journal Title: Nihon Kessho Gakkaishi Volume: 57 Issue: 5 Pages: 263-268
  • DOI: 10.5940/jcrsj.57.263
  • NAID: 130005105680
  • ISSN: 0369-4585, 1884-5576
  • Peer Reviewed / Open Access
• [Presentation] X線CTR散乱法によるGaN結晶表面の測定 (2018)
  • Author(s): 海野由佳、北島由梨、秋本晃一
  • Organizer: 日本物理学会第73回年次大会
• [Presentation] X線CTR散乱法によるGaN結晶表面の測定 (2017)
  • Author(s): 海野由佳、安藤香代子、野口彩純、北島由梨、天貝早希、宮下遥香、秋本晃一
  • Organizer: 第64回応用物理学会春季学術講演会
  • Place of Presentation: パシフィコ横浜、神奈川県横浜市
  • Year and Date: 2017-03-14
• [Presentation] Characterization of GaN Crystals with X-ray topography (2017)
  • Author(s): Yuko Kitano, Satoko Miyakawa, Mizuki Shoro, Koichi Akimoto
  • Organizer: International Symposium on Novel Energy Nanomaterials, Catalysts and Surfaces for Future
  • Int'l Joint Research
• [Presentation] Lattice strain evaluation by using indirect X-ray reflection (2017)
  • Author(s): Haruka Miyashita, Saki Amagai, Koichi Akimoto
  • Organizer: Joint Symposium 2017, Ewha Womans University, Japan Women’s University and Ochanomizu University for the promotion and research for women in science
  • Int'l Joint Research
• [Presentation] Characterization of GaN crystals with the X-ray topography (2017)
  • Author(s): Yuko Kitano, Mizuki Shoro, Satoko Miyakawa, Koichi Akimoto
  • Organizer: Joint Symposium 2017, Ewha Womans University, Japan Women’s University and Ochanomizu University for the promotion and research for women in science
  • Int'l Joint Research
• [Presentation] FWHM Images of the Rocking Curves by X-Ray Topography (2017)
  • Author(s): Mizuki Shoro, Yuko Kitano, Satoko Miyakawa, Koichi Akimoto
  • Organizer: Joint Symposium 2017, Ewha Womans University, Japan Women’s University and Ochanomizu University for the promotion and research for women in science
  • Int'l Joint Research
• [Presentation] Analysis of the desorbed species from HVPE GaN samples (2017)
  • Author(s): Yuri Kitajima, Yuka Umino, Koichi Akimoto
  • Organizer: Joint Symposium 2017, Ewha Womans University, Japan Women’s University and Ochanomizu University for the promotion and research for women in science
  • Int'l Joint Research
• [Presentation] Structure and Strain of Hafnium Oxide Thin Films Studied by X-Ray Diffraction (2017)
  • Author(s): Koichi Akimoto and Fumie Nishikawa
  • Organizer: Joint Symposium 2017, Ewha Womans University, Japan Women’s University and Ochanomizu University for the promotion and research for women in science
  • Int'l Joint Research
• [Presentation] X線トポグラフ法によるGaN結晶の評価 (2017)
  • Author(s): 北野祐子、宮川理子、正露瑞季、秋本晃一
  • Organizer: 第78回応用物理学会秋季学術講演会
• [Presentation] X線の遠まわり反射によるひずみ半導体の格子ひずみ評価 (2017)
  • Author(s): 宮下遥香、天貝早希、秋本晃一、村上達海、小椋厚志
  • Organizer: 日本物理学会 2017年秋季大会
• [Presentation] X線トポグラフ法における半値幅画像の作成 (2017)
  • Author(s): 正露瑞季、北野祐子、宮川理子、秋本晃一
  • Organizer: 日本物理学会 2017年秋季大会
• [Presentation] Characterization of GaN Crystals with X-ray topography (2016)
  • Author(s): Yuko Kitano, Satoko Miyakawa, Emiko Inoue, Koichi Akimoto
  • Organizer: Joint Symposium 2016, Ewha Womans University, Japan Women’s University and Ochanomizu University for the promotion and research for women in science
  • Place of Presentation: Ewha Womans University, Seoul, Korea
  • Year and Date: 2016-12-06
  • Int'l Joint Research
• [Presentation] Simulation of reflection high-energy electron diffraction patterns for Gallium Nitride crystal surfaces (2016)
  • Author(s): Yuka Umino, Kayoko Ando, Azumi Noguchi, Koichi Akimoto
  • Organizer: Joint Symposium 2016, Ewha Womans University, Japan Women’s Univerity and Ochanomizu University for the promotion and research for women in science University
  • Place of Presentation: Ewha Womans University, Seoul, Korea
  • Year and Date: 2016-12-06
  • Int'l Joint Research
• [Presentation] X線トポグラフ法によるGaN結晶の断面試料の評価(1) (2016)
  • Author(s): 宮川理子、北野祐子、井上絵美子、秋本晃一
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ、新潟県新潟市
  • Year and Date: 2016-09-13
• [Presentation] X線トポグラフ法によるGaN結晶の断面試料の評価(2) (2016)
  • Author(s): 北野祐子、宮川理子、井上絵美子、秋本晃一
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ、新潟県新潟市
  • Year and Date: 2016-09-13
• [Presentation] Polarity Determination of GaN Thin Films by Anomalous X-Ray Diffraction (2015)
  • Author(s): K. Akimoto
  • Organizer: Joint Symposium 2015, Ewha Womans University, Japan Women’s University and Ochanomizu University for the promotion and research for women in science
  • Place of Presentation: Ewha Womans University (Seoul, Korea)
  • Year and Date: 2015-12-08
  • Int'l Joint Research
• [Presentation] Characterization of GaN Crystals with X-ray topography (2015)
  • Author(s): Satoko Miyakawa, Emiko Inoue, Yuko Kitano, Koichi Akimoto
  • Organizer: Joint Symposium 2015, Ewha Womans University, Japan Women’s University and Ochanomizu University for the promotion and research for women in science
  • Place of Presentation: Ewha Womans University (Seoul, Korea)
  • Year and Date: 2015-12-08
  • Int'l Joint Research
• [Presentation] X線の遠まわり反射による格子ひずみ評価 (2015)
  • Author(s): 西川史恵，平井知子，秋本晃一
  • Organizer: 日本物理学会2015年秋季大会
  • Place of Presentation: 関西大学吹田キャンパス（大阪府吹田市）
  • Year and Date: 2015-09-16