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Research and development on terahertz light emitting diodes

Research Project

Project/Area Number 16H04351
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionThe University of Tokushima

Principal Investigator

KITADA Takahiro  徳島大学, 大学院社会産業理工学研究部(理工学域), 特任教授 (90283738)

Co-Investigator(Kenkyū-buntansha) 森田 健  千葉大学, 大学院工学研究院, 准教授 (30448344)
熊谷 直人  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (40732152)
南 康夫  徳島大学, 大学院社会産業理工学研究部(理工学域), 特任准教授 (60578368)
盧 翔孟  徳島大学, 大学院社会産業理工学研究部(理工学域), 特任助教 (80708800)
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥16,640,000 (Direct Cost: ¥12,800,000、Indirect Cost: ¥3,840,000)
Fiscal Year 2018: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2017: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2016: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Keywords電子デバイス・機器 / テラヘルツ/赤外材料・素子 / 半導体非線形光学デバイス / 半導体結合共振器 / 面発光デバイス / テラヘルツ/赤外材料・素子
Outline of Final Research Achievements

We have developed a novel kind of terahertz light emitting diodes based on a semiconductor coupled multilayer cavity. The current injection into the device enables two-color lasing in the near-infrared region and its difference-frequency generation (DFG) inside the coupled cavity brings a terahertz emission in one elemental device. The GaAs-based coupled multilayer cavity was fabricated by direct bonding of two epitaxial wafers with (001) and (113)B surface orientations, and it was processed to realize the surface-emitting devices. Two-color lasing of the device was successfully demonstrated by pulsed current injection at room temperature when optical thicknesses of two cavity layers were exactly the same as each other. We also confirmed simultaneous two-color lasing of the device. The terahertz-DFG measurements were performed using a Fourier-transform spectrometer equipped with a cooled Ge photoconductive detector. However, there were no DFG signals in the measured spectra.

Academic Significance and Societal Importance of the Research Achievements

テラヘルツ光を利用したイメージング,分光分析,超高速無線通信等の技術は,環境,医療,セキュリティ等を含む様々な分野での活用が期待されているが,その普及促進には小型で取り扱いの容易な光源が欠かせない.本研究のテラヘルツLEDは,電流注入により室温で動作する面発光素子で,一般的な発光ダイオードや垂直共振器面発光レーザと同様の簡便な光源素子として期待できる.本研究では,動作の基本となる室温での赤外二波長レーザ発振に成功し,差周波発生には必須となる発振の同時性も確かめられた.テラヘルツ光のスペクトル計測にまでは至らなかったが,二波長レーザ発振特性を詳細に評価したことで克服すべき課題点を明確にした.

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (46 results)

All 2019 2018 2017 2016

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Open Access: 4 results,  Acknowledgement Compliant: 4 results) Presentation (38 results) (of which Int'l Joint Research: 10 results,  Invited: 4 results)

  • [Journal Article] Sublattice reversal in GaAs/Ge/GaAs and AlAs/Ge/AlAs heterostructures grown on (1?1?3)A and (1?1?3)B GaAs substrates2019

    • Author(s)
      Xiangmeng Lu, Yasuo Minami and Takahiro Kitada
    • Journal Title

      Journal of Crystal Growth

      Volume: 512 Pages: 74-77

    • DOI

      10.1016/j.jcrysgro.2019.02.010

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Sublattice reversal in GaAs/Ge/GaAs (113)B heterostructures and its application to THz emitting devices based on a coupled multilayer cavity2018

    • Author(s)
      Xiangmeng Lu, Naoto Kumagai, Yasuo Minami and Takahiro Kitada
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 4S Pages: 04FH07-04FH07

    • DOI

      10.7567/jjap.57.04fh07

    • NAID

      210000148945

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Room-temperature two-color lasing by current injection into a GaAs/AlGaAs coupled multilayer cavity fabricated by wafer bonding2018

    • Author(s)
      Takahiro Kitada, Xiangmeng Lu, Yasuo Minami, Naoto Kumagai and Ken Morita
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 4S Pages: 04FH03-04FH03

    • DOI

      10.7567/jjap.57.04fh03

    • NAID

      120006767281

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Sublattice reversal in GaAs/Ge/GaAs heterostructures grown on (113)B GaAs substrates2018

    • Author(s)
      Xiangmeng Lu, Naoto Kumagai, Yasuo Minami and Takahiro Kitada
    • Journal Title

      Applied Physics Express

      Volume: 11 Issue: 1 Pages: 015501-015501

    • DOI

      10.7567/apex.11.015501

    • NAID

      120006767280

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Current-injection two-color lasing in a wafer-bonded coupled multilayer cavity with InGaAs multiple quantum wells2017

    • Author(s)
      Yasuo Minami, Hiroto Ota, Xiangmeng Lu, Naoto Kumagai, Takahiro Kitada and Toshiro Isu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 4S Pages: 04CH01-04CH01

    • DOI

      10.7567/jjap.56.04ch01

    • NAID

      120006399553

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Surface Emitting Devices Based on a Semiconductor Coupled Multilayer Cavity for Novel Terahertz Light Sources2017

    • Author(s)
      Takahiro Kitada, Hiroto Ota, Xiangmeng Lu, Naoto Kumagai and Toshiro Isu
    • Journal Title

      IEICE Transactions on Electronics

      Volume: E100.C Issue: 2 Pages: 171-178

    • DOI

      10.1587/transele.E100.C.171

    • NAID

      130005306563

    • ISSN
      0916-8524, 1745-1353
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Two-color surface-emitting lasers by a GaAs-based coupled multilayer cavity structure for coherent terahertz light sources2017

    • Author(s)
      Xiangmeng Lu, Hiroto Ota, Naoto Kumagai, Yasuo Minami, Takahiro Kitada and Toshiro Isu
    • Journal Title

      Journal of Crystal Growth

      Volume: 印刷中 Pages: 249-252

    • DOI

      10.1016/j.jcrysgro.2017.01.049

    • NAID

      120006767279

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Two-color surface-emitting lasers using a semiconductor coupled multilayer cavity2016

    • Author(s)
      Takahiro Kitada, Hiroto Ota, Xiangmeng Lu, Naoto Kumagai and Toshiro Isu
    • Journal Title

      Applied Physics Express

      Volume: 9 Issue: 11 Pages: 111201-111201

    • DOI

      10.7567/apex.9.111201

    • NAID

      120006767278

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 小型フーリエ変換赤外分光装置の製作と測定法の確立2019

    • Author(s)
      中山 政裕, 菅野 裕吾, 石谷 善博, 北田 貴弘, 森田 健
    • Organizer
      2019年 第66回 応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] (113)B GaAsウエハ接合で作製したGaAs/AlGaAs多層膜結合共振器への電流注入によるレーザ発振2019

    • Author(s)
      盧 翔孟, 小楠 洸太朗, 髙橋 美沙, 合田 剛史, 熊谷 直人, 森田 健, 南 康夫, 北田 貴弘
    • Organizer
      2019年 第66回 応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] GaAs系の多層膜結合共振器を使ったテラヘルツLEDの作製を目指した基礎的研究2019

    • Author(s)
      南 康夫, 盧 翔孟, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      LED総合フォーラム2019 in 徳島
    • Related Report
      2018 Annual Research Report
  • [Presentation] 2つの(113)Bエピウェハの直接接合で作製した半導体結合共振器の電流注入レーザー発振2019

    • Author(s)
      合田 剛史, 盧 翔孟, 南 康夫, 北田 貴弘
    • Organizer
      平成30年度第5回半導体エレクトロニクス部門委員会 第1回講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 量子ドットを活性層とする結合共振器の光励起レーザ発振2019

    • Author(s)
      髙橋 美沙, 盧 翔孟, 南 康夫, 北田 貴弘
    • Organizer
      平成30年度第5回半導体エレクトロニクス部門委員会 第1回講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] DBR膜上の低温成長InGaAs量子井戸によるテラヘルツ光伝導スイッチの研究,2019

    • Author(s)
      阿部 広睦, 張 弘翼, 盧 翔孟, 南 康夫, 北田 貴弘
    • Organizer
      平成30年度第5回半導体エレクトロニクス部門委員会 第1回講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Time resolved measurement of two-color laser lights emitted from a GaAs/AlGaAs coupled multilayer cavity2018

    • Author(s)
      Yasuo Minami, Xiangmeng Lu, Naoto Kumagai, Ken Morita and Takahiro Kitada
    • Organizer
      23rd Microoptics Conference (MOC 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sublattice reversal in GaAs/Ge/GaAs and AlAs/Ge/AlAs heterostructures grown on (113)A and (113)B GaAs substrates2018

    • Author(s)
      Xiangmeng Lu, Yasuo Minami and Takahiro Kitada
    • Organizer
      20th International Conference on Molecular Beam Epitaxy (ICMBE 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Temperature tuning of two-color lasing using a coupled GaAs/AlGaAs multilayer cavity by current injection2018

    • Author(s)
      Xiangmeng Lu, Yasuo Minami, Naoto Kumagai, Ken Morita and Takahiro Kitada
    • Organizer
      The 45th International Symposium on Compound Semiconductors (ISCS2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Simultaneous oscillation of two-color laser lights from a GaAs/AlGaAs coupled multilayer cavity2018

    • Author(s)
      Yasuo Minami, Xiangmeng Lu, Naoto Kumagai, Ken Morita and Takahiro Kitada
    • Organizer
      The Conference on Lasers and Electro-Optics (CLEO 2018)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 半導体結合共振器を利用したテラヘルツ波発生2018

    • Author(s)
      森田 健, 盧 翔孟, 南 康夫, 熊谷 直人, 北田 貴弘, 井須 俊郎
    • Organizer
      テラヘルツ科学の最先端V
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] MBEによる(113)A GaAs基板上におけるAlAs/Ge/AlAsヘテロ構造の副格子交換2018

    • Author(s)
      盧 翔孟, 南 康夫, 北田 貴弘
    • Organizer
      2018年 第79回 応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] GaAs/AlGaAs多層膜結合共振器への電流注入による二波長発振の動的振る舞いの温度依存性2018

    • Author(s)
      小楠 洸太朗, 南 康夫, 盧 翔孟, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      2018年 第79回 応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 半導体多層膜結合共振器による赤外二波長レーザー発振2018

    • Author(s)
      北田 貴弘, 盧 翔孟, 南 康夫, 熊谷 直人, 森田 健
    • Organizer
      2018年電子情報通信学会ソサイエティ大会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] GaAs/AlGaAs結合共振器による二波長面発光レーザの時間分解スペクトル測定2018

    • Author(s)
      小楠 洸太朗, 南 康夫, 盧 翔孟, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      2018年度 応用物理・物理系学会 中国四国支部 合同学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] InGaAs量子井戸をもつGaAs結合共振器からの電流注入による室温での2波長レーザーの時間特性2018

    • Author(s)
      南 康夫, 盧 翔孟, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] InGaAs量子井戸を活性層とする結合共振器への電流注入によるニ波長レーザの温度特性2018

    • Author(s)
      盧 翔孟, 南 康夫, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      第65回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] GaAs系の多層膜結合共振器を使ったテラヘルツLEDの研究開発2018

    • Author(s)
      南 康夫, 盧 翔孟, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      LED総合フォーラム2018
    • Related Report
      2017 Annual Research Report
  • [Presentation] テラヘルツLEDを実現するガリウムヒ素系結合共振器の室温赤外二波長レーザ発振2018

    • Author(s)
      小楠 洸太朗, 南 康夫, 盧 翔孟, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      日本材料学会半導体エレクトロニクス部門委員会 平成29年度第1回講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ゲルマニウムを使った高指数面基板上ガリウムヒ素系薄膜の副格子交換エピタキシー成長2018

    • Author(s)
      吉田 啓佑, 宮井 淳平, 盧 翔孟, 南 康夫, 北田 貴弘
    • Organizer
      日本材料学会半導体エレクトロニクス部門委員会 平成29年度第1回講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] ウエハ接合で作製したGaAs/AlGaAs多層膜結合共振器への電流注入による室温二波長レーザ発振2018

    • Author(s)
      盧 翔孟, 南 康夫, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Related Report
      2017 Annual Research Report
  • [Presentation] 結合共振器による2波長面発光レーザーの偏光特性2017

    • Author(s)
      南 康夫, 太田 寛人, 盧 翔孟, 北田 貴弘
    • Organizer
      2017年度 第64回応用物理学会春季学術講演会; 15p-213-16
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 半導体多層薄膜を使った結合共振器構造による テラヘルツ発光素子2017

    • Author(s)
      北田 貴弘, 南 康夫, 盧 翔孟
    • Organizer
      発光型/非発光型ディスプレイ合同研究会; EID2016-33
    • Place of Presentation
      徳島大学(徳島県徳島市)
    • Year and Date
      2017-01-26
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Room-Temperature Two-Color Lasing by Current Injection into a GaAs/AlGaAs Coupled Multilayer Cavity Fabricated by Wafer Bonding2017

    • Author(s)
      Takahiro Kitada, Xiangmeng Lu, Yasuo Minami, Naoto Kumagai and Ken Morita
    • Organizer
      2017 International Conference on Solid State Devices and Materials (SSDM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sublattice Reversal in GaAs/Ge/GaAs (113)B heterostructures and its application to THz emitting devices based on a coupled multilayer cavity2017

    • Author(s)
      Xiangmeng Lu, Yasuo Minami, Naoto Kumagai and Takahiro Kitada
    • Organizer
      2017 International Conference on Solid State Devices and Materials (SSDM2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Sublattice reversal in GaAs/Ge/GaAs (113)B heterostructures grown by MBE2017

    • Author(s)
      Xiangmeng Lu, Yasuo Minami and Takahiro Kitada
    • Organizer
      The 44rd International Symposium on Compound Semiconductor (ISCS2017)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高指数面上の副格子交換エピタキシーと面発光テラヘルツ素子2017

    • Author(s)
      北田 貴弘, 盧 翔孟, 南 康夫, 熊谷 直人, 森田 健
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] InGaAs量子井戸をもつGaAs結合共振器からの電流注入による2波長レーザー発振2017

    • Author(s)
      南 康夫, 盧 翔孟, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] MBEによる(113)Bと(113)A GaAs基板上におけるGaAs/Ge/GaAsヘテロ構造の成長2017

    • Author(s)
      盧 翔孟, 南 康夫, 熊谷 直人, 北田 貴弘
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] InAs量子ドットをもつGaAs結合共振器からの電流注入によるレーザー発振2017

    • Author(s)
      南 康夫, 盧 翔孟, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      2017年度応用物理・物理系学会中国四国支部合同学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] InGaAs量子井戸を活性層とする結合共振器への電流注入による室温ニ波長レーザー発振2017

    • Author(s)
      盧 翔孟, 南 康夫, 熊谷 直人, 森田 健, 北田 貴弘
    • Organizer
      2017年度応用物理・物理系学会中国四国支部合同学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Current-Injection Two-Color Lasing in a Wafer-Bonded Coupled Multilayer Cavity with InGaAs Multiple Quantum Wells2016

    • Author(s)
      Hiroto Ota, Xiangmeng Lu, Naoto Kumagai, Takahiro Kitada and Toshiro Isu
    • Organizer
      2016 Internatioal Conference on Solid State Devices and Materials (SSDM2016); C-4-03
    • Place of Presentation
      つくば国際会議場(茨城県つくば市)
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 結合共振器による二波長面発光レーザの温度依存性2016

    • Author(s)
      太田 寛人, 盧 翔孟, 熊谷 直人, 北田 貴弘, 井須 俊郎
    • Organizer
      2016年度 第77回応用物理学会秋季学術講演会; 16p-A35-5
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 波長920 nm 近傍のゲート光で動作する光伝導アンテナ素子の作製2016

    • Author(s)
      北田 貴弘, 太田 寛人, 盧 翔孟, 熊谷 直人, 井須 俊郎
    • Organizer
      2016年度 第77回応用物理学会秋季学術講演会; 14p-B2-19
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Two-Color Surface Emitting Lasers by a GaAs-Based Coupled Multilayer Cavity Structure for Novel Coherent Terahertz Light Sources2016

    • Author(s)
      Hiroto Ota, Xiangmeng Lu, Naoto Kumagai, Takahiro Kitada and Toshiro Isu
    • Organizer
      19th International Conference on Molecular Beam Epitaxy (MBE2016); Tu-P-59
    • Place of Presentation
      Montpelier (France)
    • Year and Date
      2016-09-04
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Two-Color Laser Based on a Wafer-Bonded Coupled Multilayer Cavity for Novel Terahertz LED2016

    • Author(s)
      太田 寛人, 盧 翔孟, 熊谷 直人, 北田 貴弘, 井須 俊郎
    • Organizer
      第35回電子材料シンポジウム (EMS-35); Th3-3
    • Place of Presentation
      ラフォーレ琵琶湖(滋賀県守山市)
    • Year and Date
      2016-07-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] Two-Color Lasing from a GaAs/AlGaAs Coupled Multilayer Cavity by Current Injection2016

    • Author(s)
      Hiroto Ota, Xiangmeng Lu, Naoto Kumagai, Takahiro Kitada and Toshiro Isu
    • Organizer
      The 43rd International Symposium on Compound Semiconductor (ISCS2016); MoP-ISCS-033
    • Place of Presentation
      富山国際会議場(富山県富山市)
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] テラヘルツ帯差周波発生に適した結合共振器による二波長面発光レーザの作製2016

    • Author(s)
      太田 寛人, 盧 翔孟, 熊谷 直人, 北田 貴弘, 井須 俊郎
    • Organizer
      電子情報通信学会研究会 レーザ・量子エレクトロニクス研究会; LQE2016-15
    • Place of Presentation
      福井市地域交流プラザ(福井県福井市)
    • Year and Date
      2016-05-19
    • Related Report
      2016 Annual Research Report

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Published: 2016-04-21   Modified: 2020-03-30  

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