| Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2017: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2016: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
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| Outline of Final Research Achievements |
Previously we developed new type a pneumatic actuator which supports a piston by air bearing for non-contact drive, and the stage with one-degree of freedom driven by this actuator, the developed stage has mauch higher speed and much higher accuracy than pneumatic actuators. In this study, we have designed the X-Y stage using this actuator having pipe to supply other actuator built-in and realized the compact X-Y stage with high accuracy. Pipe length of the X-Y stage is longer than one of the stage with one-degree of freedom, which make degrade the performance of controllability. So we considered the control method for X-Y stage. As a results, the proposed control method is effective in the linear simulation of X-Y stage.
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