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Novel space optics using vertically curved silicon waveguides

Research Project

Project/Area Number 16H04359
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

Sakakibara Youichi  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 総括研究主幹 (40357091)

Co-Investigator(Kenkyū-buntansha) 渥美 裕樹  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員 (30738068)
吉田 知也  国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 (80462844)
Research Collaborator KAJI ryosaku  
Project Period (FY) 2016-04-01 – 2019-03-31
Project Status Completed (Fiscal Year 2018)
Budget Amount *help
¥17,030,000 (Direct Cost: ¥13,100,000、Indirect Cost: ¥3,930,000)
Fiscal Year 2018: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2017: ¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2016: ¥10,140,000 (Direct Cost: ¥7,800,000、Indirect Cost: ¥2,340,000)
Keywordsシリコンフォトニクス / 導波路 / イオン注入 / 空間光学 / 光デバイス / フェーズアレー / 光デバイス・光回路
Outline of Final Research Achievements

For vertically curved silicon waveguide couplers to be applied to space optics using silicon photonics, we pursued a technology to control the propagation profile of the light beam in the free space emitted from the couplers. With numerical analysis we invented a new device structure that enables vertical turning of the beam propagation direction and transformation of the beam propagation profile. We experimentally developed manufacturing methods using ion implantation and so on to realize such a device structure, and succeeded in fabricating a device with the target beam propagation profile with small radiation loss and wavelength dependence.

Academic Significance and Societal Importance of the Research Achievements

十分解明されていなかった立体湾曲シリコン導波路カプラの光伝搬の仕組みを物理的に解明し、光ビームの空間的広がり方を制御できる新しいデバイス構造を理論的および実験的に創出することができた。この成果はビームステアリングなどのシリコンフォトニクスの新しい空間光学的応用に直結するのみならず、光ファイバーとの光入出力にも応用可能であり、光センサーや光通信など今後の発展が期待されている基幹科学技術分野の基盤的技術としての活用が期待できる。

Report

(4 results)
  • 2018 Annual Research Report   Final Research Report ( PDF )
  • 2017 Annual Research Report
  • 2016 Annual Research Report
  • Research Products

    (14 results)

All 2019 2018 2017

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (11 results) (of which Int'l Joint Research: 7 results,  Invited: 2 results)

  • [Journal Article] Low-Loss and Broadband Optical Coupler Based on Lensed-Top Vertically Curved Silicon Waveguide2019

    • Author(s)
      Atsumi Yuki、Yoshida Tomoya、Omoda Emiko、Sakakibara Youichi
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 31 Issue: 8 Pages: 603-606

    • DOI

      10.1109/lpt.2019.2903233

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Broad-band surface optical coupler based on a SiO2-capped vertically curved silicon waveguide2018

    • Author(s)
      Atsumi Yuki、Yoshida Tomoya、Omoda Emiko、Sakakibara Youichi
    • Journal Title

      Optics Express

      Volume: 26 Issue: 8 Pages: 10400-10400

    • DOI

      10.1364/oe.26.010400

    • Related Report
      2018 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Design of compact surface optical coupler based on vertically curved silicon waveguide for high-numerical-aperture single-mode fiber2017

    • Author(s)
      Y. Atsumi, T. Yoshida, E. Omoda, Y. Sakakibara
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 56 Issue: 9 Pages: 090307-090307

    • DOI

      10.7567/jjap.56.090307

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Presentation] Broadband and Polarization Insensitive Surface Optical Coupler Using Vertically Curved Waveguides Fabricated with ArF-immersion Lithography2019

    • Author(s)
      T. Yoshida、, Y. Atsumi, E. Omoda, and Y. Sakakibara
    • Organizer
      The Optical Networking and Communication Conference & Exhibition (OFC), San Diego, 2019/03/05
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] シングルモードファイバとの結合に向けたエレファントカプラの設計2019

    • Author(s)
      渥美 裕樹、吉田 知也、榊原 陽一
    • Organizer
      電子情報通信学会2019年総合大会,早稲田大学(東京)、2019/03/22
    • Related Report
      2018 Annual Research Report
  • [Presentation] High-Performance Surface Optical Coupler Based on SiO2-Capsuled Vertically Curved Si Waveguide2018

    • Author(s)
      Y. Atsumi, T. Yoshida, E. Omoda, and Y. Sakakibara
    • Organizer
      The 44th European Conference on Optical Communication (ECOC), We2.9, Roma, Italy, 2018/9/26
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ArF液浸リソグラフィで作製したエレファントカプラ2018

    • Author(s)
      吉田 知也、渥美 裕樹、面田 恵美子、榊原 陽一
    • Organizer
      電子情報通信学会2018年ソサイエティ大会, C-3-44, 金沢市, 2018/09/13
    • Related Report
      2018 Annual Research Report
  • [Presentation] Vertically-bent silicon waveguide for high-efficiency optical fiber coupling2018

    • Author(s)
      Y. Sakakibara, Y. Atsumi, E. Omoda and T. Yoshida
    • Organizer
      SPIE Photonics Europe 2018 Conference 10686 “Silicon Photonics: from Fundamental Research to Manufacturing” 10686-27 25 April 2018, Strasbourg, France
    • Related Report
      2018 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Characterization of coupling properties of vertically curved Si surface optical coupler designed for coupling with 5-μm-MFD SMF2018

    • Author(s)
      Y. Atsumi, T. Yoshida, E. Omoda, Y. Sakakibara
    • Organizer
      The Optical Networking and Communication Conference & Exhibition (OFC)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Three Dimensional Silicon Optical Waveguide Structure Bent by Ion Implantation for Surface Coupling2018

    • Author(s)
      Y. Sakakibara, Y. Atsumi and T. Yoshida
    • Organizer
      The Optical Networking and Communication Conference & Exhibition (OFC)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 5umスポット径有する広帯域・高効率結合エレファントカプラの実現2018

    • Author(s)
      渥美 裕樹、吉田 知也、面田 恵美子、榊原 陽一
    • Organizer
      電子情報通信学会2018年総合大会
    • Related Report
      2017 Annual Research Report
  • [Presentation] Large mode-field-diameter surface optical coupler based on SiO2-capsuled vertically curved Si waveguide2017

    • Author(s)
      Y. Atsumi, T. Yoshida, E. Omoda, Y. Sakakibara
    • Organizer
      The Optical Networking and communication Conference & Exhibition (OFC)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] abrication of vertically curved Si surface optical coupler coupling with 5-μm-mode-field-diameter optical fiber2017

    • Author(s)
      Y. Atsumi, T. Yoshida, E. Omoda, Y. Sakakibara
    • Organizer
      International Conference on Group IV Photonics(GFP)
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 高NAシングルモード光ファイバ実装に向けた高効率エレファントカプラの提案2017

    • Author(s)
      渥美 裕樹、吉田 知也、面田 恵美子、榊原 陽一
    • Organizer
      第64回応用物理学会春季学術講演会
    • Related Report
      2017 Annual Research Report

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Published: 2016-04-21   Modified: 2020-03-30  

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