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Semiconductor gas sensor by introducing double receptors for ppb detection of bio-marker gases

Research Project

Project/Area Number 16H04219
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic industrial materials
Research InstitutionKyushu University

Principal Investigator

Shimanoe Kengo  九州大学, 総合理工学研究院, 教授 (10274531)

Co-Investigator(Kenkyū-buntansha) 西堀 麻衣子  九州大学, 総合理工学研究院, 准教授 (20462848)
渡邉 賢  九州大学, 総合理工学研究院, 准教授 (90552480)
末松 昂一  九州大学, 総合理工学研究院, 助教 (90637555)
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000)
Fiscal Year 2018: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2017: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2016: ¥12,220,000 (Direct Cost: ¥9,400,000、Indirect Cost: ¥2,820,000)
Keywordsガスセンサ / 超高感度 / レセプター / ppt / 金属酸化物 / 半導体 / バイオマーカー / 呼気 / 金属酸化物半導体 / ダブル / MEMS / パルス加熱 / 高感度 / パルス駆動 / 先端機能デバイス / セラミックス / ナノ材料 / スマートセンサ情報システム / 酸化物半導体 / ペロブスカイト型酸化物 / カルス加熱 / 酸化スズ / ナノ粒子 / 高感度化
Outline of Final Research Achievements

In this study, I aimed to detect organic gases in ppb level particularly cancer biomarker in expiration by introducing the new concept of the double receptors into the materials design of the semiconductor gas sensor which I proposed so far. There is two main results in this study. At first, it was found that when the perovskite type oxide particles were mixed with sensor material of SnO2, the oxygen released from the perovskite type oxide by pulse heating enhanced sensor response. Secondly, after optimizing pulse heating conditions, receptor-loaded cluster particles could detect toluene in ppt level. This result updated the world's best sensitivity of the semiconductor gas sensor.

Academic Significance and Societal Importance of the Research Achievements

本研究は、超高感度マイクロガスセンサの設計に関するものであり、増感作用のためのレセプター効果や素子の駆動方法に新たな概念を導入し、世界最高感度のガスセンサを構築したものである。これらの成果は、学術会議や化学雑誌に掲載されるのみならず、新聞にも掲載された。また、科学雑誌では、そのインパクトの大きさからモデル図が雑誌の表紙に採択された。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (33 results)

All 2019 2018 2017 2016 Other

All Journal Article (7 results) (of which Int'l Joint Research: 4 results,  Peer Reviewed: 7 results,  Open Access: 7 results,  Acknowledgement Compliant: 2 results) Presentation (25 results) (of which Int'l Joint Research: 16 results,  Invited: 16 results) Remarks (1 results)

  • [Journal Article] Effect of Ambient Oxygen Partial Pressure on the Hydrogen Response of SnO2 Semiconductor Gas Sensors2019

    • Author(s)
      Koichi Suematsu, Ken Watanabe, Masayoshi Yuasa, Tetsuya Kida, Kengo Shimanoe
    • Journal Title

      Journal of The Electrochemical Society

      Volume: 166 Issue: 8 Pages: B618-B622

    • DOI

      10.1149/2.1391906jes

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Ultraselective Toluene Gas Sensor: Nanosized Gold Loaded on Zinc Oxide Nanoparticles2018

    • Author(s)
      Koichi Suematsu, Kosuke Watanabe, Akihiro Tou, Yonjiao Sun, Kengo Shimanoe
    • Journal Title

      Analytical Chemistry

      Volume: 90 Issue: 3 Pages: 1959-1966

    • DOI

      10.1021/acs.analchem.7b04048

    • Related Report
      2018 Annual Research Report 2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Pulse-driven semiconductor gas sensors toward ppt level toluene detection2018

    • Author(s)
      Koichi Suematsu, Wataru Harano, Tokiharu Oyama, Yuka Shin, Ken Watanabe, Kengo Shimanoe
    • Journal Title

      Analytical chemistry

      Volume: 90(19) Issue: 19 Pages: 11219-11223

    • DOI

      10.1021/acs.analchem.8b03076

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Oxygen adsorption on ZrO2-loaded SnO2 gas sensors in humid atmosphere2018

    • Author(s)
      K Suematsu, H Uchino, T Mizukami, K Watanabe, K Shimanoe
    • Journal Title

      Journal of Materials Science

      Volume: 54(4) Issue: 4 Pages: 3135-3143

    • DOI

      10.1007/s10853-018-3020-y

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Effect of Humid Aging on the Oxygen Adsorption in SnO2 Gas Sensors2018

    • Author(s)
      Koichi Suematsu, Nan Ma, Ken Watanabe, Masayoshi Yuasa, Tetsuya Kida, Kengo Shimanoe
    • Journal Title

      Sensors

      Volume: 18 Issue: 1 Pages: 254-254

    • DOI

      10.3390/s18010254

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Design and Development of Electrostatically Driven Uniaxial Tensile Test Device for Silicon Nanowires2016

    • Author(s)
      Koichi Suematsu, Kiyomi Yamada, Masayoshi Yuasa, Tetsuya Kida, Kengo Shimanoe
    • Journal Title

      Sensors and Materials

      Volume: 28(11) Pages: 1

    • DOI

      10.18494/SAM.2016.1282

    • ISSN
      0914-4935, 2435-0869
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] High Performance of SnO2-Based Gas Sensor by Introducing Perovskite-Type Oxides2016

    • Author(s)
      K. Shimanoe, N. Ma, T. Oyama, M. Nishibori, K. Watanabe
    • Journal Title

      ECS Transactions

      Volume: 75 (16) Pages: 31-37

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Presentation] ガスセンサのマイクロ化に向けて2019

    • Author(s)
      島ノ江憲剛
    • Organizer
      物理化学トークシャワー in 愛媛
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] SnO2ナノ粒子の異方性制御とセンサ応答特性2019

    • Author(s)
      末松昂一, 梅ウンテイ, 渡邉賢, 島ノ江憲剛
    • Organizer
      電気化学会第86回大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 酸化物半導体ガスセンサの高性能化に向けた材料設計の確立 -IoT に向けたガスセンサシステム-2018

    • Author(s)
      島ノ江憲剛
    • Organizer
      平成 30 年度日本セラミックス協会九州支部 支部大会・春季特別講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] MEMS Gas Sensors Based on Metal Oxide Nano Particles2018

    • Author(s)
      K. Shimanoe, W. Harano, T. Ohyama, K. Suematsu, K. Watanabe, M. Nishibori
    • Organizer
      CIMTEC2018 (14th International Ceramics Congress)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Pd-SnO2半導体ガスセンサのパルス駆動による高感度C7H8検出2018

    • Author(s)
      原野航, 末松昂一, 渡邉賢, 島ノ江憲剛
    • Organizer
      日本セラミックス協会第31回秋季シンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] Preparation of new gas sensor by introducing perovskite-type oxide into SnO2 sensing layer2018

    • Author(s)
      Yuki Hiroyama, Koichi Suematsu, Ken Watanabe, Kengo Shimanoe
    • Organizer
      The 11th KU-KU Joint Workshop on Functional Materials
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Nanosized and highly dispersed Pd loading on the SnO2 nanoparticles2018

    • Author(s)
      Akihito Uchiyama, Koichi Suematsu, Yoko Yamashita, Ken Watanabe, Kengo Shimanoe
    • Organizer
      The 11th KU-KU Joint Workshop on Functional Materials
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The oxygen adsorption properties on Sb-doped SnO2 nanoparticles with competitively hydroxyl adsorption2018

    • Author(s)
      Takaharu Mizukami, Koichi Suematsu, Ken Watanabe, Kengo Shimanoe
    • Organizer
      The 11th KU-KU Joint Workshop on Functional Materials
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Detection technique toward extremely low concentration of VOC gases using pulse-driven SnO2 gas sensor2018

    • Author(s)
      Wataru Harano, Koichi Suematsu, Ken Watanabe, Kengo Shimanoe
    • Organizer
      The 11th KU-KU Joint Workshop on Functional Materials
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 酸化物半導体ガスセンサの高性能化に向けた材料設計の確立2018

    • Author(s)
      島ノ江憲剛
    • Organizer
      日本セラミックス協会2018年年会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Gas sensing properties of MEMS-type metal oxide gas sensor: Design of receptor function for pulse-heating mode2017

    • Author(s)
      Kengo Shimanoe, Ken Watanabe, Koichi Suematsu
    • Organizer
      12th Asian Conference on Chemical Sensors
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Reactive oxygen species on oxide semiconductors2017

    • Author(s)
      Kengo Shimanoe, Yongjiao Sun, Koichi Suematsu, Ken Watanabe, Noriko Saito, Isao Sakaguchi
    • Organizer
      GOSPEL WORKSHOP 2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Oxygen adsorption based on electric properties of indium oxide semiconductor gas sensors2017

    • Author(s)
      Y.J. Sun, K. Suematsu, K. Watanabe, M. Nishibori, K. Shimanoe
    • Organizer
      日本セラミックス協会秋季大会第30回秋季シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] High performance of MEMS-type semiconductor gas sensor in operating pulse-heating2017

    • Author(s)
      Kengo Shimanoe, Ken Watanabe, Koichi Suematsu, Maiko Nishibori
    • Organizer
      The 15th International Nanotech Symposium & Nano-Convergence Expo
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High Performance of Semiconductor Gas Sensors: Which of transducer function and utility factor is effective for sensitivity ?2017

    • Author(s)
      Kengo Shimanoe
    • Organizer
      8th International Conference on Electroceramics
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Material Design of Semiconductor Gas Sensors for Practical Use2016

    • Author(s)
      K. Shimanoe*, N. Ma, T. Oyama, H. Uchino, M. Nishibori, K. Watanabe
    • Organizer
      2016 Materials Research Society Fall meetings
    • Place of Presentation
      Boston, USA
    • Year and Date
      2016-11-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Materials design for MEMS-type metal oxide semiconductor gas sensors2016

    • Author(s)
      K. Shimanoe
    • Organizer
      The 3rd International Conference & Exhibition for Nanotechnology
    • Place of Presentation
      Changwon, South Korea
    • Year and Date
      2016-11-17
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] PARAMETERS TO DECIDE THE SENSITIVITY IN THE OXIDE SEMICONDUCTOR GAS SENSORS2016

    • Author(s)
      K. Shimanoe, K. Suematsu, K. Watanabe, M. Nishibori
    • Organizer
      The 6th NIMS - UR1 - CNRS Saint Gobain Workshop -Materials and Sustainable Development: Issues and Challenges of the 21st Century
    • Place of Presentation
      ACROS Fukuoka, Japan
    • Year and Date
      2016-10-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] High performance of SnO2-based gas sensor by introducing Perovskite-type oxides2016

    • Author(s)
      K. Shimanoe, N. MA, T. Oyama, M. NISHIBORI, K. Watanabe
    • Organizer
      PRiME 2016
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2016-10-02
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 酸化物半導体ガスセンサ -その研究開発の最前線ー2016

    • Author(s)
      島ノ江憲剛、西堀麻衣子、渡邉 賢
    • Organizer
      電子情報通信学会ソサイエティ大会
    • Place of Presentation
      北海道大学、札幌、日本
    • Year and Date
      2016-09-19
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] High performance of metal oxide semiconductor gas sensors under humid condition : Approach from materials design2016

    • Author(s)
      K. Shimanoe, N. Ma, T. Oyama, K. Suematsu, K. Watanabe, M. Mishibori
    • Organizer
      16th International Conference on Chemical Sensors
    • Place of Presentation
      Jeju, South Korea
    • Year and Date
      2016-07-10
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] MEMS-type Gas Sensors using Metal Oxides Semiconductor2016

    • Author(s)
      K. Shimanoe, T. Oyama, N. Ma, M. Nishibori, K. Watanabe
    • Organizer
      Tthe 2nd International Conference nanoFIS 2016 - Integrated Functional nano Systems
    • Place of Presentation
      Graz, Austria
    • Year and Date
      2016-06-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] New semiconductor gas sensor based on enhancing oxygen partial pressure2016

    • Author(s)
      K. Shimanoe, N Ma, R. Kato, M. Nishibori
    • Organizer
      CIMTEC 2016, 5th International Conference "Smart and Multifunctional Materials, Structures and Systems"
    • Place of Presentation
      Perugia, Italy
    • Year and Date
      2016-06-05
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 半導体ガスセンサの材料設計2016

    • Author(s)
      島ノ江憲剛
    • Organizer
      第一回セラミックス界面応用研究会
    • Place of Presentation
      国立研究開発法人物質・材料研究機構、筑波、日本
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 酸化物半導体ガスセンサの微細構造制御とMEMS素子への応用2016

    • Author(s)
      島ノ江憲剛
    • Organizer
      ナノ粒子・構造応用研究会 第13回公開講演会
    • Place of Presentation
      公益社団法人 日本化学会 化学会館、東京、日本
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Remarks] 九州大学プレスリリース

    • URL

      http://www.kyushu-u.ac.jp/f/34011/18_08_29.pdf

    • Related Report
      2018 Annual Research Report

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Published: 2016-04-21   Modified: 2020-03-30  

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