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Shear mode resonators for detection of biomolecular interactions in liquid

Research Project

Project/Area Number 16H04356
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionWaseda University

Principal Investigator

Yanagitani Takahiko  早稲田大学, 理工学術院, 准教授 (10450652)

Co-Investigator(Kenkyū-buntansha) 高柳 真司  名古屋工業大学, 工学(系)研究科(研究院), 助教 (00735326)
吉田 憲司  千葉大学, フロンティア医工学センター, 助教 (10572985)
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2019)
Budget Amount *help
¥16,380,000 (Direct Cost: ¥12,600,000、Indirect Cost: ¥3,780,000)
Fiscal Year 2018: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2017: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥6,240,000 (Direct Cost: ¥4,800,000、Indirect Cost: ¥1,440,000)
Keywords圧電薄膜 / センサ / ScAlN / 抗原抗体反応 / 圧電薄膜センサ / 横波共振子 / 液中センサ / 液体中センサ
Outline of Final Research Achievements

In the fluid viscosity evaluation based on the QCM (Quartz Crystal Microbalance), the quartz crystal plate is required to be thinned to improve the measurement sensitivity. The QCM, however, becomes to be fragile due to thinning. Sensitive measurement without cracking of the piezoelectric layer can be expected by using the SMR (Solidly Mounted Resonator). In the previous study, however, the quasi-shear mode electromechanical coupling k’15^2 was only 1.7%. Therefore, we propose the fluid viscosity evaluation with the SMR based on the c-axis tilted ScAlN thin film. k’15^2 of the 48° c-axis tilted ScAlN film is determined as 13.0%. In addition, anti-resonant frequency shifts with changing in glycerin concentration were observed.

Academic Significance and Societal Importance of the Research Achievements

近年の医療費は増大の一途を辿っている。医療費低減には、健康管理を在宅で行える予防医療システムの研究開発が待たれている。本研究は、病変マーカの抗原抗体反応を検出できる高感度センサの実現を目指すものである。具体的には独自の横波薄膜共振子の固有振動数変動を用いて、抗原抗体反応の質量を検出するセンサ基盤技術を構築する。新たに発見した「巨大圧電性薄膜」を用いてこの問題を解決し、S/N比を向上させた高感度・低雑音センサを実現する。これにより高感度質量計測システムを構築する。

Report

(4 results)
  • 2019 Final Research Report ( PDF )
  • 2018 Annual Research Report
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (137 results)

All 2020 2019 2018 2017 2016 Other

All Journal Article (31 results) (of which Int'l Joint Research: 8 results,  Peer Reviewed: 10 results,  Open Access: 1 results) Presentation (105 results) (of which Int'l Joint Research: 48 results,  Invited: 14 results) Remarks (1 results)

  • [Journal Article] Frequency-switchable polarity-inverted BAW resonators based on electric-field-induced piezoelectric PMN-PT/PZT epitaxial film stacks2019

    • Author(s)
      T. Shimidzu and T. Yanagitani
    • Journal Title

      J. Appl. Phys.

      Volume: vol. 126 Issue: 11 Pages: 114104-114104

    • DOI

      10.1063/1.5092753

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Frequency-switchable polarity-inverted BAW resonators based on PZT/PTO epitaxial films using difference in coercive field2019

    • Author(s)
      T. Shimidzu, T. Mori, and T. Yanagitani
    • Journal Title

      Appl. Phys. Lett.,

      Volume: vol. 114 Issue: 21 Pages: 212902-212902

    • DOI

      10.1063/1.5089554

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] A method for extracting mechanical Q factor of the piezoelectric film without etching substrate2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 229-300

    • DOI

      10.1109/ultsym.2019.8926088

    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Shear mode polarity inverted ScAlN multilayer for application to BAW transformer in rectifying antenna2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1118-1119

    • DOI

      10.1109/ultsym.2019.8925674

    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] A method to estimate Kt2 of piezoelectric films from the change of lattice strain by XRD without removing substrate2019

    • Author(s)
      T. Soutome and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 301-304

    • DOI

      10.1109/ultsym.2019.8925766

    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Improvement of C-Axis parallel orientation of ZnO film on silica glass pipes with various diameters for SH-SAW pipe sensor2019

    • Author(s)
      T. Wakabayashi, S. Takayanagi, Y. Takamura, M. Matsukawa, and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 671-674

    • DOI

      10.1109/ultsym.2019.8925796

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Effect of negative ions generation from sputtering target on crystalline orientation and Kt2 of ScAlN thin films2019

    • Author(s)
      R. Kihara and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1120-1123

    • DOI

      10.1109/ultsym.2019.8925983

    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Ion beam induced A-Axis in-plane oriented C-Axis oriented AlN thin film growth for high-Q BAW resonator application2019

    • Author(s)
      C. Masamune and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1127-1128

    • DOI

      10.1109/ultsym.2019.8926047

    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] ScAlN圧電薄膜の高品質化に向けたScAl合金スパッタターゲットから発生する負イオンの抑制~電子ビーム溶融、アーク溶融、焼結ScAl合金ターゲットの比較~2019

    • Author(s)
      柳谷隆彦
    • Journal Title

      真空ジャーナル

      Volume: 2019年9月号 Pages: 11-15

    • Related Report
      2018 Annual Research Report
  • [Journal Article] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019

    • Author(s)
      天野凌輔,山川愉生,柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 119 Pages: 19-23

    • Related Report
      2018 Annual Research Report
  • [Journal Article] ZnO薄膜を用いた厚みすべりモード共振子の作製と液体負荷時の周波数特性2019

    • Author(s)
      宮田昌哉,高柳真司,松川真美,柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 119 Pages: 33-37

    • Related Report
      2018 Annual Research Report
  • [Journal Article] Evaluation of the acoustoelectric effect in the thickness direction of c-plane ZnO single crystals by Brillouin scattering2017

    • Author(s)
      S. Tomita, T. Yanagitani, S. Takayanagi, H.Ichihashi, Y. Shibagaki, H. Hayashi, and M. Matsukawa,
    • Journal Title

      J. Appl. Phys

      Volume: 121 Issue: 23 Pages: 235102-235102

    • DOI

      10.1063/1.4985699

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] “A new type wide-frequency-range shear viscosity sensor using caxis tilted ScAlN thin film on temperature Stable AT-cut quartz thick plate2017

    • Author(s)
      Y. Yamakawa, K-h. Sano, R. Karasawa, and T. Yanagitani,
    • Journal Title

      Proc. IEEE Ultrason. Symp

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ultsym.2017.8092520

    • Related Report
      2017 Annual Research Report
  • [Journal Article] C-axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna2017

    • Author(s)
      R. Karasawa, and T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ultsym.2017.8091618

    • Related Report
      2017 Annual Research Report
  • [Journal Article] High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz2017

    • Author(s)
      K-h. Sano, R. Karasawa, and T. Yanagitani,
    • Journal Title

      Proc. IEEE Ultrason. Symp

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ultsym.2017.8092005

    • Related Report
      2017 Annual Research Report
  • [Journal Article] The frequency wwitchable multi-layered BST/BaTiO3 epitaxial film resonator,2017

    • Author(s)
      T. Shimidzu, T. Yanagitani, K. Wasa
    • Journal Title

      Proc. IEEE Ultrason. Symp

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ultsym.2017.8091518

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices,2017

    • Author(s)
      S. Tokuda, S. Takayanagi, M. Matsukawa, T. Yanagitani,
    • Journal Title

      Proc. IEEE Ultrason. Symp

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ultsym.2017.8092072

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film2017

    • Author(s)
      Sliinji Takayanagi; Takahiko Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ultsym.2017.8092666

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz2017

    • Author(s)
      Ko-Hei Sano; Rei Karasawa; Takahiko Yanagitani
    • Journal Title

      2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

      Volume: 1 Pages: 862-865

    • DOI

      10.1109/transducers.2017.7994185

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate2017

    • Author(s)
      Y. Yamakawa; K. Sano; R. Karasawa; T. Yanagitani
    • Journal Title

      2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

      Volume: 1 Pages: 2135-2138

    • DOI

      10.1109/transducers.2017.7994497

    • Related Report
      2017 Annual Research Report
  • [Journal Article] ScAlN薄膜/低TCF基板構造のすべりモード共振子を用いたMHz帯-GHz帯同時粘性評価2017

    • Author(s)
      山川愉生、佐野耕平、唐澤嶺、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: 117 Pages: 61-66

    • Related Report
      2017 Annual Research Report
  • [Journal Article] 電気機械結合係数kt2=19%のScAlN厚膜を用いた低周波帯80MHzトランスデューサ2017

    • Author(s)
      佐野耕平、唐澤嶺、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: 117 Pages: 59-63

    • Related Report
      2017 Annual Research Report
  • [Journal Article] コヒーレントフォノン励起を用いたBrillouin散乱法による縦波・横波音速測定の高速化2017

    • Author(s)
      川部昌彦、柳谷隆彦、柴垣慶明、高柳真司、鈴木雅視、松川真美
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: 117 Pages: 71-74

    • Related Report
      2017 Annual Research Report
  • [Journal Article] Al極性ScAlNとO極性ZnO薄膜を用いた多層構造の高効率超音波トランスデューサ2017

    • Author(s)
      森 剛志、柳谷 隆彦
    • Journal Title

      超音波テクノ(日本工業出版)

      Volume: vol. 29 Pages: 84-87

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effect of anisotropy on stress-induced electrical potentials in bovine bone using ultrasound irradiation2017

    • Author(s)
      S. Matsukawa, T. Makino, S. Mori, D. Koyama, S. Takayanagi, K. Mizuno, T. Yanagitani, and M. Matsukawa,
    • Journal Title

      Appl. Phys. Lett.

      Volume: 110 Issue: 14 Pages: 143701-143701

    • DOI

      10.1063/1.4979599

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of energetic negative ions generated from sputtering targets on ScAlN film growth2016

    • Author(s)
      S. Takayanagi, M. Matsukawa, T. Yanagitani
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ultsym.2016.7728836

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Rapid and simultaneous measurement of longitudinal and shear wave velocities by Brillouin scattering from artificially induced phonons2016

    • Author(s)
      M. Kawabe, Y. Shibagaki, M. Matsukawa, T. Yanagitani M. Suzuki, S .Takayanagi
    • Journal Title

      Proc. IEEE Ultrason. Symp.

      Volume: 1 Pages: 1-4

    • DOI

      10.1109/ultsym.2016.7728801

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Acoustic wave velocities and refractive indices in an m-plane GaN single crystal plate and c-axis oriented ScAlN films measured by Brillouin scattering techniques2016

    • Author(s)
      H. Ichihashi T. Yanagitani, M. Suzuki, S. Takayanagi, M. Kawabe, S. Tomita and M. Matsukawa
    • Journal Title

      IEEE Trans. Ultrason., Ferroelectr., Freq. Contr

      Volume: 63 Issue: 5 Pages: 717-725

    • DOI

      10.1109/tuffc.2016.2544864

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy2016

    • Author(s)
      H. Odagawa, K. Terada, H. Nishikawa, T. Yanagitani, Y. Cho
    • Journal Title

      Ferroelectrics

      Volume: vol. 498 Pages: 47-51

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ScAlN/ZnO極性反転圧電薄膜を用いた2次モード励振超音波トランデューサ2016

    • Author(s)
      森剛志、鈴木雅視、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol. 116 Pages: 1-6

    • Related Report
      2016 Annual Research Report
  • [Journal Article] Hz帯で純横波超音波を高効率励振するc軸平行ZnO薄膜トランスデューサ2016

    • Author(s)
      森剛志、鈴木雅視、柳谷隆彦
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: vol.116 Pages: 7-12

    • Related Report
      2016 Annual Research Report
  • [Presentation] c 軸配向 ZnO 薄膜を用いた極性反転共振子の圧電トランス応用2020

    • Author(s)
      間島毅、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2020
    • Related Report
      2018 Annual Research Report
  • [Presentation] 基板付き薄膜共振子の電磁結合信号もしくは音響信号を用いた変換損 kt2評価法の比較2020

    • Author(s)
      龍見亮汰、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2020
    • Related Report
      2018 Annual Research Report
  • [Presentation] レクテナ用の昇圧回路応用を目指した積層型圧電トランスのモデル化と試作2020

    • Author(s)
      平澤直人、木下紗里那、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] PZT系エピタキシャル薄膜共振子の600 ?C以上の高温域における圧電特性2020

    • Author(s)
      松田友佳、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] イオンビームにより面内a軸方向を揃えたc軸配向AlN薄膜の成長2020

    • Author(s)
      正宗千明、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 圧電トランス応用に向けたc軸配向極性反転ZnO薄膜共振子の作製2020

    • Author(s)
      間島毅、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] レクテナ昇圧素子に向けたSMR型傾斜反転ScAlN圧電薄膜トランス2020

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      第67回応用物理学会春季学術講演会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] イオンビーム成膜を用いた結晶配向制御と極性反転デバイス応用2019

    • Author(s)
      柳谷隆彦
    • Organizer
      弾性波素子技術第150委員会第156回委員会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 微弱電波による環境発電用の新しい昇圧素子2019

    • Author(s)
      柳谷隆彦
    • Organizer
      JST 新技術説明会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Sc 粒埋め込みスパッタターゲットによる成膜中負イオン照射抑制と ScAlN 薄膜結晶性向上2019

    • Author(s)
      白 寧蕊、柳谷隆彦
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] イオンビームアシストスパッタ法による a軸方向が揃った c 軸配向 AlN 薄膜の成長2019

    • Author(s)
      正宗千明、柳谷隆彦
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019

    • Author(s)
      松田友佳、柳谷隆彦
    • Organizer
      第48回EMシンポジウム
    • Related Report
      2018 Annual Research Report
  • [Presentation] レクテナ昇圧素子への応用を目指したc軸ジグザグ配向ScAlN圧電薄膜トランス2019

    • Author(s)
      柳谷隆彦
    • Organizer
      同志社大学 超音波応用科学研究センター7月例会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019

    • Author(s)
      天野凌輔、山川愉生、柳谷隆彦
    • Organizer
      電子情報通信学会超音波研究会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Enhancement of Electromechanical Coupling kt2 in Rare Earth Doped AlN Films for Bulk Acoustic Wave Filter Applications2019

    • Author(s)
      T. Yanagitani
    • Organizer
      ICoSEM2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] PZT Family Epitaxial Thick Film for Ultrasonic Transducer at Frequencies Below 100MHz2019

    • Author(s)
      Y. Mazda and T. Yanagitani
    • Organizer
      ICoSEM2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ScAlN Free?standing 0.1 mm Piezoelectric Plates in the 30?50 MHz Resonance Frequency2019

    • Author(s)
      C. Masamune, R. Karasawa and T. Yanagitani
    • Organizer
      ICoSEM2019
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] グラフェン上巨大圧電性ScAlN薄膜の弾性波デバイス応用2019

    • Author(s)
      天野凌輔、柳谷隆彦
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] レクテナ昇圧素子を目指したジグザグ配向ScAlN圧電薄膜トランス2019

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 基板付き薄膜構造を用いた圧電薄膜の機械的品質Qm値の推定法2019

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] スパッタ法によるScAlN厚膜を用いたVHF帯高効率超音波トランスデューサ2019

    • Author(s)
      佐藤裕友、柳谷隆彦
    • Organizer
      2019年 電気学会 電子・情報・システム部門大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] CVDグラフェン上のRFスパッタc軸配向ScAlN薄膜の圧電特性2019

    • Author(s)
      天野凌輔、柳谷隆彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019

    • Author(s)
      松田友佳、柳谷隆彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] YbAlN圧電薄膜のUHF帯における電気機械結合係数kt2の増幅2019

    • Author(s)
      木原流唯、柳谷隆彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜HBAR型トランス2019

    • Author(s)
      木下紗里那、柳谷隆彦
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Related Report
      2018 Annual Research Report
  • [Presentation] Estimation of the mechanical Q factor of the piezoelectric film without removing substrate2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ScAlN thin film stack for BAW transformer in rectifying antenna2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] レクテナ昇圧回路への応用を目指したc軸ジグザグ傾斜ScAlN圧電薄膜トランス2019

    • Author(s)
      柳谷隆彦
    • Organizer
      弾性波素子技術第150委員会第158回委員会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ScAlN Polarization Inverted Resonators and Enhancement of Kt2 in New YbAlN Materials for BAW Devices2019

    • Author(s)
      T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Method to Estimate Kt2 of Piezoelectric Films from the Change of Lattice Strain by XRD without Removing Substrate2019

    • Author(s)
      T. Soutome and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of Negative Ions Generation from Sputtering Target on Crystalline Orientation and Kt2 of ScAlN Thin Films2019

    • Author(s)
      R. Kihara and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ion Beam Induced A-Axis In-Plane Oriented C-Axis Oriented AlN Thin Film Growth for High-Q BAW Resonator Application2019

    • Author(s)
      C. Masamune and T. Yanagitani
    • Organizer
      2019 IEEE International Ultrasonics
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 5Gのスマートフォン向けフィルタ(BAW filter)の薄膜材料2019

    • Author(s)
      柳谷隆彦
    • Organizer
      粉体粉末冶金協会2019年度秋季大会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] c軸配向ZnO薄膜成長におけるZn面またはO面極性制御および分極反転多層圧電デバイスへの応用2019

    • Author(s)
      間島毅、柳谷隆彦
    • Organizer
      粉体粉末冶金協会2019年度秋季大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] 巨大圧電性ScAlN厚膜の成長および粉体化による結晶構造解析2019

    • Author(s)
      白寧蕊、柳谷隆彦
    • Organizer
      粉体粉末冶金協会2019年度秋季大会
    • Related Report
      2018 Annual Research Report
  • [Presentation] ウエハ付き状態の圧電薄膜のBAWフィルタ向け評価法およびScAlN薄膜成長のノウハウ2019

    • Author(s)
      柳谷隆彦
    • Organizer
      圧電MEMS研究会第20回研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] Polarization inverted ScAlN films and new high kt2 YbAlN films for BAW device applications2019

    • Author(s)
      Y. Mazda and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Giant piezoelectricity and temperature characteristics of free-standing sputter-epitaxial PbTiO3 plates2019

    • Author(s)
      Y. Mazda and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement of crystalline orientation and kt2 of ScAlN thin films by suppression of negative ions generation from sputtering target2019

    • Author(s)
      R. Kihara, S. Takayanagi and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of lattice strain change in ScAlN piezoelectric films by XRD for kt 2 estimation without removing substrate2019

    • Author(s)
      T. Sotome and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] BAW type transformer with ScAlN multilayer for rectifying antenna2019

    • Author(s)
      S. Kinoshita and T. Yanagitani
    • Organizer
      The 13th Pacific Rim Conference of Ceramic Societies (PACRIM13)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 自立構造エピタキシャル PbTiO3薄片の高い電気機械結合係数と温度特性2019

    • Author(s)
      松田友佳、柳谷隆彦
    • Organizer
      The 40th Symposium on Ultrasonic Electronics (USE 2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] イオンビームアシストスパッタ法による a 軸方向の揃った c 軸配向 ScAlN 薄膜の成長2019

    • Author(s)
      正宗千明、柳谷隆彦
    • Organizer
      The 40th Symposium on Ultrasonic Electronics (USE 2019)
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 超高周波帯超音波映像装置用プローブの新しい分極反転圧電薄膜材料2019

    • Author(s)
      柳谷隆彦
    • Organizer
      超音波計測に関する萌芽技術研究会
    • Related Report
      2018 Annual Research Report
    • Invited
  • [Presentation] 擬似すべりモードc軸傾斜配向ScAlN薄膜を用いた複素反射率測定による液体試料のUHF帯粘弾性評価2018

    • Author(s)
      山川 愉生, 柳谷 隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2018(日本、宮城)
    • Related Report
      2017 Annual Research Report
  • [Presentation] c軸傾斜配向ScAlN薄膜を用いた擬似すべりモード基板付き共振子による液体試料のMHz帯-GHz帯にわたる粘性評価2018

    • Author(s)
      山川 愉生, 柳谷 隆彦
    • Organizer
      第65回応用物理学会 春季学術講演会(日本、東京)
    • Related Report
      2017 Annual Research Report
  • [Presentation] c軸傾斜配向ScAlN薄膜を用いた横波超音波の斜入射による液体試料のVHF帯粘弾性評価2018

    • Author(s)
      山川 愉生, 柳谷 隆彦
    • Organizer
      第65回応用物理学会 春季学術講演会(日本、東京)
    • Related Report
      2017 Annual Research Report
  • [Presentation] 単結晶PZT/PTエピタキシャル薄膜を用いた周波数切り替え可能な共振子2017

    • Author(s)
      森剛志、高柳真司、清水貴博、柳谷隆彦
    • Organizer
      2017年電子情報通信学会総合大会
    • Place of Presentation
      名城大学 天白キャンパス
    • Year and Date
      2017-03-22
    • Related Report
      2016 Annual Research Report
  • [Presentation] 電気機械結合係数 kt2=19%のScAlN厚膜を用いた低周波帯80 MHzトランスデューサ2017

    • Author(s)
      佐野耕平、唐澤嶺、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2017
    • Place of Presentation
      東北大学カタールサイエンスキャンパスホール
    • Year and Date
      2017-02-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] RFマグネトロンスパッタ法を用いて作製したc軸平行配向ZnO膜の 圧電不活性層低減に関す る検討2017

    • Author(s)
      盛一馬、高柳真司、松川真美、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2017
    • Place of Presentation
      東北大学カタールサイエンスキャンパスホール
    • Year and Date
      2017-02-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] c軸傾斜配向ScAlN膜/ブラック反射層構造のGHz帯厚みすべりモード共振子を用いた液体粘 性評価2017

    • Author(s)
      唐澤嶺、山川愉生、森剛志、矢﨑花、佐野耕平、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2017
    • Place of Presentation
      東北大学カタールサイエンスキャンパスホール
    • Year and Date
      2017-02-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] c軸傾斜配向ScAlN膜/ATカット水晶基板構造の低TCF横波共振子を用いた 広帯域周波数粘度 測定2017

    • Author(s)
      山川愉生、佐野耕平、唐澤嶺、森剛志、柳谷隆彦
    • Organizer
      圧電材料・デバイスシンポジウム2017
    • Place of Presentation
      東北大学カタールサイエンスキャンパスホール
    • Year and Date
      2017-02-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] 抗電界差による基本モード/高次モード周波数切替可能なPZT/PTエピ膜分極反転共振子2017

    • Author(s)
      清水貴博、森剛志、柳谷隆彦、和佐清孝
    • Organizer
      圧電材料・デバイスシンポジウム2017
    • Place of Presentation
      東北大学カタールサイエンスキャンパスホール
    • Year and Date
      2017-02-06
    • Related Report
      2016 Annual Research Report
  • [Presentation] 最近のBAWデバイス(FBAR)の薄膜材料と評価手法2017

    • Author(s)
      柳谷隆彦
    • Organizer
      第65回応用物理学会学術講演会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 最新のBAW デバイス材料の研究と応用2017

    • Author(s)
      柳谷隆彦
    • Organizer
      マイクロナノ先端技術交流会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 分極反転圧電薄膜材料の進展と超音波デバイス応用2017

    • Author(s)
      柳谷隆彦、唐澤嶺
    • Organizer
      2017年秋季日本音響学会研究発表会
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] 分極反転圧電薄膜の成長と応用~レクテナ昇回路へ検討~2017

    • Author(s)
      柳谷隆彦、唐澤嶺
    • Organizer
      第46回EMシンポジウム
    • Related Report
      2017 Annual Research Report
    • Invited
  • [Presentation] Electromechanical coupling hysteresis curves of PZT epitaxial ferroelectric films determined by gigahertz ultrasonic method2017

    • Author(s)
      T. Yanagitani, T. Mori, K. Wasa
    • Organizer
      12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Frequency switchable multi-layered paraelectric-BST/ferroelectric-BaTiO3 stack epitaxial film resonator2017

    • Author(s)
      R.Noda, T.Shimidzu, K.Wasa, and T. Yanagitani
    • Organizer
      IUMRS-ICA2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] DC field-induced piezoelectricity of cubic perovskite 0.95Pb(Mg1/3Nb2/3)O3-0.05PbTiO3 epitaxial film for RF switchable resonator,2017

    • Author(s)
      T.Shimidzu, K.Wasa, and T. Yanagitani,
    • Organizer
      IUMRS-ICA2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] C-axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna,2017

    • Author(s)
      R. Karasawa, and T. Yanagitani
    • Organizer
      2017 IEEE International Ultrason. Symp.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A new type wide-frequency-range shear viscosity sensor using caxis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate,2017

    • Author(s)
      Y. Yamakawa, K-h. Sano, R. Karasawa, and T. Yanagitani
    • Organizer
      2017 IEEE International Ultrason. Symp.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz,2017

    • Author(s)
      K-h. Sano, R. Karasawa, and T. Yanagitani
    • Organizer
      2017 IEEE International Ultrason. Symp.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film2017

    • Author(s)
      S. Takayanagi, M. Matsukawa, T. Yanagitani
    • Organizer
      2017 IEEE International Ultrason. Symp.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices,”2017

    • Author(s)
      S. Tokuda, S. Takayanagi, M. Matsukawa, T. Yanagitani,
    • Organizer
      2017 IEEE International Ultrason. Symp.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The frequency wwitchable multi-layered BST/BaTiO3 epitaxial film resonator,2017

    • Author(s)
      T. Shimidzu, T. Yanagitani, K. Wasa
    • Organizer
      2017 IEEE International Ultrason. Symp.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Film Growth of C-Axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor2017

    • Author(s)
      Y. Takamura, S. Takayanagi, M. Matsukawa, Chizu Ishida, and T. Yanagitani,
    • Organizer
      2017 IEEE International Ultrason. Symp.
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz2017

    • Author(s)
      K.-H. Sano, R. Karasawa, and T. Yanagitani
    • Organizer
      The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'17)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Broadband frequency viscosity measurement using low TCF shear mode resonators consisting of c-axis tilted ScAlN thin film on thick AT-Cut quartz plate2017

    • Author(s)
      Y. Yamakawa, K. Sano, R. Karasawa, and T. Yanagitani
    • Organizer
      The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'17)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Polarity inverted PZT/PbTiO3 ferroelectric epitaxial film for frequency switchable resonator filters"2017

    • Author(s)
      T. Shimizu; T.Mori, M. Suzuki; T. Yanagitani, and K. Wasa
    • Organizer
      12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Liquid gigahertz viscosity sensors using shear mode c-axis tilted ScAlN piezoelectric thin films2017

    • Author(s)
      Y. Yamakawa, R. Karasawa; T. Mori; K. Sano; M. Suzuki and T. Yanagitani
    • Organizer
      12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High electromechanical coupling thick ScAlN piezoelectric films for ultrasonic generation in low frequency of 80MHz2017

    • Author(s)
      K. Sano, R. Karasawa, and T. Yanagitani
    • Organizer
      12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High efficiency ScAlN thick film hydrophone operating in the ranges of 40-80 MHz2017

    • Author(s)
      K-h. Sano, R. Karasawa, T. Yanagitani
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] “Effects of highly energetic negative ions generated from Sc grains during sputtering deposition on electromechanical properties of ScAlN film”2017

    • Author(s)
      S. Takayanagi, T. Yanagitani
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] “Induced electrical potentials in cortical bone under shear ultrasound exposure2017

    • Author(s)
      T. Makino, K. Takano , S. Nakanishi , D. Koyama, S. Takayanagi , T. Yanagitani , M. Matsukawa
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] Polarity inverted ScAlN films for application to transformer in rectenna2017

    • Author(s)
      R. Karasawa, T. Yanagitani
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] c-Axis tilted ScAlN film on sapphire substrate for SAW devices with high electromechanical coupling2017

    • Author(s)
      S. Tokuda, S. Takayanagi, M. Matsukawa, T. Yanagitani
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] Simple and rapid measurement of hypersonic wave velocity by Brillouin scattering method2017

    • Author(s)
      Y. Shibagaki, M. Kawabe, S. Takayanagi, T. Yanagitani
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] Simultaneous viscosity evaluation in the MHz to GHz range with low TCF resonators consisting of shear mode piezoelectric thin films on AT-cut quartz crystal”2017

    • Author(s)
      Y. Yamakawa, R. Karasawa, T. Shimidzu ,T. Yanagitani
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] Film growth of c-axis parallel oriented ZnO films by RF magnetron sputtering for improvement of electromechanical properties2017

    • Author(s)
      K. Mori, S. Takayanagi, M. Matsukawa, T. Yanagitani
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] PMN paraelectric phase epitaxial film for DC field-induced frequency switchable filter2017

    • Author(s)
      T. Shimidzu, K. Wasa , T. Yanagitani
    • Organizer
      The 38th Symposium on Ultrasonic Electronics
    • Related Report
      2017 Annual Research Report
  • [Presentation] c 軸傾斜配向 ScAlN/AT カット水晶基板構造の低 TCF 横波 HBAR を用いた MHz 帯-GHz 帯粘性評価2017

    • Author(s)
      山川愉生, 佐野耕平, 唐澤嶺, 柳谷隆彦
    • Organizer
      第46回EMシンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 清水貴博, 柳谷隆彦, 和佐清孝2017

    • Author(s)
      チューナブルフィルタを目指した PMN 常誘電相エピ膜の電界誘起圧電特性と分極反転特性」
    • Organizer
      第46回EMシンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 高電気機械結合係数を持つ80MHz 帯 ScAlN 厚膜のハイドロフォン応用への検討2017

    • Author(s)
      佐野耕平, 唐澤嶺, 柳谷隆彦
    • Organizer
      第46回EMシンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] ウルツ鉱型圧電薄膜による横波を用いたMHz-GHz帯における液体の粘性評価2017

    • Author(s)
      山川愉生, 清水貴博, 唐澤嶺, 柳谷隆彦
    • Organizer
      日本音響学会2017秋季研究発表会 (日本, 愛媛)
    • Related Report
      2017 Annual Research Report
  • [Presentation] 励起フォノンを用いたBrillouin散乱測定の高速化に関する検討2016

    • Author(s)
      柴垣慶明, 川部昌彦, 柳谷隆彦, 高柳真司, 鈴木雅視, 松川真美
    • Organizer
      第58回光波センシング技術研究会
    • Place of Presentation
      東京理科大学 神楽坂校舎 森戸記念館
    • Year and Date
      2016-12-08
    • Related Report
      2016 Annual Research Report
  • [Presentation] c-axis tilted ScAlN shear wave acoustic Bragg reflect resonator for gigahertz viscosity measurement2016

    • Author(s)
      Takeshi Mori, Yui Yamakawa, Rei Karasawa, Ko-hei Sano,Takahiko Yanagitani, Shinji Takanayanagi
    • Organizer
      5th Joint Meeting of the Acoustical Society of America and Acoustical Society of Japan
    • Place of Presentation
      Hilton Hawaiian Village
    • Year and Date
      2016-11-28
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Temperature stable liquid gigahertz viscosity sensors by combining shear mode piezoelectric ScAlN thin film and AT-cut quartz crystal plate2016

    • Author(s)
      Ko-hei Sano, Takeshi Mori, Rei Karasawa, Takahiko Yanagitani
    • Organizer
      5th Joint Meeting of the Acoustical Society of America and Acoustical Society of Japan
    • Place of Presentation
      Hilton Hawaiian Village
    • Year and Date
      2016-11-28
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High electromechanical coupling of sezawa mode SAW using a polarization-inverted ScAlN film/highvelocity substrate structure2016

    • Author(s)
      Shinji Takayanagi, Takahiko Yanagitani
    • Organizer
      The 37th Symposium on Ultrasonic Electronics
    • Place of Presentation
      釜慶大学
    • Year and Date
      2016-11-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Piezoelectric stiffening in the thickness direction of c-plane ZnO single crystal measured by Brillouin2016

    • Author(s)
      Shota Tomita, Takahiko Yanagitani, Shinji Takayanagi, Mami Matsukawa
    • Organizer
      The 37th Symposium on Ultrasonic Electronics
    • Place of Presentation
      釜慶大学
    • Year and Date
      2016-11-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of piezoelectricity in bone by ultrasound irradiation2016

    • Author(s)
      Sayaka Matsukawa1, Shunki Mori, Daisuke Koyama, Shinji Takayanagi, Katsunori Mizuno Takahiko Yanagitani, Mami Matsukawa
    • Organizer
      The 37th Symposium on Ultrasonic Electronics
    • Place of Presentation
      釜慶大学
    • Year and Date
      2016-11-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High electromechanical coupling of Sezawa mode SAW in c-axis-parallel-oriented ScAlN film/high-velocitysubstrate structures2016

    • Author(s)
      S. Takayanagi, M. Matsukawa, T. Yanagitani
    • Organizer
      2016 IEEE International Ultrason. Symp
    • Place of Presentation
      VINCI convention center, Tours
    • Year and Date
      2016-09-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electromechanicalcoupling hysteresis curvesof Pb(Zr,Ti)O<sub>3</sub>and PbTiO<sub>3</sub>epitaxial films determinedby ultrasonic measurementusing film/substratestructure2016

    • Author(s)
      T. Mori, M. Suzuki, S. Takayanagi, T. Yanagitani
    • Organizer
      2016 IEEE International Ultrason. Symp
    • Place of Presentation
      VINCI convention center, Tours
    • Year and Date
      2016-09-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The frequencyswitchable resonatorconsisting of polarityinverted Pb(Zr,Ti)O<sub>3</sub>/PbTiO<sub>3</sub>epitaxial multilayer2016

    • Author(s)
      T. Mori, M. Suzuki,T. Yanagitani
    • Organizer
      2016 IEEE International Ultrason. Symp
    • Place of Presentation
      VINCI convention center, Tours
    • Year and Date
      2016-09-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of viscousliquid using resonance andanti-resonance of thicknessshearmode resonatorconsisting of c-axis paralleloriented ZnO film2016

    • Author(s)
      R. Iwanaga, S. Takayanagi, Y. Watanabe, M. Matsukawa, T. Tsuchiya, T. Yanagitani
    • Organizer
      2016 IEEE International Ultrason. Symp
    • Place of Presentation
      VINCI convention center, Tours
    • Year and Date
      2016-09-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Improvement ofelectromechanical propertiesin c-axis parallel orientedZnO film by RF magnetronsputtering with negative ionbombardment2016

    • Author(s)
      K. Mori, S. Takayanagi, M. Matsukawa, T. Yanagitani
    • Organizer
      2016 IEEE International Ultrason. Symp
    • Place of Presentation
      VINCI convention center, Tours
    • Year and Date
      2016-09-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Rapid and simultaneousmeasurement of longitudinaland shear wave velocitiesby Brillouin scattering fromartificially induced phonons2016

    • Author(s)
      M. Kawabe, T. Yanagitani, S. Takayanagi, Y. Shibagaki, M. Suzuki, M. Matsukawa
    • Organizer
      2016 IEEE International Ultrason. Symp
    • Place of Presentation
      VINCI convention center, Tours
    • Year and Date
      2016-09-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Anisotropic behavior ofinduced electric potentialsin bone by ultrasoundirradiation2016

    • Author(s)
      S. Matsukawa, S. Mori, Isao Mano, T. Yanagitani, K. Mizuno, S.Takayanagi, M. Matsukawa
    • Organizer
      2016 IEEE International Ultrason. Symp
    • Place of Presentation
      VINCI convention center, Tours
    • Year and Date
      2016-09-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Brillouin scatteringstudy on piezoelectricstiffening effect in thethickness direction ofc-plane ZnO single crystal2016

    • Author(s)
      S. Tomita, T. Yanagitani, S. Takayanagi, H. Ichihashi, M. Matsukawa
    • Organizer
      2016 IEEE International Ultrason. Symp
    • Place of Presentation
      VINCI convention center, Tours
    • Year and Date
      2016-09-18
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ScAlN薄膜トランスデューサを用いた縦波・横波のブリュアン散乱光の同時増幅2016

    • Author(s)
      柴垣慶明,川部昌彦,柳谷隆彦,高柳真司,鈴木雅視,松川真美
    • Organizer
      日本音響学会2016年秋季研究発表会
    • Place of Presentation
      富山大学五福キャンパス
    • Year and Date
      2016-09-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Electromechanical coupling hysteresis curves of Pb(Zr,Ti)O3 epitaxial films determined by GHz ultrasonic method using film/substrate structure2016

    • Author(s)
      Takahiko Yanagitani and Masashi Suzuki
    • Organizer
      13th International Workshop on Piezoelectric Materials and Applications in Actuators & Energy Conversion Materials and Devices 2016
    • Place of Presentation
      Seogwipo KAL Hotel, Jeju, Korea
    • Year and Date
      2016-08-21
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Polarity inverted Pb(Zr,Ti)O3/PbTiO3 epitaxial multilayer frequency switchable resonator in the GHz range2016

    • Author(s)
      Takeshi Mori, Takahiko Yanagitani, and Kiyotaka Wasa
    • Organizer
      13th International Workshop on Piezoelectric Materials and Applications in Actuators & Energy Conversion Materials and Devices 2016
    • Place of Presentation
      Seogwipo KAL Hotel, Jeju, Korea
    • Year and Date
      2016-08-21
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 超音波顕微鏡プローブ用の新しい圧電薄膜材料2016

    • Author(s)
      柳谷隆彦
    • Organizer
      第8回バイオ超音波顕微鏡研究会
    • Place of Presentation
      東北大学東京分室
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Remarks] 研究室HP

    • URL

      http://www.eb.waseda.ac.jp/yanagitani/index.html

    • Related Report
      2016 Annual Research Report

URL: 

Published: 2016-04-21   Modified: 2021-02-19  

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