• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Realization of flexible Integrated optical device by proton beam writing

Research Project

Project/Area Number 15K04731
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Quantum beam science
Research InstitutionGunma University

Principal Investigator

Hanaizumi Osamu  群馬大学, 大学院理工学府, 教授 (80183911)

Co-Investigator(Kenkyū-buntansha) 三浦 健太  群馬大学, 大学院理工学府, 准教授 (40396651)
加田 渉  群馬大学, 大学院理工学府, 助教 (60589117)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2017: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2015: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywords光導波路 / 集束イオンビーム / PBW / フレキシブル光回路 / PDMS / PMMA / ポリイミド / MED-610 / 量子ビーム / イオンマイクロビーム / フレキシブル / polyimide
Outline of Final Research Achievements

We have developed a flexible optical wave guide that enables close proximity to various peripheral environments by incorporating an optical integrated device in a polymer thin film. A Mach-Zehnder (MZ) optical wave guide was embedded by focused proton beam (Proton Beam Writing; PBW) in a freestanding polymer thin film with a thickness of about several tens of micrometers. A local refractive index change was induced in the deep part of the thin film by utilizing high density energy around the Bragg peak of focused proton with energy from 0.5-3 MeV. An optical wave guide was mounted on a seamless thin film by setting the micro fabricated part as the core and cladding part of surrounding parts. Electrodes were applied to a part of the MZ wave guide, and the optical switching function by thermo-optic effect was also confirmed. According to the present technology development, it is possible to realize optical wave guide mounting inside arbitrary functional polymers.

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (14 results)

All 2017 2016 2015 Other

All Int'l Joint Research (2 results) Journal Article (1 results) (of which Peer Reviewed: 1 results,  Acknowledgement Compliant: 1 results) Presentation (9 results) (of which Int'l Joint Research: 3 results,  Invited: 2 results) Remarks (2 results)

  • [Int'l Joint Research] University of Jyvaskyla/University of Helsinki/Tezted Oy(Finland)

    • Related Report
      2016 Research-status Report
  • [Int'l Joint Research] ArminLabs Gmb(Germany)

    • Related Report
      2016 Research-status Report
  • [Journal Article] Fabrication and evaluation of flexible Mach-Zehnder waveguide structure embedded in a polydimethylsiloxane thin film using a proton microbeam2016

    • Author(s)
      Raj Kumar Parajuli, Ryota Saruya, Naoki Akutzu, Satoshi Miura, Wataru Kada, Shunsuke Kawabata, Yoshinori Matsubara, Takahiro Satoh, Masashi Koka, Naoto Yamada, Tomihiro Kamiya, Kenta Miura, and Osamu Hanaizumi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 6S1

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Focused microbeam irradiation technique for the fabrication of micro-meter scale optical structures2017

    • Author(s)
      W. Kada, T. Satoh, S. Kawabata, M. Haruyama, Y. Suda, S. Miura, K. Kasuya, R. Saruya, M. Koka, N. Yamada, K. Miura, S. Onoda, H. Kraus, G. Astakhov, T. Kurobori, T. Ohshima, T. Kamiya, and O. Hanaizumi
    • Organizer
      24th International Scientific Meeting on Vacuum Science and Technique
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ポリマー材料を用いたマッハツェンダー型 光スイッチの作製に関する研究2017

    • Author(s)
      粕谷 建太,三浦 聡,王 酉申,海野 陽平,鈴木 孝明,加田 渉, 三浦 健太,花泉 修, 佐藤 隆博,江夏 昌志,山田 尚人
    • Organizer
      電気学会バイオ・マイクロシステム研究会「バイオ・マイクロシステムとそのプロセス技術および一般
    • Related Report
      2017 Annual Research Report
  • [Presentation] 集束陽子線微細加工技術による高分子薄膜内包型Mach‐Zehnder光導波路・光スイッチの開発2016

    • Author(s)
      加田渉, 三浦聡, 猿谷良太, 佐藤隆博, KUMAR Parajuli Raj, 川端駿介, 三浦健太, 江夏昌志, 神谷富裕, 花泉修
    • Organizer
      第59回放射線化学討論会
    • Place of Presentation
      国立研究開発法人 量子科学技術研究開発機構 高崎量子応用研究所
    • Year and Date
      2016-09-20
    • Related Report
      2016 Research-status Report
  • [Presentation] 集束陽子マイクロビームによりPDMS薄膜内部に埋め込み加工されたMach-Zehnder導波路型光スイッチング素子の開発2016

    • Author(s)
      三浦 聡, 猿谷 良太, 川端 駿介, 三浦 健太, 加田 渉, 江夏 昌志, 佐藤 隆博, 神谷 富裕, Parajuli Raj Kumar, 花泉 修
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 集束陽子線微細加工技術によるフレキシブル電子回路基板内部への光導波路構造の埋込形成2016

    • Author(s)
      高橋龍平, 三浦聡, 猿谷良太, 川端駿介, 三浦健太, 加田渉, 江夏昌志, 佐藤隆博, 神谷富裕, 花泉修
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Research-status Report
  • [Presentation] 集束イオンビームを利用した光材料開発と その場分析技術の開発2016

    • Author(s)
      加田渉
    • Organizer
      荷電粒子ビームの工業への応用第132委員会 第223回研究会
    • Place of Presentation
      東京理科大学 森戸記念館
    • Related Report
      2016 Research-status Report
  • [Presentation] Fabrication and in situ evaluation of integrated micro-optical devices by a focused proton microbeam technique2015

    • Author(s)
      Wataru Kada
    • Organizer
      第25回日本MRS年次大会 International Symposium E-1 (Innovative Material Technologies Utilizing Ion Beams)
    • Place of Presentation
      横浜産業貿易センタービル
    • Year and Date
      2015-12-08
    • Related Report
      2015 Research-status Report
    • Invited
  • [Presentation] Fabrication of Flexible Mach-Zehnder Waveguide in PDMS Film using Focused Proton Microbeam2015

    • Author(s)
      Ryota Saruya, Hijiri Kato, Shunsuke Kawabata, Kenta Miura, Wataru Kada, Yoshinori Matsubara, Akihito Yokoyama, Masashi Koka , Takahiro Satoh, Parajuli Raj Kumar, Yasuyuki Ishii, Tomihiro Kamiya, Hiroyuki Nishikawa , and Osamu Hanaizumi
    • Organizer
      The 11th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications (11th RASEDA) The 7th International Conference on Advanced Micro-Device Engineering (7th AMDE)
    • Place of Presentation
      City Performing Arts Center, Kiryu, Gunma, Japan
    • Year and Date
      2015-11-11
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] Fabrication and in-Situ Evaluation of Completely-Flexible MZ Waveguide Structure Embedded in PDMS Thin Film Using Focused Proton Microbeam2015

    • Author(s)
      Raj Kumar Parajuli, Ryota Saruya, Kenta Miura, Wataru Kada, Shunsuke Kawabata, Yoshinori Matsubara, Hijiri Kato, Akihito Yokoyama, Masashi Koka, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Hiroyuki Nishikawa, and Osamu Hanaizumi
    • Organizer
      28th International Microprocesses and Nanotechnology Conference (MNC2015)
    • Place of Presentation
      Toyama International Conference Center, Toyama, Japan
    • Year and Date
      2015-11-10
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Remarks] 群馬大学花泉研究室ホームページ

    • URL

      http://www.el.gunma-u.ac.jp/~hana/

    • Related Report
      2017 Annual Research Report
  • [Remarks] 群馬大学花泉研究室 ホームページ

    • URL

      http://www.el.gunma-u.ac.jp/~hana/

    • Related Report
      2016 Research-status Report

URL: 

Published: 2015-04-16   Modified: 2019-03-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi