| Project/Area Number |
15K05810
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Fluid engineering
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| Research Institution | Tokyo City University |
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Principal Investigator |
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| Research Collaborator |
Ohue Hiroshi
Fujii Teruo
Kinoshita Haruyuki
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| Project Period (FY) |
2015-04-01 – 2019-03-31
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| Project Status |
Completed (Fiscal Year 2018)
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| Budget Amount *help |
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2017: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
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| Keywords | microfluidics / photolithography / micro fabilcation / micro channel / マイクロ流体 / フォトリソグラフィ / マイクロ加工 / マイクロ流路 / マイクロチャネル / 厚膜 |
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| Outline of Final Research Achievements |
In order to adopt to alternate pumping microreactors for mass processing, a novel method to compose micro channels were developed. Enhancing the application of SU-8, which is used to form films with thickness less than 100 micrometers, the formed very thick film enables to make a channel having the depth equivalent to the film thickness with high precision and low restriction. If large amount of SU-8 is formed in a general process, the formed film thickness is not uniform, so a technique to remedy the film thickness was established. It succeeded that very thick SU-8 films with high precision were formed repeatedly.
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| Academic Significance and Societal Importance of the Research Achievements |
マイクロ流体技術には，深さが数100ミクロン程度の流路がしばしば用いられる．流路寸法がそれよりも小さい場合には，フォトリソグラフィとソフトリソグラフィを応用したマイクロ流路作製法が用いられることが多いが，流路深さが100ミクロンを超える場合，それらの手法はまだ実用的ではない．また，このような寸法は，一般的な機械加工でも，難しく，現在は最も作製が難しい領域の寸法と言える．
本研究で確立した手法は，これに対する十分な答えとなっており，今後様々な流路の作製が可能となり，マイクロ流体技術の発展に寄与する．
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