| Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Outline of Final Research Achievements |
As the features of repetitive low temperature plasma, the following three assumptions were made in this study; i) the length of pulse can change the supply energy, ii) the effect of radical can be controlled by pulse timing and interval, and iii) the effect of plasma formation is controlled by the gradient of voltage per pulse duration. The evaluation was carried out. As a result, i) and ii) were experimentally proved. Regarding iii), the increase of gradient of voltage per pulse duration does not necessarily improve the performance.
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