Realization of flexible Integrated optical device by proton beam writing

• Project/Area Number: 15K04731
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Quantum beam science
• Research Institution: Gunma University
• Principal Investigator: Hanaizumi Osamu 群馬大学, 大学院理工学府, 教授 (80183911)
• Co-Investigator(Kenkyū-buntansha): 三浦 健太 群馬大学, 大学院理工学府, 准教授 (40396651) ; 加田 渉 群馬大学, 大学院理工学府, 助教 (60589117)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000); Fiscal Year 2017: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000); Fiscal Year 2016: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2015: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
• Keywords: 光導波路 / 集束イオンビーム / PBW / フレキシブル光回路 / PDMS / PMMA / ポリイミド / MED-610 / 量子ビーム / イオンマイクロビーム / フレキシブル / polyimide

Outline of Final Research Achievements

We have developed a flexible optical wave guide that enables close proximity to various peripheral environments by incorporating an optical integrated device in a polymer thin film. A Mach-Zehnder (MZ) optical wave guide was embedded by focused proton beam (Proton Beam Writing; PBW) in a freestanding polymer thin film with a thickness of about several tens of micrometers. A local refractive index change was induced in the deep part of the thin film by utilizing high density energy around the Bragg peak of focused proton with energy from 0.5-3 MeV. An optical wave guide was mounted on a seamless thin film by setting the micro fabricated part as the core and cladding part of surrounding parts. Electrodes were applied to a part of the MZ wave guide, and the optical switching function by thermo-optic effect was also confirmed. According to the present technology development, it is possible to realize optical wave guide mounting inside arbitrary functional polymers.

Research Products

• [Int'l Joint Research] University of Jyvaskyla/University of Helsinki/Tezted Oy(Finland)
• [Int'l Joint Research] ArminLabs Gmb(Germany)
• [Journal Article] Fabrication and evaluation of flexible Mach-Zehnder waveguide structure embedded in a polydimethylsiloxane thin film using a proton microbeam (2016)
  • Author(s): Raj Kumar Parajuli, Ryota Saruya, Naoki Akutzu, Satoshi Miura, Wataru Kada, Shunsuke Kawabata, Yoshinori Matsubara, Takahiro Satoh, Masashi Koka, Naoto Yamada, Tomihiro Kamiya, Kenta Miura, and Osamu Hanaizumi
  • Journal Title: Japanese Journal of Applied Physics Volume: 6S1
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] Focused microbeam irradiation technique for the fabrication of micro-meter scale optical structures (2017)
  • Author(s): W. Kada, T. Satoh, S. Kawabata, M. Haruyama, Y. Suda, S. Miura, K. Kasuya, R. Saruya, M. Koka, N. Yamada, K. Miura, S. Onoda, H. Kraus, G. Astakhov, T. Kurobori, T. Ohshima, T. Kamiya, and O. Hanaizumi
  • Organizer: 24th International Scientific Meeting on Vacuum Science and Technique
  • Int'l Joint Research / Invited
• [Presentation] ポリマー材料を用いたマッハツェンダー型 光スイッチの作製に関する研究 (2017)
  • Author(s): 粕谷 建太，三浦 聡，王 酉申，海野 陽平，鈴木 孝明，加田 渉， 三浦 健太，花泉 修， 佐藤 隆博，江夏 昌志，山田 尚人
  • Organizer: 電気学会バイオ・マイクロシステム研究会「バイオ・マイクロシステムとそのプロセス技術および一般
• [Presentation] 集束陽子線微細加工技術による高分子薄膜内包型Mach‐Zehnder光導波路・光スイッチの開発 (2016)
  • Author(s): 加田渉, 三浦聡, 猿谷良太, 佐藤隆博, KUMAR Parajuli Raj, 川端駿介, 三浦健太, 江夏昌志, 神谷富裕, 花泉修
  • Organizer: 第59回放射線化学討論会
  • Place of Presentation: 国立研究開発法人 量子科学技術研究開発機構 高崎量子応用研究所
  • Year and Date: 2016-09-20
• [Presentation] 集束陽子マイクロビームによりPDMS薄膜内部に埋め込み加工されたMach-Zehnder導波路型光スイッチング素子の開発 (2016)
  • Author(s): 三浦 聡, 猿谷 良太, 川端 駿介, 三浦 健太, 加田 渉, 江夏 昌志, 佐藤 隆博, 神谷 富裕, Parajuli Raj Kumar, 花泉 修
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ（新潟）
  • Year and Date: 2016-09-13
• [Presentation] 集束陽子線微細加工技術によるフレキシブル電子回路基板内部への光導波路構造の埋込形成 (2016)
  • Author(s): 高橋龍平, 三浦聡, 猿谷良太, 川端駿介, 三浦健太, 加田渉, 江夏昌志, 佐藤隆博, 神谷富裕, 花泉修
  • Organizer: 第77回応用物理学会秋季学術講演会
  • Place of Presentation: 朱鷺メッセ（新潟）
  • Year and Date: 2016-09-13
• [Presentation] 集束イオンビームを利用した光材料開発と その場分析技術の開発 (2016)
  • Author(s): 加田渉
  • Organizer: 荷電粒子ビームの工業への応用第１３２委員会 第２２３回研究会
  • Place of Presentation: 東京理科大学 森戸記念館
• [Presentation] Fabrication and in situ evaluation of integrated micro-optical devices by a focused proton microbeam technique (2015)
  • Author(s): Wataru Kada
  • Organizer: 第25回日本MRS年次大会 International Symposium E-1 (Innovative Material Technologies Utilizing Ion Beams)
  • Place of Presentation: 横浜産業貿易センタービル
  • Year and Date: 2015-12-08
  • Invited
• [Presentation] Fabrication of Flexible Mach-Zehnder Waveguide in PDMS Film using Focused Proton Microbeam (2015)
  • Author(s): Ryota Saruya, Hijiri Kato, Shunsuke Kawabata, Kenta Miura, Wataru Kada, Yoshinori Matsubara, Akihito Yokoyama, Masashi Koka , Takahiro Satoh, Parajuli Raj Kumar, Yasuyuki Ishii, Tomihiro Kamiya, Hiroyuki Nishikawa , and Osamu Hanaizumi
  • Organizer: The 11th International Workshop on Radiation Effects on Semiconductor Devices for Space Applications (11th RASEDA) The 7th International Conference on Advanced Micro-Device Engineering (7th AMDE)
  • Place of Presentation: City Performing Arts Center, Kiryu, Gunma, Japan
  • Year and Date: 2015-11-11
  • Int'l Joint Research
• [Presentation] Fabrication and in-Situ Evaluation of Completely-Flexible MZ Waveguide Structure Embedded in PDMS Thin Film Using Focused Proton Microbeam (2015)
  • Author(s): Raj Kumar Parajuli, Ryota Saruya, Kenta Miura, Wataru Kada, Shunsuke Kawabata, Yoshinori Matsubara, Hijiri Kato, Akihito Yokoyama, Masashi Koka, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Hiroyuki Nishikawa, and Osamu Hanaizumi
  • Organizer: 28th International Microprocesses and Nanotechnology Conference (MNC2015)
  • Place of Presentation: Toyama International Conference Center, Toyama, Japan
  • Year and Date: 2015-11-10
  • Int'l Joint Research
• [Remarks] 群馬大学花泉研究室ホームページ
  • URL: http://www.el.gunma-u.ac.jp/~hana/
• [Remarks] 群馬大学花泉研究室 ホームページ
  • URL: http://www.el.gunma-u.ac.jp/~hana/