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Thermoelectric conversion device and Seebeck coefficient control by 3-dimensional quantum nanodisk array

Research Project

Project/Area Number 16H03898
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field General applied physics
Research InstitutionTohoku University

Principal Investigator

Samukawa Seiji  東北大学, 流体科学研究所, 教授 (30323108)

Co-Investigator(Kenkyū-buntansha) 中村 雅一  奈良先端科学技術大学院大学, 先端科学技術研究科, 教授 (80332568)
Research Collaborator Kikuchi Akioh  
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2018: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2017: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2016: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Keywords熱電素子 / 量子ドット / ナノ構造 / フォノンエンジニアリング / エネルギー変換 / フォノン・バンド独立制御
Outline of Final Research Achievements

The objective of this research was to understand the heat conduction inside the nanostructure by evaluating the thermal conductivity of M (M: Si, Ge, Si/SiGe0.3) NWs composites. Furthermore, the electrical characteristics (electrical conductivity and Seebeck coefficient) of the SiNWs-SiGe0.3 composite is also evaluated. As the result of these evaluation, we demonstrated that the thermal conductivity could be reduced without decreasing the electrical characteristics. Moreover, we also demonstrated that the SiNW-SiGe0.3 composite could be used for TE conversion element applications.

Academic Significance and Societal Importance of the Research Achievements

熱エネルギーを直接電気エネルギーに変換する熱電変換技術は、排熱エネルギーの再資源化という意味で極めて注目されている。しかし、現在使用されている熱電変換材料はBi、Sb、Te、Pb、Seなどが主成分で環境問題、資源問題の懸念があり、また室温近傍の材料は50年来開発が停滞しているといっても過言ではない。そこで、本研究では、安全で豊富な、また、半導体素子と集積化が可能な材料であるシリコンに独自技術を用いて無欠陥周期ナノ構造を作製し、その電気伝導率と熱伝導率の独立制御を実現することに成功した。その結果、半導体素子やセンサーと集積可能な微小電源としての可能性を実証できた。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (31 results)

All 2019 2018 2017 2016

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 2 results,  Acknowledgement Compliant: 1 results) Presentation (26 results) (of which Int'l Joint Research: 13 results,  Invited: 16 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results) Funded Workshop (1 results)

  • [Journal Article] Composite films of highly ordered Si nanowires embedded in SiGe0.3 for thermoelectric applications2017

    • Author(s)
      Kikuchi Akiou、Yao Akifumi、Mori Isamu、Ono Takahito、Samukawa Seiji
    • Journal Title

      Journal of Applied Physics

      Volume: 122 Issue: 16 Pages: 165302-165302

    • DOI

      10.1063/1.4986355

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon2017

    • Author(s)
      Akiou Kikuchi, Akifumi Yao, Isamu Mori, Takahito Ono, and Seiji Samukawa
    • Journal Title

      Appl. Phys. Lett.

      Volume: 110 Issue: 9 Pages: 091908-091908

    • DOI

      10.1063/1.4977778

    • Related Report
      2017 Annual Research Report 2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] Si ナノピラー構造の間隔制御することによる フォノン場制御とキャリア輸送特性性に与える影響2019

    • Author(s)
      大堀 大介、久保山 英哲、村田 正行、山本 淳、野村 政宏、遠藤 和彦、寒川 誠二
    • Organizer
      第66回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] EFFECTIVE THERMAL CONDUCTION TUNING IN Si THIN FILM BY NANOPILLARS2019

    • Author(s)
      X. Huang, R. Yanagisawa, D. Ohori, S. Samukawa, and Masahiro Nomura
    • Organizer
      The 2nd Pacific Rim Thermal Engineering Conference (PRTEC2019)
    • Related Report
      2018 Annual Research Report
  • [Presentation] 無欠陥Siナノピラー構造によるフォノン場制御と高移動度キャリア輸送2018

    • Author(s)
      大堀 大介、久保山 瑛哲、山本 淳、村田 正行、遠藤 和彦、寒川 誠二
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 無欠陥周期ナノ構造による半導体チャネルのフォノン場制御2018

    • Author(s)
      寒川誠二
    • Organizer
      応用物理学会 シリコンナノテクノロジー分科会 第212回研究集会「半導体素子におけるフォノンのダイナミクスとエンジニアリング」
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Neutral Beam Technology for Damage-free Etching Process,2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      Digest of 2018 International Conference on Compound Semiconductor Manufacturing Technology
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Low-Temperature atomic layer defect-free etching, modification and deposition process2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      Collaborative Conference on Materials Research (CCMR) 2018
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Atomic Layer Defect-free Top-down Processes for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      The 7th International Conference on Microelectronics and Plasma Technology(ICMAP)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      14th IEEE International Conference on Solid-State and Integrated Circuit Technology
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Atomic Layer Defect-free Etching and Deposition Processes for future sub-10-nm devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      71st Annual Gaseous Electronics Conference
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics, International Workshop on Plasma and Bio-nano Devices
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 3ω法によるナノスケール熱伝導率の測定とフォノン輸送の制御2018

    • Author(s)
      久保山瑛哲、山本淳、村田正行、遠藤和彦、大堀大介、寒川誠二
    • Organizer
      応用物理学会 シリコンナノテクノロジー分科会 第212回研究集会「半導体素子におけるフォノンのダイナミクスとエンジニアリング」
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] バイオテンプレート極限加工による量子ナノ構造の作製と高効率エネルギーデバイスへの展開2018

    • Author(s)
      寒川誠二
    • Organizer
      日本化学会 第7回E-colloid:先端エレクトロニクスのためのコロイド・界面化学・ナノ界面制御が担う次世代エレクトロニクス材料
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 中性粒子ビームによる原子層レベル超低損傷加工・表面改質=2次元材料グラフェンへの展開=2018

    • Author(s)
      寒川誠二
    • Organizer
      酸化グラフェン研究会 第11回酸化グラフェンシンポジウム
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] バイオテンプレート極限加工を用いたSiナノ構造熱電モジュールの作製と特性評価2017

    • Author(s)
      菊池 亜紀応、八尾 章史、毛利 勇、山本 淳、小野 崇人、寒川 誠二
    • Organizer
      第64回 応用物理学会春季学術大会
    • Place of Presentation
      東京工業大学(東京)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Neutral Beam Technology for Future Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      China Semiconductor Technology International Conference
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      Collaborative Conference on Materials Research (CCMR)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Neutral Beam Technology for Nano-Materials and Nano-Devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      21st International Symposium on Chemical-Mechanical Planarization
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      1st Asia-Pacific Conference on Plasma Physics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High Efficiency Nano Energy Devices Using Bio-template Ultimate Top-down Process2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      High Efficiency NaThe 3rd International Conference on Nanoenergy and Nanosystems.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Neutral Beam technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      Seiji Samukawa, Neutral Beam18th International Union of Materials Research Societies International Conference in Asia
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] パイオテンプレート極限加工を用いたSiナノ構造熱電モジュールの作製と評価2017

    • Author(s)
      菊池亜紀応、八尾章史、毛利勇、山本淳、小野崇人、寒川誠二,
    • Organizer
      第64回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 大堀大介、石塚ナノピラー中のナノディスク配列による発光再結合の直径依存性2017

    • Author(s)
      大堀大介、石塚史典、トーマスセドリック、寒川誠二、碇哲雄、福山敦彦
    • Organizer
      第78回応用物理学会 秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] パイオテンプレート極限加工技術を用いたSi/SIGeナノワイヤーの作製と熱伝導率の評価2017

    • Author(s)
      菊池亜紀応、八尾章史、山本淳、小野崇人、寒川誠二
    • Organizer
      第78回応用物理学会 秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 中性粒子ビームとバイオテンプレートを用いた高アスペクト比Siナノピラー構造の作製2017

    • Author(s)
      大堀大介、遠藤和彦、寒川誠二
    • Organizer
      第65回応用物理学会 春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 中性粒子ビーム技術を用いたSiNP-SiGe0.3複合膜の作製と熱伝導率の評価2016

    • Author(s)
      菊池亜紀応、八尾章史、毛利勇、小野崇人、寒川誠二
    • Organizer
      第77回 応用物理学会秋季学術大会
    • Place of Presentation
      朱鷺メッセ(新潟)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thermal conductivity of 10nm-silicon nanowire array fabricated by bio-template and neutral beam etching.2016

    • Author(s)
      A.kikuchi, A. Yao, I. Mori, T. Ono, S. Samukawa
    • Organizer
      IEEE International Conference on Nanotechnology 2016
    • Place of Presentation
      仙台国際センター(仙台)
    • Year and Date
      2016-08-22
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] THERMOELECTRIC CONVERSION MATERIAL AND METHOD FOR PRODUCING SAME2018

    • Inventor(s)
      A. KIKUCHI, S. Samukawa et al.
    • Industrial Property Rights Holder
      A. KIKUCHI, S. Samukawa et al.
    • Industrial Property Rights Type
      特許
    • Filing Date
      2018
    • Related Report
      2018 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 熱電変換材料及びその製造方法2018

    • Inventor(s)
      菊池亜紀応、八尾章史、寒川誠二、小野崇人
    • Industrial Property Rights Holder
      菊池亜紀応、八尾章史、寒川誠二、小野崇人
    • Industrial Property Rights Type
      特許
    • Filing Date
      2018
    • Related Report
      2018 Annual Research Report
  • [Funded Workshop] IEEE International Conference on Nanotechnology 20162016

    • Place of Presentation
      仙台国際センター
    • Year and Date
      2016-08-22
    • Related Report
      2016 Annual Research Report

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Published: 2016-04-21   Modified: 2020-03-30  

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