• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of high speed deposition method of DLC films by ICP / PSD plasma CVD hybrid system

Research Project

Project/Area Number 15K21580
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Power engineering/Power conversion/Electric machinery
Electronic materials/Electric materials
Research InstitutionHachinohe National College of Technology (2016-2017)
Ichinoseki National College of Technology (2015)

Principal Investigator

kamada takaharu  八戸工業高等専門学校, 産業システム工学科電気情報工学コース, 助教 (50435400)

Co-Investigator(Renkei-kenkyūsha) MUKAIGAWA Seiji  岩手大学, 理工学部, 教授 (60333754)
WATANABE Masayuki  日本大学, 理工学部, 教授 (30271844)
NAKAMURA Yoshitaka  八戸工業高等専門学校, 産業システム工学科, 准教授 (00290685)
Project Period (FY) 2015-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2017: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2016: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2015: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Keywords擬火花放電 / アモルファスカーボン膜 / ダイヤモンドライクカーボン膜 / ラマンスペクトル / XPS / プラズマ計測 / XPS
Outline of Final Research Achievements

It was developed a deposition system for DLC films by using a pseudo-spark discharge plasma CVD method. The XPS spectrum indicated C1s peak that are typical of amorphous carbon.
The abundance ratio of sp3 bonding in the film and film hardness increased with rising of the substrate voltage. The maximum hardness was calculated to be 5.8 GPa at the substrate voltage of -300 V. By inserting the floating electrode between the electrodes, the ion density slightly decreased, and the plasma wasn’t ejected continuously. Hydrogen ICP was added to the system and its characteristics were investigated. At RF power of 300 W, the ion density at 200 mm downstream from coil was of the order of 1012 cm-3. Furthermore, it was confirmed that the phase difference between current and voltage changes with respect to RF power (50~300 W).

Report

(4 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • Research Products

    (3 results)

All 2017 2016

All Presentation (3 results) (of which Int'l Joint Research: 1 results)

  • [Presentation] Influence of substrate bias voltage and properties of hydrogenated diamond-like corbon films deposited by Pseudo-spark discharge PECVD2017

    • Author(s)
      T. Kamada, M. Watanabe, Y. Nakamura, and S. Mukaigawa
    • Organizer
      10th Asia-Pacific International Symposium on the Basic and Applications of Plasma Technology
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 誘導結合プラズマにおけるプラズマインピーダンスの気圧依存性2017

    • Author(s)
      山田健太、向川政治、高木浩一、高橋克幸、鎌田貴晴
    • Organizer
      電気関係学会東北支部連合大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 擬火花放電プラズマCVD法によるDLC膜の特性評価2016

    • Author(s)
      鎌田貴晴、渡部政行、向川 政治
    • Organizer
      電気学会プラズマ・パルスパワー・放電合同研究会
    • Place of Presentation
      岩手大学理工学部復興祈念銀河ホール
    • Year and Date
      2016-05-27
    • Related Report
      2016 Research-status Report

URL: 

Published: 2015-04-16   Modified: 2019-03-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi